記述言語：日本語   掲載種別：研究論文（研究会，シンポジウム資料等）

記述言語：日本語   掲載種別：研究論文（研究会，シンポジウム資料等）

記述言語：日本語   掲載種別：研究論文（学術雑誌）

<p>基材表面への微細加工の手法として、エッチング加工が挙げられる。特にシリコンの深掘りエッチング(DRIE)は、シリコン基材の表面に微小な3次元構造体を加工・構築するために重要な技術であり、樹脂成形のための鋳型構造の作製にも適用可能である。本研究では、DRIEを含む多段階のエッチング加工を用いて、シリコン基材表面に複合形状の微小柱状構造アレイを作製した結果を報告する。</p>

DOI： 10.11522/pscjspe.2023s.0_642

CiNii Research

担当区分：筆頭著者,　責任著者   記述言語：英語   掲載種別：研究論文（学術雑誌）

In this study, the electrical conductivity of low-volume samples was measured using a prototype microfluidic chip with electrodes. We were able to show the difference of electrical conductivity in the samples of saline solution (0.9w/v% NaCl solution) with sucrose. The correlation between the electrical conductivity and the viscosity evaluated by the capillary method was shown. This correlation was shown that it is possible to evaluate viscosity based on the Walden's rule with our chip.

DOI： 10.1002/ecj.12387

Scopus

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担当区分：筆頭著者,　責任著者   記述言語：日本語   掲載種別：研究論文（研究会，シンポジウム資料等）

担当区分：筆頭著者,　責任著者   記述言語：英語   掲載種別：研究論文（国際会議プロシーディングス）

担当区分：筆頭著者   記述言語：日本語   掲載種別：研究論文（学術雑誌）

<p>In this study, the electrical conductivity of low-volume samples was measured using a prototype microfluidic chip with electrodes. We were able to show the difference of electrical conductivity in the samples of saline solution (0.9w/v% NaCl solution) with sucrose. The correlation between the electrical conductivity and the viscosity evaluated by the capillary method was shown. This correlation was shown that it is possible to evaluate viscosity based on the Walden's rule with our chip.</p>

DOI： 10.1541/ieejsmas.142.254

Scopus

CiNii Research

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担当区分：筆頭著者,　責任著者   記述言語：英語   掲載種別：研究論文（学術雑誌）

In this study, we newly considered the analysis of capillary flow under differential pressure, which extends the previous study and allows the independent measurement of relative viscosity and the product of relative surface tension and contact angle for low-volume samples. The theory of this method is explained, and it is demonstrated that relative viscosity and surface tension with contact angle can be obtained independently by measuring the capillary flow under differential pressure. We conducted capillary flow experiments with a small sample volume (less than 100 μl) using a measurement system comprising a flow measurement unit, capillary chip, and differential pressure mechanism. The relative viscosities of pure water and dilute ethanol solutions obtained in the experiment were in one-to-one correspondence with the values in the Chemical Handbook. This also shows that relative surface tension can be determined using these measurement results and the separately measured contact angle values.

DOI： 10.35848/1347-4065/ac6d94

Scopus

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担当区分：筆頭著者   記述言語：日本語   掲載種別：研究論文（研究会，シンポジウム資料等）

担当区分：責任著者   記述言語：英語   掲載種別：研究論文（国際会議プロシーディングス）

担当区分：筆頭著者   記述言語：日本語   掲載種別：記事・総説・解説・論説等（商業誌、新聞、ウェブメディア）

担当区分：筆頭著者   記述言語：英語   掲載種別：研究論文（学術雑誌）

© 2020 The Japan Society of Applied Physics. In this paper, methods for measuring the viscosity and surface tension of low-volume liquid samples are proposed. Viscosity is measured by recording the motion of a liquid driven by surface tension through a horizontal glass capillary tube. Surface tension is determined by connecting a container of a constant volume to the distal end of the capillary tube and measuring the penetration distance of the liquid entering via the proximal end. Sucrose solutions of various concentrations (0-50 wt%) were measured as samples, and the determined viscosities were confirmed to be consistent with the tabulated values provided in the Handbook of Chemistry. The surface tension was found to be constant within the measurement sensitivity of the device regardless of the sucrose concentration.

DOI： 10.35848/1347-4065/abb9c8

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担当区分：筆頭著者,　責任著者   記述言語：日本語   掲載種別：研究論文（研究会，シンポジウム資料等）

DOI： 10.11470/jsapmeeting.2020.1.0_2556

CiNii Research

記述言語：英語   掲載種別：研究論文（学術雑誌）

<p>To protect a satellite from accidents due to spacecraft charging, Kyushu Institute of Technology (Kyutech) is developing a device called ELFs-Charm, which stands for ELectron-emitting Film for Spacecraft CHARging Mitigation. Electron emission from ELFs-Charm was already confirmed in Polar Earth Orbit in 2012 via flight experiment onboard HORYU-II. As a next step, we are considering the practical operation for spacecraft charging mitigation. The present emission level is not enough to increase the satellite potential. We focus our efforts on improving two properties, charging property and the emission threshold. The charging property is measured by how well the differential voltage between the ELFs-charm insulator surface and the satellite chassis increases. The emission threshold is measured by the differential voltage when the electron emission starts. This paper reports the laboratory experimental results to measure the two properties of various samples. The sample made of fluorin resin coating had a good combination of the charging property and the emission threshold that makes it possible to emit electron under realistic ambient electron current density in orbit.</p>

DOI： 10.2322/tastj.17.1

CiNii Article

CiNii Research

その他リンク： https://ci.nii.ac.jp/naid/130007542851

記述言語：英語   掲載種別：研究論文（学術雑誌）

<p>A silicon X-ray sensor with trench-structured photodiodes was studied and the influence of Compton scattering was estimated. By irradiating the target pixel with X-rays and measuring the signal from adjacent pixels, X-ray scattering and pixel blur of the proposed sensor was determined. An X-ray sensor with a length of 22.6 mm was designed and fabricated, and its modulation transfer function (MTF) was obtained. A sensor structure to improve the MTF level to that of CdTe was proposed.</p>

DOI： 10.1587/elex.15.20180177

Scopus

CiNii Article

CiNii Research

その他リンク： https://ci.nii.ac.jp/naid/130007395665

記述言語：英語   掲載種別：研究論文（学術雑誌）

© 2018 The Japan Society of Applied Physics. In this paper, we report a direct-conversion-type X-ray sensor composed of trench-structured silicon photodiodes, which achieves a high X-ray-to-current conversion efficiency under side X-ray irradiation. The silicon X-ray sensor with a length of 22.6mm and a trench depth of 300 μm was fabricated using a single-poly single-metal 0.35μm process. X-rays with a tube voltage of 80kV were irradiated along the trench photodiode from the side of the test chip. The theoretical limit of X-ray-to-current conversion efficiency of 83.8% was achieved at a low reverse bias voltage of 25 V. The X-ray-to-electrical signal conversion efficiency of conventional indirect-conversion-type X-ray sensors is about 10%. Therefore, the developed sensor has a conversion efficiency that is about eight times higher than that of conventional sensors. It is expected that the developed X-ray sensor will be able to markedly lower the radiation dose required for X-ray diagnoses.

DOI： 10.7567/JJAP.57.04FH04

Scopus

CiNii Article

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記述言語：英語   掲載種別：研究論文（学術雑誌）

To reduce the radiation dose required in medical X-ray diagnoses, we propose a high-sensitivity direct-conversion-type silicon X-ray sensor that uses trench-structured photodiodes. This sensor is advantageous in terms of its long device lifetime, noise immunity, and low power consumption because of its low bias voltage. With this sensor, it is possible to detect X-rays with almost 100% efficiency; sensitivity can therefore be improved by approximately 10 times when compared with conventional indirect-conversion-type sensors. In this study, a test chip was fabricated using a single-poly single-metal 0.35 µm process. The formed trench photodiodes for the X-ray sensor were approximately 170 and 300 µm deep. At a bias voltage of 25 V, the absorbed X-ray-to-current signal conversion efficiencies were 89.3% (theoretical limit; 96.7%) at a trench depth of 170 µm and 91.1% (theoretical limit; 94.3%) at a trench depth of 300 µm.

DOI： 10.7567/JJAP.56.04CH06

Scopus

CiNii Article

その他リンク： http://ci.nii.ac.jp/naid/150000113752

担当区分：責任著者   記述言語：英語   掲載種別：研究論文（国際会議プロシーディングス）

© 15CBMS-0001. We evaluated the correctly efficiency of the cell isolation column for a new allergic diagnostic chip. Our allergic diagnostic chip isolates basophils from leukocytes. This chip allows the allergic diagnosis with the less than 1 ml of the peripheral blood. The key mechanism of our cell isolation column is the collection of cells by the magnetic force. We evaluated the efficiency of the column by the selectivity factor. The results of the evaluation suggest that our chips are capable of isolating cells for the allergic diagnosis.

Scopus

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記述言語：日本語   掲載種別：研究論文（学術雑誌）

5つの変位計を一体成型した平面形状測定用のデバイスを製作した．本デバイスはMEMSセンサであるためセンサ配置誤差が小さいという特徴を持つ．デバイスの製作にあたり，第４報で示した水ガラスを用いた回路保護方法を改善することで，水ガラス保護層のムラをなくし，ウェットエッチングの際により確実な回路保護を可能にした．また，ドライエッチングによって探針面のみをエッチングする新たな方法での探針製作を試みた．

DOI： 10.11522/pscjspe.2015S.0_135

CiNii Article

その他リンク： http://ci.nii.ac.jp/naid/130005486175

記述言語：英語   掲載種別：研究論文（学術雑誌）

<br><br>表面プラズモン共鳴（ＳＰＲ）センサは、センサチップ上の屈折率変化を、無標識でリアルタイム、かつ高感度に検出できる。我々はこれまでに、ＳＰＲ法を応用して、個々の生細胞の刺激応答を屈折率変化として可視化できる、ＳＰＲイメージングセンサを開発した。さらに、マイクロ流体デバイスと組み合わせることにより、1チップ上で末梢血からの細胞分離、細胞搬送、刺激応答の観察を行える、臨床検査用デバイスを開発した。

DOI： 10.14886/sssj2008.35.0_414

CiNii Article

その他リンク： http://ci.nii.ac.jp/naid/130005489463

担当区分：筆頭著者   記述言語：英語   掲載種別：研究論文（国際会議プロシーディングス）

© 14CBMS. We proposed a new allergic diagnostic chip applied with human basophils activation. Surface plasmon resonance (SPR) imaging biosensors using human basophils activation allows the allergic diagnosis with the less than 1 milliliter of peripheral blood [1] [2] [3]. However the isolation of basophilic leukocytes from small amount of blood sample is not easy because population rate of basophils in peripheral blood leukocytes is usually only 0.5%. In this presentation, we introduce the integrated chip of SPR imaging biosensors and micro-isolation column for those small amount of basophilic leukocytes. Then the isolation and detection performance of the integrated chip is checked.

Scopus

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記述言語：英語   掲載種別：研究論文（学術雑誌）

MEMS技術を応用し，機械加工面の真直度を高精度に測定するためのマルチカンチレバー変位測定デバイスの要素製作を行った．薬液組成の調整やエッチング時のウェハの姿勢の変更により，シリコンウェハ表面を鏡面に保ちつつ高さ約250μmの探針を製作することに成功した．また，ピエゾ抵抗体を用いた変位検出回路を製作して，先端変位に対して抵抗値変化が生じることを確認し，本デバイスによる変位測定が可能であることを確認した．

DOI： 10.11522/pscjspe.2014S.0_49

CiNii Article

その他リンク： https://ci.nii.ac.jp/naid/130005478921

記述言語：英語   掲載種別：研究論文（国際会議プロシーディングス）

Miniaturization and simplification of chemical analysis systems are very important aspects for the use of environmental monitoring and at-home diagnosis. On the other hand, variety of chemical processes in answer to the requirements of the variety of analytical target has to be performed on that simple system set-up. Therefore, we proposed the quick fabrication method of variety of micro fluidic devices by using 3-D printer assisted with laser carving technology and the concept which allows us to reconfigure the fluid circuit quickly by plugging and changing the fluidic devices (we call it Plug & Flow platform).

Scopus

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記述言語：英語   掲載種別：研究論文（国際会議プロシーディングス）

New concept of paper-based devices (we call "paper analysis chip") and inkjet printer-like analyzer for clinical diagnostics has been presented. We proposed new liquid-handling mechanisms realized on the paper chips. An original paper material of the chips (we call it "functional paper") was made by a newly developed paper-making process with adding SAP (super absorbent polymer). By using demonstrate paper chip, the validity of the mechanisms was confirmed. Especially, in order to determine sample and reagent volume, the NC-valve (normally close, actively open) by accumulated paper material was developed. Pumps, NO (normally open)-valves, NC-valves, which were necessary and sufficient elements for micro liquid handling on paper were completed. © 2012 IEEE.

DOI： 10.1109/MEMSYS.2012.6170354

Scopus

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記述言語：英語   掲載種別：研究論文（学術雑誌）

The DNA transistor is quick, easy and useful sensor of DNA sequencing. But its sequencing requires some chemical liquids and we need external pumps and tubes to provide to the sensor. As a result, the sequencing system is so complex and large. To improve sequencing tools, we consider the integrated system of sensor with pump. In this study, we present the integrated system of sensor (pH sensor) with micro-pump and the monolithic process of the integrated device. We evaluate the micro-pump driving of some liquid samples using pH sensor. © 2012 The Institute of Electrical Engineers of Japan.

DOI： 10.1541/ieejsmas.132.86

Scopus

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記述言語：英語   掲載種別：研究論文（国際会議プロシーディングス）

This paper describes a newly proposed Microbe Counter with Biochemical Quantization to improve a low repro-ducibility of a conventional ATP method for hygienic management. The counter consists of a mixer, a microfluidic droplet generator, and a detector. Biochemical quantization by microfluidic droplets includes a partitioning step of sample water into droplets consisting one or less microbe and a detection step of each droplets. The concept is statistically discussed to show required specification for the counter. Yeast cell quantization, biochemiluminescence on a chip, mixing and reaction in microfluidic droplets, and biochemiluminescence in microfluidic droplets were also demonstrated and discussed.

Scopus

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記述言語：英語   掲載種別：研究論文（国際会議プロシーディングス）

New concept of paper-based devices (we call "paper MEMS chip") and ink-jet printer-like analyzer for clinical diagnostics is presented. A water-resisting paper coated with poly-olefin resin was selected for the chip's material, and the micro-channels were successfully fabricated by using hot-embossing process on the paper. Pressure resistance was evaluated by feeding water into the micro-channel of a paper chip and the channel could stand practical pressure level more than 100 kPa. Liquid flow driven by capillary force was observed in the proto-type of paper MEMS chip.

Scopus

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記述言語：英語   掲載種別：研究論文（学術雑誌）

We construct numerical solutions for non-topological solitons in threedimensional U(1) gauged N = 2 supergravity. We find the region of the solutions showing with the BTZ mass, the angular momentum and the magnetic flux and discuss the relation among the physical parameters for various values of a cosmological constant.

Scopus

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担当区分：筆頭著者,　責任著者   記述言語：英語   掲載種別：研究論文（学術雑誌）

We discuss the quantum states in the moduli space, which are constructed with maximally charged dilaton black holes. Considering the quantum mechanics in the moduli space, we obtain the asymptotic states for the near-coincident black holes and the widely separated black holes. We study the scattering process of the dilaton black holes with the asymptotic states. In the scattering process, the quantum effects in the black hole moduli space are investigated.

DOI： 10.1103/PhysRevD.70.104013

Scopus

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担当区分：筆頭著者   記述言語：英語   掲載種別：研究論文（学術雑誌）

We calculate the effective potential for the WLPNGB in a world with a circular latticized extra dimension. The mass of the Wilson line pseudo-Nambu-Goldstone boson (WLPNGB) is calculated from the one-loop quantum effect of scalar fields at zero and finite temperature. We show that a series expansion by the modified Bessel functions is useful to calculate the one-loop effective potentials.

DOI： 10.1140/epjc/s2003-01181-9

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記述言語：英語   掲載種別：研究論文（学術雑誌）

We construct a six-dimensional Maxwell theory using a latticized extra space, the continuum limit of which is a shifted torus recently discussed by Dienes. This toy model exhibits a correspondence between continuum theory and discrete theory, and gives a geometrical insight into theory-space model building.

DOI： 10.1088/0954-3899/29/4/301

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記述言語：英語   掲載種別：研究論文（学術雑誌）

Noncommutative gravity in three dimensions with vanishing cosmological constant is examined. We find a solution which describes a space-time in the presence of a torsional source. We estimate the phase shift for each partial wave of a scalar field in the space-time by the Born approximation.

Scopus

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担当区分：筆頭著者   記述言語：英語   掲載種別：研究論文（学術雑誌）

We discuss the quantum scattering process in a moduli space consisting of two maximally charged dilaton black holes. The black hole moduli space geometry has different structures for arbitrary dimensions and various values of the dilaton coupling. We study the quantum effects of the different moduli space geometries with scattering process. Then, it is found that there is a resonance state on certain moduli spaces. © 2003 The American Physical Society.

DOI： 10.1103/PhysRevD.68.025019

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担当区分：筆頭著者   記述言語：英語   掲載種別：記事・総説・解説・論説等（学術雑誌）

We discuss quantum mechanics in the moduli space consisting of two maximally charged dilaton black holes. The quantum mechanics of the two-black-hole system is similar to the one of the de Alfaro-Fubini-Furlan model, and this system has the SL(2,R) conformal symmetry. Also, we discuss the bound states in this system. © 2002 The American Physical Society.

DOI： 10.1103/PhysRevD.66.024004

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担当区分：筆頭著者   記述言語：英語   掲載種別：研究論文（学術雑誌）

Solutions for rotating boson stars in (2+1)-dimensional gravity with a negative cosmological constant are obtained numerically. The mass, particle number, and radius of the (2+1)-dimensional rotating boson star are shown. Consequently we find the region where the stable boson star can exist. ©2000 The American Physical Society.

DOI： 10.1103/PhysRevD.62.124014

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担当区分：筆頭著者   記述言語：英語   掲載種別：研究論文（学術雑誌）

We solve the Einstein equations coupled to a complex scalar field with an infinitely large self-interaction, degenerate fermions, and a negative cosmological constant in 2+1 dimensions. Exact solutions for static boson-fermion stars are found when circular symmetry is assumed. We find that the minimum binding energy of a boson-fermion star takes a negative value if the value of the cosmological constant is sufficiently small. © 1998 The American Physical Society.

DOI： 10.1103/PhysRevD.58.124017

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担当区分：筆頭著者   記述言語：英語   掲載種別：研究論文（学術雑誌）

An exact solution for a nonrotating boson star in (2 + 1) dimensional gravity with a negative cosmological constant is found. The relations among mass, particle number, and radius of the (2 + 1) dimensional boson star are shown.

DOI： 10.1088/1126-6708/1998/07/015

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開催期間： 2021年11月09日 - 2021年11月11日   記述言語：日本語  

開催期間： 2021年10月26日 - 2021年10月29日   記述言語：英語  

出願番号：特願2021-019552  出願日：2021年02月10日

出願番号：2019-114609  出願日：2019年06月20日

対象： 社会人・一般

種別：セミナー・ワークショップ

社会人向けの半導体製造に関するセミナー

対象： 社会人・一般

種別：セミナー・ワークショップ

社会人向けの半導体製造に関するセミナー

対象： 社会人・一般

種別：セミナー・ワークショップ

社会人向けの半導体製造に関するセミナー

種別：セミナー・ワークショップ

種別：セミナー・ワークショップ