Affiliation
Graduate School of Life Science and Systems Engineering Department of Life Science and Systems Engineering
Job
Associate Professor
E-mail
Laboratory
2-4 Hibikino, Wakamatsu-ku, Kitakyushu-shi, Fukuoka
External link
Muhammad Salman AL FARISI
Scopus Paper Info
Total Paper Count: 46 Total Citation Count: 243 h-index: 8
Undergraduate Education
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2016.03 Tohoku University Faculty of Engineering Department of Mechanical and Aerospace Engineering Graduated
Post Graduate Education
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2021.03 Tohoku University Graduate School, Division of Engineering Doctoral Program Completed Japan
Degree
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東北大学 - 博士（工学） 2021.03
Biography in Kyutech
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2026.04
Kyushu Institute of Technology Graduate School of Life Science and Systems Engineering Department of Life Science and Systems Engineering Associate Professor
Biography before Kyutech
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2024.04 - 2026.03 Hiroshima City University Department of Biomedical Information Sciences, Graduate School of Information Sciences Lecturer
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2021.04 - 2024.03 Hiroshima City University Department of Biomedical Information Sciences, Graduate School of Information Sciences Assistant Professor
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2019.04 - 2021.03 Tohoku University Special researcher of the Japan Society for the Promotion of Science
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2017.02 - 2017.06 Fraunhofer ENAS Visiting Researcher Germany
Papers
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Numerical characterization and optimization of the surface acoustic waves (SAW) device for cell therapy Reviewed
Mazalan M.B., Noor A.M., Wahab Y., Zaman W.S.W.K., Al Farisi M.S., Rashid A.H.A., Dung D.T.
Aip Conference Proceedings 3462 ( 1 ) 2026.03
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Single-step laser patterning and thinning of biocompatible MEMS flow sensor Reviewed
Zukri M.N.M., Al Farisi M.S., Hasegawa Y., Shikida M.
Sensors and Actuators A Physical 399 2026.03
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Tailoring NiFeOx nanostructures with molten salts synthesis for non-enzymatic electrochemical sensing of dopamine Reviewed
Hermawan A., Yasin A.P., Harahap E.F.M., Septiani N.L.W., Hardiansyah A., Jayadi , Shahid M., Al Farisi M.S., Yuliarto B.
Journal of Solid State Electrochemistry 30 ( 1 ) 375 - 388 2026.01
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Laser fabrication of Ti stent and facile MEMS flow sensor integration for implantable respiration monitoring Reviewed
Al Farisi M.S., Kawata T., Hasegawa Y., Mohamed Zukri M.N., Matsushima M., Kawabe T., Shikida M.
Sensors and Actuators A Physical 396 2025.12
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Biodegradable Tactile Sensors Using a Bioderived Ionic Liquid for Transient Ionics Reviewed
Yamada S., Al Farisi M.S., Kumemura M., Hermawan A., Honda T.
ACS Materials Au 5 ( 6 ) 1029 - 1036 2025.11
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Wearable Device for Continuous and Real-Time Monitoring of Human Sweat Sodium Reviewed
Noor A.M., Al Farisi M.S., Mazalan M., Ibrahim N.F.A., Wahab A.A., Zakaria Z., Rusli N.I., Sabani N., Manaf A.A.
Sensors 25 ( 11 ) 2025.06
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Slip-Joint Adaptor Enabling Respiratory Monitoring in Tracheal Intubation Tube Reviewed
Sueyoshi A., Al Farisi M.S., Hasegawa Y., Matsushima M., Kawabe T., Shikida M.
IEEE Sensors Journal 25 ( 16 ) 30507 - 30513 2025.01
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Pneumatic Tactile Sensor Probe With Variable Sensitivity for Palpation During Catheterization Reviewed
Al Farisi M.S., Tsuji K., Hasegawa Y., Matsushima M., Kawabe T., Shikida M.
IEEE Sensors Letters 9 ( 8 ) 2025.01
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Palm-Sized Wireless MEMS Flow Sensor System Attachable to Medical Mask for Real-Time Respiration Monitoring Reviewed
Al Farisi M.S., Tsukada T., Hasegawa Y., Matsushima M., Hasegawa S., Kawabe T., Shikida M.
International Conference on Solid State Sensors Actuators and Microsystems Transducers ( 2025 ) 582 - 585 2025.01
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Over 90% Reduction of Response Time in Flexible MEMS Thermal Sensor Using Localized Backside Laser Ablation Reviewed
Al Farisi M.S., Hasegawa Y., Shikida M.
International Conference on Solid State Sensors Actuators and Microsystems Transducers ( 2025 ) 1125 - 1128 2025.01
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On-Site Fluid Pressure Measurement Device for Vascular Flow Evaluation Reviewed
Dinata F.A., Anshori H.F., Al Farisi M.S., Iqbal M., Putra N.K.
Proceedings of the 2025 9th International Conference on Instrumentation Control and Automation Ica 2025 267 - 271 2025.01
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Laser Micromachining 3-D Free Standing Structure of MEMS Thermal Flow Sensor Reviewed
Mohamed Zukri M.N.B., Al Farisi M.S., Hasegawa Y., Shikida M.
IEEE Sensors Journal 25 ( 11 ) 18876 - 18883 2025.01
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Laser Micromachined 3D-Shaped Free-Standing Structures on Flexible Substrate for Thermal Flow Sensor Reviewed
Bin Mohamed Zukri M.N., Al Farisi M.S., Hasegawa Y., Shikida M.
International Conference on Solid State Sensors Actuators and Microsystems Transducers ( 2025 ) 2125 - 2128 2025.01
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Laser Ablation for Time Response Suppression of Flexible MEMS Thermal Sensors Reviewed
Al Farisi M.S., Toyota S., Hasegawa Y., Shikida M.
IEEE Sensors Journal 25 ( 5 ) 8079 - 8084 2025.01
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Hollow Microcatheter Actuator and MEMS Thermal Flow Sensor Hybridization Toward Respiration Measurement Inside 1 MM Diameter Bronchioles in Lung Airway Reviewed
Hirayama A., Al Farisi M.S., Hasegawa Y., Matsushima M., Kawabe T., Shikida M.
International Conference on Solid State Sensors Actuators and Microsystems Transducers ( 2025 ) 1976 - 1979 2025.01
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Facile Laser Fabrication of Flexible Free Standing Thermal Sensor for Wall Shear Stress Detection Reviewed
Sueyoshi A., Al Farisi M.S., Hasegawa Y., Shikida M.
International Conference on Solid State Sensors Actuators and Microsystems Transducers ( 2025 ) 2071 - 2074 2025.01
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Biodegradable Transient Airflow Sensor Toward Eco-Friendly Implant for Respiration Monitoring Reviewed
Nakamura R., Al Farisi M.S., Hasegawa Y., Matsushima M., Kawabe T., Shikida M.
International Conference on Solid State Sensors Actuators and Microsystems Transducers ( 2025 ) 1149 - 1152 2025.01
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Balloon Catheter with Integrated Airflow Sensor for Respiration Measurement Inside Lung Airway Reviewed
Yoshida J., Al Farisi M.S., Hasegawa Y., Matsushima M., Kawabe T., Shikida M.
International Conference on Solid State Sensors Actuators and Microsystems Transducers ( 2025 ) 1941 - 1944 2025.01
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Proof-of-Concept Quantitative Monitoring of Respiration Using Low-Energy Wearable Piezoelectric Thread Reviewed
Horie K., Al Farisi M.S., Hasegawa Y., Matsushima M., Kawabe T., Shikida M.
Electronics Switzerland 13 ( 23 ) 2024.12
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Non-contact sensor module for rapid detection of extravasation during intravenous drug administration Reviewed
Al Farisi M.S., Okazaki J., Hasegawa Y., Matsushima M., Kawabe T., Shikida M.
Biomedical Microdevices 26 ( 4 ) 2024.12
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Investigation of Calibration Methodology Using Mouth Airflow for Wearable Sensor Toward Quantitative Respiration Monitoring Reviewed
Horie K., Al Farisi M.S., Hasegawa Y., Matsushima M., Kawabe T., Shikida M.
Ieej Transactions on Electrical and Electronic Engineering 19 ( 5 ) 800 - 806 2024.05
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Pitot Tube Sensor Probe System for Simultaneous Airflow and Pressure Measurement of Expiration Inside Pulmonary Airway Reviewed
Miyawaki A., Al Farisi M.S., Hasegawa Y., Matsushima M., Kawabe T., Shikida M.
Ieej Transactions on Electrical and Electronic Engineering 19 ( 5 ) 807 - 813 2024.05
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Tracheal Intubation Tube with Embedded Airflow Sensor for Respiration Monitoring During Canine Tartar Removal Reviewed
Nagayama R., Al Farisi M.S., Hasegawa Y., Matsushima M., Kawabe T., Shikida M.
Ieej Transactions on Sensors and Micromachines 144 ( 12 ) 390 - 395 2024.01
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Single-Step Laser Fabrication of 3D Free-Standing Origami MEMS Thermal Sensor Reviewed
Mohamed Zukri M.N., Al Farisi M.S., Hasegawa Y., Shikida M.
Proceedings of IEEE Sensors 2024.01
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Facile Packaging for Fiber-Shaped Flexible MEMS Thermal Accelerometer Reviewed
Al Farisi M.S., Wang Y., Hasegawa Y., Shikida M.
IEEE Sensors Letters 7 ( 11 ) 1 - 4 2023.11
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Facile In-Tube-Center Packaging of Flexible Airflow Rate Microsensor for Simultaneous Respiration and Heartbeat Measurement Reviewed
Al Farisi M.S., Wang Y., Hasegawa Y., Matsushima M., Kawabe T., Shikida M.
IEEE Sensors Journal 23 ( 12 ) 12626 - 12633 2023.06
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Simultaneous Airflow and Pressure Measurements Based on Pitot Tube for Evaluation of Expired Air Inside Lung Airway Reviewed
Miyawaki A., Al Farisi M.S., Hasegawa Y., Matsushima M., Kawabe T., Shikida M.
2023 22nd International Conference on Solid State Sensors Actuators and Microsystems Transducers 2023 1888 - 1891 2023.01
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Sensitivity Enhancement of Tube-Integrated MEMS Flow Sensor Using Flexible Copper on Polyimide Substrate Reviewed
Tsukada T., Takigawa R., Hasegawa Y., Al Farisi M.S., Shikida M.
Micromachines 14 ( 1 ) 2023.01
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In-Tube-Center Packaging of Flexible MEMS Airflow-Rate Sensor and Its Sensitivity Enhancement Reviewed
Al Farisi M.S., Wang Y., Hasegawa Y., Matsushima M., Kawabe T., Shikida M.
2023 22nd International Conference on Solid State Sensors Actuators and Microsystems Transducers 2023 800 - 803 2023.01
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Calibration Method for Wearable Sensor Using Airflow at Mouth for Quantitative Monitoring of Respiration and Heartbeat Reviewed
Horie K., Al Farisi M.S., Hasegawa Y., Matsushima M., Kawabe T., Shikida M.
2023 22nd International Conference on Solid State Sensors Actuators and Microsystems Transducers 2023 1872 - 1875 2023.01
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Analysis of Airstream Inside the Slip Joint of Tracheal Intubation Tube for Breathing Measurement Reviewed
Tsukada T., Hasegawa Y., Al Farisi M.S., Matsushima M., Kawabe T., Shikida M.
IEEJ Transactions on Sensors and Micromachines 143 ( 1 ) 6 - 12 2023.01
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Electroplated Al Press Marking for Wafer-Level Bonding Reviewed
Al Farisi M.S., Tsukamoto T., Tanaka S.
Micromachines 13 ( 8 ) 2022.08
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Mechanical hardening of electrochemically deposited aluminum from chloroaluminate ionic liquid Reviewed
Al Farisi M.S., Tsukamoto T., Tanaka S.
Scripta Materialia 213 2022.05
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Fully CMOS-Compatible Wafer Bonding Based on Press Marking Using Thick Electroplated Aluminum Reviewed
Al Farisi M.S., Tsukamoto T., Tanaka S.
21st International Conference on Solid State Sensors Actuators and Microsystems Transducers 2021 1138 - 1141 2021.06
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Electrochemically Deposited Aluminum for MEMS Thermal Actuator Reviewed
Al Farisi M.S., Tsukamoto T., Tanaka S.
2021 Smart Systems Integration Ssi 2021 2021.04
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Dual-Mass Resonator with Dynamically Balanced Structure for Roll/Pitch Rate Integrating Gyroscope Reviewed
Wang S., Al Farisi M.S., Chen J., Tsukamoto T., Tanaka S.
Proceedings of IEEE Sensors 2021-October 2021.01
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Tailoring material properties of electrochemically deposited Al film from chloroaluminate ionic liquid for microsystem technology using pulsed deposition Reviewed
Al Farisi M.S., Tsukamoto T., Tanaka S.
Sensors and Actuators A Physical 316 2020.12
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Zero-Balance Method for Evaluation of Sealed Cavity Pressure down to Single Digit Pa Using Thin Silicon Diaphragm Reviewed
Farisi M.S.A., Hirano H., Tanaka S.
Journal of Microelectromechanical Systems 29 ( 3 ) 418 - 426 2020.06
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Fabrication method of micromachined quartz glass resonator using sacrificial supporting structures Reviewed
Khan M.J., Tsukamoto T., Al Farisi M.S., Tanaka S.
Sensors and Actuators A Physical 305 2020.04
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Roll/Pitch Rate Integrating MEMS Gyroscope Using Dynamically Balanced Dual-Mass Resonator Reviewed
Wang S., Al Farisi M.S., Tsukamoto T., Tanaka S.
Inertial 2020 7th IEEE International Symposium on Inertial Sensors and Systems Proceedings 2020.03
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