研究者詳細 - 清水　浩貴

論文 - 清水　浩貴

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Confocal probe based on the second harmonic generation for measurement of linear and angular displacements 査読有り国際誌

Sato R., Shimizu Y., Shimizu H., Matsukuma H., Gao W.

Optics Express 31 ( 7 ) 11982 - 11993 2023年03月

記述言語：英語掲載種別：研究論文（学術雑誌）

A measurement method based on a confocal probe on the second harmonic generation that can measure linear and angular displacements in the focusing point is proposed. In the proposed method, a pinhole or an optical fiber placed in front of the detector in conventional confocal probes is replaced by a nonlinear optical crystal, which is utilized as a medium generating second harmonic wave whose light intensity changes by the linear and angular displacements of a target under measurement. The feasibility of the proposed method is verified by theoretical calculations and experiments with the newly designed optical setup. Experimental results have demonstrated that the developed confocal probe has a resolution of 20 nm and 5 arc-seconds for measurement of linear and angular displacements, respectively.

DOI： 10.1364/OE.486421

その他リンク： https://www.scopus.com/inward/record.uri?partnerID=HzOxMe3b&scp=85153508115&origin=inward

3×3正方形配置センサユニットを用いた平面形状測定

時實拓紀, 野田樹生, 田丸雄摩, 清水浩貴

精密工学会学術講演会講演論文集 ( 公益社団法人精密工学会 ) 2023S ( 0 ) 382 - 383 2023年03月

担当区分：最終著者記述言語：日本語掲載種別：研究論文（その他学術会議資料等）

<p>9つの距離センサを縦横に3つずつ並べた正方形配置のセンサユニットを用い，これを工作機械上で走査することで取得したデータを接続して平面加工物の形状再現を行う手法について検討した．既に算出済みの形状値にステージの運動誤差を考慮して測定データを接続する際の重ね合わせ領域のデータ処理方法，及び測定データの接続経路を変更することによる形状再現精度を数値シミュレーションを用いて比較した結果を報告する．</p>

DOI： 10.11522/pscjspe.2023s.0_382

多点同時計測可能なカンチレバー式変位計デバイス

加倉誠勝, 小濱大輝, 田丸雄摩, 清水浩貴

精密工学会学術講演会講演論文集 ( 公益社団法人精密工学会 ) 2023S ( 0 ) 436 - 437 2023年03月

担当区分：最終著者記述言語：日本語掲載種別：研究論文（その他学術会議資料等）

<p>一本のカンチレバーに２ないし３の探針と,探針数以上のひずみ検出部を設けることで多点変位の同時計測が可能なカンチレバー式変位計を提案する.この変位計は多点法形状計測に応用できる一方,変位とひずみの関係が複雑になる問題がある.そこで有限要素法によるひずみ解析の結果に機械学習の回帰の手法を適用してひずみと変位の変換モデルの作成を行い,変位の測定が行えることを確認した.</p>

DOI： 10.11522/pscjspe.2023s.0_436

第二次高調波共焦点プローブに関する研究

佐藤遼, 清水裕樹, 清水浩貴, 松隈啓, 高偉

精密工学会学術講演会講演論文集 ( 公益社団法人精密工学会 ) 2023S ( 0 ) 412 - 413 2023年03月

記述言語：日本語掲載種別：研究論文（その他学術会議資料等）

<p>従来のコリメート光を用いたオートコリメータとは異なり，局所エリアにおける角度計測が可能な収束光を用いた新たな角度計測手法として，非線形光学結晶における第二次高調波発生原理を応用した共焦点プローブを提案する．提案原理に基づく数値シミュレーション解析を行うとともに，プロトタイプ光学系を構築し，角度測定範囲および測定分解能について検討を行い提案原理の実現可能性について検討を行った結果を報告する．</p>

DOI： 10.11522/pscjspe.2023s.0_412

Investigation of Angle Measurement Based on Direct Third Harmonic Generation in Centrosymmetric Crystals 査読有り国際誌

Li K., Lin J., Zhang Z., Sato R., Shimizu H., Matsukuma H., Gao W.

Applied Sciences (Switzerland) 13 ( 2 ) 2023年01月

記述言語：英語掲載種別：研究論文（学術雑誌）

This paper proposed angle measurement methods based on direct third harmonic generation (THG) in centrosymmetric crystals. The principles of the intensity-dependent and the wavelength-dependent angle measurement methods were illustrated. In this study, three prospective centrosymmetric crystals and two different phase-matching types were investigated in a wavelength range from 900 nm to 2500 nm. For the intensity-dependent method, a dispersion-less wavelength range was found from 1700 nm to 2000 nm for α-BBO and calcite. Compared with rutile, α-BBO and calcite had relatively better measurement performance based on the angle measurement sensitivity calculation. The wavelength-dependent method was considered in a dispersive range of around 1560 nm. The results suggested that α-BBO and calcite were also suitable for wavelength-dependent measurement. In addition, the effects of focusing parameters were considered in the simulation, and the optimized focal length (f = 100 mm) and the focused position (in the center of the crystal) were determined.

DOI： 10.3390/app13020996

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Reduction of Crosstalk Errors in a Surface Encoder Having a Long Z-Directional Measuring Range 査読有り国際誌

Hong Y., Sato R., Shimizu Y., Matsukuma H., Shimizu H., Gao W.

Sensors 22 ( 23 ) 2022年12月

記述言語：英語掲載種別：研究論文（学術雑誌）

A modified two-axis surface encoder is proposed to separately measure both the in-plane displacement and the Z-directional out-of-plane displacement with minor crosstalk errors. The surface encoder is composed of a scale grating and a small-sized sensor head. In the modified surface encoder, the measurement laser beam from the sensor head is designed to be projected onto the scale grating at a right angle. For measurement of the X- and Y-directional in-plane scale displacement, the positive and negative first-order diffracted beams from the scale grating are superimposed on each other in the sensor head, producing interference signals. On the other hand, the Z-directional out-of-plane scale displacement is measured based on the principle of a Michelson-type interferometer. To avoid the influence of reflection from the middle area of the transparent grating, which causes periodic crosstalk errors in the previous research, a specially fabricated transparent grating with a hole in the middle is employed in the newly designed optical system. A prototype sensor head is constructed, and basic performances of the modified surface encoder are tested by experiments.

DOI： 10.3390/s22239563

その他リンク： https://www.scopus.com/inward/record.uri?partnerID=HzOxMe3b&scp=85143821669&origin=inward

A MEMS Device Integrating Multiple Cantilever Displacement Sensors to Evaluate Flat Machined Surfaces 査読有り国際誌

Shimizu Hiroki, Tamiya Koichi, Mizukami Shoichiro, Tamaru Yuuma

International Journal of Automation Technology ( 富士技術出版株式会社 ) 16 ( 5 ) 582 - 587 2022年09月

担当区分：筆頭著者,　責任著者記述言語：英語掲載種別：研究論文（学術雑誌）

<p>Multi-point scanning measurement, which is effective in eliminating motion errors of the stage in on-machine profile measurement, requires multiple displacement sensors of equal pitch to measure displacements simultaneously. However, it is not easy to arrange small sensors with high alignment accuracy when applying the multi-point method at a narrow pitch. In addition, if many sensors can be arranged in parallel, improvement in measurement accuracy can be expected. Therefore, a new micro electro mechanical system (MEMS) device for straightness measurement, one that integrates 10 cantilever displacement sensors, has been proposed. This device can be expected to solve the problem involved in the multi-point method because of the characteristics of MEMS, as the semiconductor processing method can make mechanical structures with high accuracy and it can easily make the device with many identical structures. The device is designed to measure waviness less than 100 μm in height. Ten cantilevers of 11 mm length are fabricated in parallel with 1.8 mm pitch on a side of a base substrate 20 mm square. The strain induced by a displacement of the probe placed near the front edge of the cantilever is detected as a change in the resistance of the piezo resistor at the foot of the cantilever. In the fabrication process of this device, crystal anisotropic etching is performed for 12 hours to form probes 250 μm high. A new fabrication process is also proposed in which a protective process is added to prevent damage to the circuits already formed during the etching. A prototype is investigated, and it is found that the resistance value increases about 0.45% in proportion to the displacement of 100 μm. It is therefore confirmed that this device has the basic ability to detect displacement.</p>

DOI： 10.20965/ijat.2022.p0582

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Design and Prototyping of Biaxial Flexible Support Table for Fine Positioning Through Controlled Magnetic Attraction Forces 査読有り国際誌

Tamaru Yuuma, Kawata Kensuke, Shimizu Hiroki

International Journal of Automation Technology ( 富士技術出版株式会社 ) 16 ( 5 ) 588 - 597 2022年09月

担当区分：最終著者記述言語：英語掲載種別：研究論文（学術雑誌）

<p>High-precision positioning can be obtained by reducing sliding friction and securing support rigidity. A prototype of a biaxial positioning table with non-contact drive by magnetic force and flexible mechanism support was developed to meet these requirements. The magnetic poles of a permanent magnet and an electromagnet were placed opposite to each other with an appropriate gap between them, and the attraction force between the two poles was used as the actuator for fine feed. The table was supported with a flexible mechanism composed of metal (A2017) beams with notches and elastic hinges assembled into a square frame shape. The permanent magnets were commercial neodymium magnets, and the electromagnets were self-made of S45C core bars. Two types of attraction force, maximum and minimum, were set depending on the number of neodymium magnets and the magnetic pole gap. The relationship between the applied current and attraction force for each type was calibrated using an electronic balance. Upon increasing and decreasing the applied current to the electromagnets, a linear relationship was shown between them. The relationship between the attraction force and the <i>X</i>- and <i>Y</i>-axes displacements was simulated by finite element analysis. Based on both results, the relationship between the applied current and displacement was estimated. The fine-feed experiment was conducted in both directions of the <i>X</i>- and <i>Y</i>-axes by applying current to electromagnets in a stepwise sequence. The displacements of total strokes in the long-stroke feed on applying the maximum attraction force were 340 μm and 315 μm for the <i>X</i>-axis and 160 μm and 133 μm for the <i>Y</i>-axis. These values are 2.0–2.8 times larger than the estimated displacement. Additionally, 3%–12% of the other axes interference occurred between the <i>X</i>- and <i>Y</i>-axes. In the high resolution feed applying the minimum attraction force, the displacement per step was 75 nm and 78 nm for the <i>X</i>-axis and 35 nm and 39 nm for the <i>Y</i>-axis. Cooperative feed with a combination of long stroke and high resolution was verified to be feasible.</p>

DOI： 10.20965/ijat.2022.p0588

浮上力制御を利用したスクイーズ効果支持微動テーブルの開発（第6報）

田丸雄摩, 牛島智大, 清水浩貴

精密工学会学術講演会講演論文集 ( 公益社団法人精密工学会 ) 2022A ( 0 ) 28 - 29 2022年08月

担当区分：最終著者記述言語：日本語掲載種別：研究論文（その他学術会議資料等）

<p>摺動摩擦のないスクイーズ効果支持微動テーブルを提案している．加振面と被加振面の平行度調整が可能であることを特徴とする．前報では支持部底面角度が異なる3種類のテーブルに対して長ストローク微動特性を示した．今回，ステップ電圧を長ストロークの1/10に設定した小ステップ変位での応答を観察した．また，膜厚変化から幾何学的に推定した見積変位と実際の変位を比較評価した．</p>

DOI： 10.11522/pscjspe.2022a.0_28

浮上力制御を利用したスクイーズ効果支持微動テーブルの開発（第5報）

田丸雄摩, 牛島智大, 清水浩貴

精密工学会学術講演会講演論文集 ( 公益社団法人精密工学会 ) 2022S ( 0 ) 680 - 681 2022年03月

担当区分：最終著者記述言語：日本語掲載種別：研究論文（その他学術会議資料等）

<p>摺動摩擦を排除したスクイーズ効果支持微動テーブルを提案している．今回，支持部底面角度が異なる3種類のテーブルに対して浮上変位が最大になるように加振面と被加振面の平行度調整をした上で長ストローク微動試験を行った．加振振幅を階段状に変化させてステップ応答を観察した．また微動変位を膜厚変化から幾何学的に推定することを試み，実際の微動変位と比較評価をした．</p>

DOI： 10.11522/pscjspe.2022s.0_680

Feasibility study of multi-point two-dimensional profile measurement by 3-2-1 and 3×3 sensor layout 査読有り国際誌

Fujiwara R., Shimizu H.

Measurement: Sensors 18 2021年12月

担当区分：最終著者,　責任著者記述言語：英語掲載種別：研究論文（国際会議プロシーディングス）

New multi-point methods, the six-point method of 3-2-1 sensor layout and the nine-point method of 3 × 3 sensor layout, have been proposed as the two-dimensional profilometry for a machined flat surface. Monte Carlo simulations were carried out and properties of proposed methods were examined. As a result, it was shown that the six-point method, the minimum configuration that calculates the planar shape with only six displacement sensors, can obtain the equivalent result to that of the simple nine-point method. In the nine-point method with averaging, it was confirmed that the maximum and average values of the standard deviation of the reconstructed profile were reduced to 68% and 81%, respectively compared with simple nine-point method. The improved nine-point method that averages the pitching error to improve the data connection accuracy also proposed and this method reduced standard deviation, but effectiveness is limited.

DOI： 10.1016/j.measen.2021.100358

その他リンク： https://www.scopus.com/inward/record.uri?partnerID=HzOxMe3b&scp=85119593693&origin=inward

A MEMS device for straightness measurement integrating 10 cantilever displacement sensors 査読有り国際誌

Shimizu H., Tamiya K., Mizukami S., Tamaru Y.

10th International Conference on Leading Edge Manufacturing Technologies in 21st Century, LEM 2021 409 - 411 2021年11月

担当区分：筆頭著者,　責任著者記述言語：英語掲載種別：研究論文（国際会議プロシーディングス）

JAPAN Kitakyushu, Fukuoka 2021年11月14日 - 2021年11月18日

A new device for straightness measurement which integrate 10 cantilever displacement sensors has been proposed. This device was designed to measure the waviness smaller than 100 µm in height. Ten cantilevers of 11mm length were fabricated in parallel with 1.8mm pitch in a side of the base substrate of 20 mm square. The strain, induced by a displacement of the probe placed near the front edge of the cantilever, is detected as a change in the resistance of the piezo resistor at the root of the cantilever. A prototype was investigated and it was found that the resistance value increases in proportion to the displacement of the probe. Hence, it was confirmed that this device has the basic ability of displacement detection.

その他リンク： https://www.scopus.com/inward/record.uri?partnerID=HzOxMe3b&scp=85124805233&origin=inward

Consideration of Biaxial Flexible Support Table for Fine Positioning Through Controlled Magnetic Attraction Forces 査読有り国際誌

Tamaru Y., Kawata K., Shimizu H.

10th International Conference on Leading Edge Manufacturing Technologies in 21st Century, LEM 2021 640 - 645 2021年11月

担当区分：最終著者記述言語：英語掲載種別：研究論文（国際会議プロシーディングス）

JAPAN Kitakyushu, Fukuoka 2021年11月14日 - 2021年11月18日

A prototype of a biaxial positioning table with flexible support and magnetic attraction force control was developed. Because rigidity is assured and sliding friction is eliminated, the kinematic accuracy is high, and high-precision positioning is achieved. The total displacement in the long-stroke feed was 340 µm and 160 µm (X-axis and Y-axis), and the step displacement in the high-resolution feed was 85 nm and 40 nm, respectively. Experiments were conducted with cooperative positioning, in which both long-stroke and high-resolution displacements were output continuously. As a result, the displacements were almost the same as those obtained when each output was obtained independently. It was confirmed that cooperative positioning is effective.

その他リンク： https://www.scopus.com/inward/record.uri?partnerID=HzOxMe3b&scp=85124790610&origin=inward

浮上力制御を利用したスクイーズ効果支持微動テーブルの開発（第4報）

田丸雄摩, 牛島智大, 清水浩貴

精密工学会学術講演会講演論文集 ( 公益社団法人精密工学会 ) 2021A ( 0 ) 154 - 155 2021年09月

担当区分：最終著者記述言語：日本語掲載種別：研究論文（その他学術会議資料等）

<p>摺動摩擦を排除したスクイーズ効果支持微動テーブルを提案している．テーブルは加振に励起されて揺動し，支持や微動性能に影響する．今回，支持部傾斜角度が異なる3種類のテーブルを製作し，さらに加工精度が各々異なるため加振面，被加振面の平行度を個別に調整した．したがって傾斜角度や平行度に依る揺動特性が表れる．水平，鉛直方向の振動振幅計測および周波数解析をもとに揺動を評価したので報告する．</p>

DOI： 10.11522/pscjspe.2021a.0_154

MEMS技術を応用した多点法走査形状測定用センサデバイスの開発（第9報）

田宮弘一, 田丸雄摩, 清水浩貴

精密工学会学術講演会講演論文集 ( 公益社団法人精密工学会 ) 2021S ( 0 ) 629 - 630 2021年03月

担当区分：最終著者記述言語：日本語掲載種別：研究論文（その他学術会議資料等）

<p>真直形状測定のための10点同時計測MEMSデバイスをシリコンバルクマイクロマシニング技術により製作した．前報より製作条件を変更することでプロセスの改善を図った．試作デバイスを評価するために各カンチレバー根元のピエゾ抵抗体を1辺とするブリッジ回路を組み，カンチレバー先端に変位を加えて出力電圧の変化を測定した．その結果，変位量に比例して出力電圧が減少し，デバイスが変位検出能を有していることを確認した．</p>

DOI： 10.11522/pscjspe.2021s.0_629

浮上力制御を利用したスクイーズ効果支持微動テーブルの開発（第3報）

田丸雄摩, 東福修太朗, 清水浩貴

精密工学会学術講演会講演論文集 ( 公益社団法人精密工学会 ) 2021S ( 0 ) 471 - 472 2021年03月

担当区分：最終著者記述言語：日本語掲載種別：研究論文（その他学術会議資料等）

<p>摺動摩擦を排除したスクイーズ効果支持微動テーブルを提案している．効率よくスクイーズ効果を得るためには加振面，被加振面相互の平行度が鍵となる．従来の機構は平行度を加工精度に頼っており，組立の段階でずれが生じる可能性もある．そこで今回は加振機構にゴニオステージを設定し，加振面角度の調整を可能にした．これにより平行度の確保が容易になり支持性能向上を見込める．浮上性能を従来機構と比較評価したので報告する．</p>

DOI： 10.11522/pscjspe.2021s.0_471

磁気吸引力を利用した可撓支持微動テーブルの開発（第3報）

田丸雄摩, 河田謙介, 清水浩貴

精密工学会学術講演会講演論文集 ( 公益社団法人精密工学会 ) 2020S ( 0 ) 270 - 271 2020年03月

担当区分：最終著者記述言語：日本語掲載種別：研究論文（研究会，シンポジウム資料等）

<p>永久磁石と電磁石を対にして磁気吸引力で駆動する微動テーブルを提案している．前報では2軸駆動の装置を開発し，X，Y各軸で長ストローク，高分解能微動連係での性能を発表した．今回，X，Y軸を交互に微動させるジグザグ送りでの位置決め試験を行った．微動に関わる永久磁石と電磁石間のみに吸引力を作用させる場合とすべてに吸引力を作用させる場合において微動ストロークや軸間干渉を比較評価したので報告する．</p>

DOI： 10.11522/pscjspe.2020s.0_270

High sensitivity MEMS displacement sensor device for planar shape measurement by deposition of piezoelectric materials 査読有り国際誌

K. Murayama, Y. Tamaru, H. Shimizu

Proceedings of 8th International Conference of Asian Society for Precision Engineering and Nanotechnology ( Asian Society for Precision Engineering and Nanotechnology ) C13 2019年11月

Error Evaluation of Straightness Measurement Using a MEMS Device Integrating 10 Cantilever Displacement Sensors 査読有り

Hiroki Shimizu, Shoichiro Mizukami, Makoto Manabe, Yuuma Tamaru

Proceedings of the 14th International Symposium on Measurement Technology and Intelligent Instruments D08 Paper ID:125 2019年09月

磁気吸引力を利用した可撓支持微動テーブルの開発（第2報）

田丸雄摩, 河田謙介, 清水浩貴

精密工学会学術講演会講演論文集 ( 公益社団法人精密工学会 ) 2019A ( 0 ) 351 - 352 2019年08月

担当区分：最終著者記述言語：日本語掲載種別：研究論文（その他学術会議資料等）

<p>摺動摩擦を排除して高精度位置決めを達成するために永久磁石と電磁石を対にした磁気吸引力を利用する微動テーブルを提案している．前報では1軸の装置開発と性能について発表した．今回，1軸装置と同様に吸引力の較正や可撓機構の剛性見積を行って印加電流と変位の関係を予測し，新たに2軸駆動の装置を開発した．X，Y各軸の長ストロークと高分解能および2対の吸引力調整による両者連係での微動性能について報告する．</p>

DOI： 10.11522/pscjspe.2019a.0_351

MEMS技術を応用した多点法走査形状測定用センサデバイスの開発（第8報）

水上翔一朗, 真鍋真, 田丸雄摩, 清水浩貴

精密工学会学術講演会講演論文集 ( 公益社団法人精密工学会 ) 2019S ( 0 ) 473 - 474 2019年03月

担当区分：最終著者記述言語：日本語掲載種別：研究論文（その他学術会議資料等）

<p>機械加工平面の真直形状計測を目的とした走査型変位センサデバイスの設計を行った。MEMS製造技術を用いることで10本のカンチレバー型変位計が一体となったセンサデバイスとなっている。高精度な真直形状計測を行うために10か所の変位をセンサで同時に測定し、短いピッチ間隔での横分解能の高い測定データと、長いピッチ間隔での測定データを組み合わせ計算処理することで、誤差累積の影響の低減を図った。</p>

DOI： 10.11522/pscjspe.2019s.0_473

磁気吸引力を利用した可撓支持微動テーブルの開発

田丸雄摩, 宅野元気, 清水浩貴

精密工学会学術講演会講演論文集 ( 公益社団法人精密工学会 ) 2019S ( 0 ) 728 - 729 2019年03月

担当区分：最終著者記述言語：日本語掲載種別：研究論文（その他学術会議資料等）

<p>高精度位置決めを目的として摺動摩擦を排除した微動テーブルを提案している．本研究では永久磁石と電磁石を対向させて相互の吸引力を駆動源とする可撓支持微動テーブルを構想した．今回は1軸の装置を設計し，吸引力の校正や可撓機構の剛性見積を行い，印加電流と変位の関係を推定した．そして推定に基づいて装置を製作し，長ストロークと高分解能および，両者を連係させた場合の微動性能を評価した．</p>

DOI： 10.11522/pscjspe.2019s.0_728

逐次二点法と差動オートコリメーション法を併用した真直度機上測定

宮田佑, 田丸雄摩, 清水浩貴

精密工学会学術講演会講演論文集 ( 公益社団法人精密工学会 ) 2019S ( 0 ) 475 - 476 2019年03月

担当区分：最終著者記述言語：日本語掲載種別：研究論文（その他学術会議資料等）

<p>本報では，金型など比較的広範囲で鏡面に近い平面を対象とした，角度補正付逐次二点法を用いる真直度測定をオンマシンで行う手法を提案する．この実証のため，二点法用の２本の変位センサと２つのオートコリメーション式角度センサを組み合わせた測定ユニットを開発し，計測を行った．２つの角度センサにより走査中の姿勢変化をユニット単体で測定でき，外部モニタリングが不要となるので，オンマシン測定が容易となる．</p>

DOI： 10.11522/pscjspe.2019s.0_475

SOIウエハによる平面測定用5点法MEMS変位計デバイスの高精度化

杉田賢哉, 松本哲也, 田丸雄摩, 清水浩貴

日本機械学会九州支部講演論文集 ( 一般社団法人日本機械学会 ) 2019.72 ( 0 ) A44 2019年01月

担当区分：最終著者記述言語：日本語掲載種別：研究論文（その他学術会議資料等）

<p>In the 5-point method, the straight profile measurement of one line is performed using the sequential three point method, and the relation between the lines is simultaneously measured by two sensors arranged on the next scan line. Using this relation, straightness measurement results of each line, which is acquired by the three-point method, are connected to obtain a planar shape. In order to realize the on-machine measurement by this principle, the authors have prototyped a 5-point MEMS displacement sensor device for measuring a planar shape with five cantilever displacement sensors in a 20 mm square silicon wafer. Each displacement sensor has a probe of a quadrilateral frustum with a height of 250 μm at the tip of the cantilever and detects the strain generated at the root portion as a resistance value change of the piezo resistor according to the displacement. With bulk silicon wafers, when fabricating a probe by etching, they were difficult to control the thickness of the cantilever after etching and the height of the probe according to the target values. Therefore, the authors adopted the Silicon-on-insulator (SOI) wafer to improve dimensional accuracy by using etching stopped at the SiO2 layer. With the fabrication process adopting the SOI wafer, variations in height of the probe are reduced compared with conventional fabrication process using bulk silicon wafer and the size of the tip of the probe can be controlled independently. Therefore, efficiency of fabrication process using the SOI wafer is confirmed.</p>

DOI： 10.1299/jsmekyushu.2019.72.a44

その他リンク： https://www.jstage.jst.go.jp/article/jsmekyushu/2019.72/0/2019.72_A44/_pdf

正方配置逐次4点法のゼロ点誤差補正法への角度センサ導入による精度改善

笹原隆太郎, 清水浩貴, 田丸雄摩

日本機械学会九州支部講演論文集 ( 一般社団法人日本機械学会 ) 2019.72 ( 0 ) A43 2019年01月

記述言語：日本語掲載種別：研究論文（その他学術会議資料等）

<p>Square layout four-point method with angle correction has been proposed as an on-machine profile measurement method of machined flat surfaces. In this method, it is possible to measure the planar shape without the influence of translational error, pitching, and rolling of a stage. However, a zero-adjustment error, which is a deviation of the origin height of the four displacement sensors, causes a large form error of twist shape when the planar shape is reconstructed. To solve this problem, a back calculation method of the zero-adjustment error was proposed: which calculate zero-adjustment error from the difference in the error cumulative amount of two different calculation paths for a square measurement region, the raster scanning path and the diagonal path. To improve the calculation accuracy of zero-adjustment error, the authors have proposed to apply two-point method with angle correction to the diagonal direction by measuring the posture change of the stage unit with the angle sensor newly added in the diagonal direction. Monte Carlo simulations of the square layout four-point method and back calculation of zero-adjustment error were carried out. As a result, it was confirmed that the proposed method is effective to improve correction accuracy of the zero-adjustment error.</p>

DOI： 10.1299/jsmekyushu.2019.72.a43

その他リンク： https://www.jstage.jst.go.jp/article/jsmekyushu/2019.72/0/2019.72_A43/_pdf

Square layout four-point method for two-dimensional profile measurement and self-calibration method of zero-adjustment error 査読有り国際誌

Shimizu H., Yamashita R., Hashiguchi T., Miyata T., Tamaru Y.

International Journal of Automation Technology 12 ( 5 ) 707 - 713 2018年09月

担当区分：筆頭著者,　責任著者記述言語：英語掲載種別：研究論文（学術雑誌）

© 2018, Fuji Technology Press. All rights reserved. An on-machine measurement method, called the square-layout four-point (SLFP) method with angle compensation, for evaluating two-dimensional (2-D) profiles of flat machined surfaces is proposed. In this method, four displacement sensors are arranged in a square and mounted to the scanning table of a 2-D stage. For measuring the 2-D profile of a target plane, height data corresponding to all measuring points are acquired by means of the raster scanning motion. At the same time, pitching data of the first primary scan line and rolling data of the first subsidiary scan line are monitored by means of two auto-collimators to compensate for major profile errors that arise out of the posture error. Use of the SLFP method facilitates connection of the results of straightness-measurements results obtained for each scanning line by using two additional sensors and rolling data of the first subsidiary scan line. Specifically, the height of a measuring point is calculated by means of a recurrence equation using three predetermined height data for adjacent points in conjunction with data acquired by the four displacement sensors. Results of the numerical simulation performed in this study demonstrate higher efficiency of the SLFP method with angle compensation. During actual measurement, however, it is difficult to perfectly align inline the origin height of each displacement sensor. With regard to the SLFP method, zero-adjustment error is defined as the relative height of a sensor’s origin with respect to the plane comprising origins of the other three sensors. This error accumulates in proportion to number of times the recurrence equation is applied. Simulation results containing the zero-adjustment error demonstrate that accumulation of the said error results in unignorable distortion of measurement results. Therefore, a new self-calibration method for the zero-adjustment error has been proposed. During 2-D profile measurement, two different calculation paths – the raster scan path and orthogonal path – can be used to determine the height of a measurement point. Although heights determined through use of the two paths must ideally be equal, they are observed to be different because accumulated zero-adjustment errors for the two paths are different. In view of this result, the zero-adjustment error can be calculated backwards and calibrated. Validity of the calibration method has been confirmed via simulations and experiments.

DOI： 10.20965/ijat.2018.p0707

その他リンク： https://www.scopus.com/inward/record.uri?partnerID=HzOxMe3b&scp=85055258719&origin=inward

浮上力制御を利用したスクイーズ効果支持微動テーブルの開発（第2報）

田丸雄摩, 曲淵公紀, 松本哲也, 清水浩貴

精密工学会学術講演会講演論文集 ( 公益社団法人精密工学会 ) 2018A ( 0 ) 494 - 495 2018年08月

担当区分：最終著者記述言語：日本語掲載種別：研究論文（その他学術会議資料等）

<p>摺動摩擦を排除したスクイーズ効果支持微動テーブルを提案している．ところでスクイーズ効果では加振に励起してテーブルが振動し，微動に揺動が伴うことを確認している．この原因としてテーブル両側を同位相で支持する浮上静圧力に脈動が生じるが，脈動の振幅が不一致であるためと考える．そこで180°位相差で加振させ，テーブル中央部が振動の節となることを利用した制振を試みた．あわせてテーブル微動についても評価した．</p>

DOI： 10.11522/pscjspe.2018a.0_494

A novel compensation method of zero-adjustment error in flatness measurement using serial four-point method 査読有り国際誌

Shimizu H., Yamashita R., Hashiguchi T., Miyata T.

Proceedings of the 9th International Conference on Leading Edge Manufacturing in 21st Century, LEM 2017 ( 一般社団法人日本機械学会 ) 2017.9 ( 0 ) 163 2017年11月

担当区分：筆頭著者,　責任著者記述言語：英語掲載種別：研究論文（国際会議プロシーディングス）

The authors proposed a novel on-machine measurement method for evaluating three-dimensional profiles of machined flat surface: square layout four point (SLFP) method with angle compensation. The SLFP method enables to connect the results of straightness measurements of each scanning line by using additional two sensors and an angle sensor. Numerical simulation showed that the accumulation of zero adjustment error of displacement sensors makes unignorable distortion on the measurement results. Hence, a new calibration method for zero adjustment error was proposed and the validity of the method was confirmed by an experiment.

DOI： 10.1299/jsmelem.2017.9.163

その他リンク： https://www.scopus.com/inward/record.uri?partnerID=HzOxMe3b&scp=85041341905&origin=inward

浮上量差による推進機構を付加したスクイーズ効果支持リニアスライダ査読有り

田丸雄摩, 清水浩貴

日本機械学会論文集 83 ( 854 ) 17 - 00278-17-00278 2017年10月

記述言語：日本語掲載種別：研究論文（学術雑誌）

Non-contact supports involving air or magnetic forces are used as guide supports for linear motion mechanisms. In the present study, non-contact supports are generated using the effect of the static pressure force produced by a squeezed air film. The linear slider is supported at just two of its ends. Applying a different excitation amplitude to the two transducers leads to a difference in the floating height at either end of the slider due to the different air-film thicknesses. This causes the slider to tilt, which produces a propulsion force due to the dead load. An experimental apparatus with a flat plate slider was developed and its floating characteristics were examined. In addition, the propulsion force was measured for sliders with different weights. The results indicated that the floating height was 2 to 3 times the excitation amplitude. The slider was capable of travelling all over the movement stroke. The traveling force increased with increasing slider weight, and was about 0.15-0.35 mN. The measurement results were in good agreement with theoretical calculations. Thus, the present study showed that the slider could be successfully supported in a non-contact state and was capable of movement under the influence of a propulsion force generated only by the dead load.

DOI： 10.1299/transjsme.17-00278

その他リンク： https://ci.nii.ac.jp/naid/130006181353

MEMS技術を応用した多点法走査形状測定用センサデバイスの開発（第7報）

本永聡一朗, 是永遼介, 清水浩貴, 田丸雄摩

精密工学会学術講演会講演論文集 ( 公益社団法人精密工学会 ) 2017S ( 0 ) 291 - 292 2017年01月

記述言語：日本語掲載種別：研究論文（その他学術会議資料等）

本研究は，等間隔に並べたカンチレバー式高分解能変位センサ3つと，次走査線上に配置したセンサ2つを一体化した多点法平面測定用MEMSデバイスを開発するものである．本デバイスは感度向上のため，応力検出部が存在するカンチレバー根元部に応力集中が効率的に生じるよう，矩形梁の採用と穴形状の付加を行った．本報では改良の定量評価のため行ったFEM解析の結果と，それを元に作製したデバイスについて報告する．

DOI： 10.11522/pscjspe.2017s.0_291

角度補正付き逐次多点法を用いた走査型平面形状測定（第4報）

橋口拓也, 清水浩貴, 田丸雄摩

精密工学会学術講演会講演論文集 ( 公益社団法人精密工学会 ) 2017S ( 0 ) 297 - 298 2017年01月

記述言語：日本語掲載種別：研究論文（その他学術会議資料等）

本研究は，広範囲の平面形状測定法として逐次多点法に基づく走査型測定法を提案するものである．本報では，4本の変位センサを正方配置し，2軸の角度補正を併用する測定法について検討した．まず，センサのノイズレベルと測定結果の不確かさの関係をモンテカルロシミュレーションにより確認した．次に単一のセンサに感度差を与え，それに起因する誤差が累積することで測定結果に与える影響を確認した．

DOI： 10.11522/pscjspe.2017s.0_297

浮上力制御を利用したスクイーズ効果支持微動テーブルの開発

田丸雄摩, 松本哲也, 清水浩貴

精密工学会学術講演会講演論文集 ( 公益社団法人精密工学会 ) 2017A ( 0 ) 727 - 728 2017年01月

担当区分：最終著者記述言語：日本語掲載種別：研究論文（その他学術会議資料等）

微動性能向上の鍵は摺動部の摩擦低減にある．本研究ではスクイーズ効果で浮上支持させ，浮上力制御と自重バランスで駆動可能な微動テーブルを開発した．加振振幅を与えることで浮上力が得られ，振幅調整によって微動が生じる．試験の結果，テーブルが非接触で支持されていることを確認した．また，振幅をステップ状に変化させたところ変化に応じてテーブルが微動し，全ストローク変位と最小変位を観察できた．

DOI： 10.11522/pscjspe.2017a.0_727

Redesign of cantilever displacement sensor to improve sensitivity and channel separation 査読有り

Shimizu H., Komatsu S., Tamaru Y.

Proceedings of the 8th International Conference on Leading Edge Manufacturing in 21st Century, LEM 2015 2015年10月

記述言語：英語掲載種別：研究論文（国際会議プロシーディングス）

A new structural design of a micro electro mechanical system (MEMS) device for straightness measurement with the three point method has been studied. This device integrates three cantilever displacement sensors with a 5mm pitch on a silicon chip. To improve sensitivity and channel separation, some structural designs to make stress concentration part and to reduce interference between each displacement sensor were investigated using a finite element method code. Based on the calculation results, an integrated model was designed; in this model, each cantilever has a cutting off part and a groove near the base and notches were added to the support base. It was confirmed that integrated model has the feasibility to improve both sensitivity and channel separation.

その他リンク： https://www.scopus.com/inward/record.uri?partnerID=HzOxMe3b&scp=84974604593&origin=inward

Property Evaluation of Eccentric Astigmatic Method to Apply Micro Tactile Probe 査読有り

Hiroki Shimizu, Atsuo Ogawa, Yoshinori Sasaki, Yuuma Tamaru

International Journal of Automation Technology 9 ( 5 ) 551 - 557 2015年09月

Design of a MEMS device for scanning profile measurement with three cantilever displacement sensors 査読有り

Hiroki Shimizu, Takahiro Akiyoshi, Shinya Yanagihara, Yuuma Tamaru, Akiyoshi Baba

Proceedings of 12th International Symposium on Measurement Technology and Intelligent Instruments 1 - 5 Paper ID 1196 2015年09月

Displacment Detection of Small Sphere using Eccentric Astigmatic Method 査読有り

Hiroki Shimizu, Atsuo Ogawa, Yoshinori Sasaki, Yuuma Tamaru

Proceedings of 11th IMEKO Symposium LMPMI2014 (Laser Metrology for Precision Measurement and Inspection in Industry) 1 - 4 index: B18 2014年09月

ボールねじ式送りテーブルの位置・角度補正査読有り

田丸雄摩, 清水浩貴, 加茂田浩史

日本機械学会論文集 80 ( 816 ) 1 - 11 DR0240 2014年08月

Development of a Compact Deformable Mirror using Push-Pull Actuators 査読有り

Hiroki Shimizu, Keitaro Tanaka, Yuuma Tamaru

Key Engineering Materials 613 200 - 203 2014年05月

16・8 加工計測(16.加工学・加工機器,<特集>機械工学年鑑)

清水浩貴

日本機械学会誌 ( 一般社団法人日本機械学会 ) 116 ( 1137 ) 571 - 572 2013年01月

長ストロークと高精度位置決めを両立する連係微動査読有り

田丸雄摩，高藤和樹，清水浩貴

日本機械学会論文集（Ｃ編） 74 ( 745 ) 2294 - 2299 2008年09月

Theoretical Study on Self-calibration for the Wide-rangeLaser Auto-collimation Method 査読有り

H.Shimizu,O.Hayashi

Key Engineering Materials 381-382 271 - 274 2008年06月

高感度2軸マイクロ角度センサの開発査読有り

高偉,齋藤悠佑,佐藤隼人,清野慧,清水浩貴,広瀬純

精密工学会誌 72 ( 9 ) 1174 - 1178 2006年09月

Three-Dimensional Slit Width Measurement for Long Precision Slot Dies 査読有り

M. Furukawa,W. Gao,H. Shimizu,S. Kiyono,M. Yasutake,K. Takahashi

Key Engineering Materials 295-296 343 - 348 2005年10月

A Biological Sensor for Detecting Foreign Bodies Using a Balloon Probe 査読有り

H. Shimizu,S. Kiyono,W. Gao,H. Shoji

Key Engineering Materials 295-296 133 - 138 2005年10月

An electrical pen for signature verification using a two-dimensional optical angle sensor 査読有り

Hiroki Shimizu,Satoshi Kiyono,Takenori Motoki,Wei Gao

Sensors and Actuators, A 111 216 - 221 2004年04月

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