Papers - NAGAYAMA Katsuya

Particle simulation of CH4/H2 Radio-Frequency Glow Discharges for Diamond-Like Carbon Film Deposition Reviewed

Nagayama K,Farouk B,Lee H.Y.

JSME Centennial Grand Congress International Conference on Fluid Engineering   ( 308 )   1997.08

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Language：English   Publishing type：Research paper (other academic)

1997.08  -  1997.08

Modeling of RF Plasma Discharges of CH4 for Carbon Film Deposition Reviewed

Nagayama K,Farouk B,Lee H Y

IEEE International Conference on Plasma Science   ( 3A05 )   183 - 183   1996.06

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Language：English   Publishing type：Research paper (other academic)

USA   1996.06  -  1996.06

Neutral and charged particle simulation of a RF argon plasma Reviewed

Nagayama K,Farouk B,Lee H Y

Plasma Sources Sci, Technol.   5   685 - 695   1996.05

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Language：English   Publishing type：Research paper (other academic)

Modeling of RF Plasma Discharges of Polyatomic Gases for Carbon Film Deposition Reviewed

Nagayama K,Farouk B,Lee H Y

12th Int. Symposium on Plasma Chemistry   4   2247 - 2253   1995.08

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Language：English   Publishing type：Research paper (other academic)

USA   Minneapolis   1995.08  -  1995.08

遠心羽根車に働くふれまわり流体力の実験的研究 Reviewed

大橋秀雄,桜井明,西浜二郎,永山勝也,松本洋一郎,野々下知康

機械学会論文集(B編)   61 ( 591 )   1995.04

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Language：Japanese   Publishing type：Research paper (other academic)