Updated on 2024/01/07

 
MURAKAMI Sunao
 
Scopus Paper Info  
Total Paper Count: 0  Total Citation Count: 0  h-index: 6

Citation count denotes the number of citations in papers published for a particular year.

Affiliation
Faculty of Computer Science and Systems Engineering Department of Intelligent and Control Systems
Job
Associate Professor
External link

Research Interests

  • microelectromechanical system (MEMS)

  • microfabrication

  • modification of solid surfaces

  • microdevices

Research Areas

  • Nanotechnology/Materials / Thin film/surface and interfacial physical properties

  • Nanotechnology/Materials / Nanomaterials

  • Nanotechnology/Materials / Nano/micro-systems

  • Nanotechnology/Materials / Bio chemistry

  • Manufacturing Technology (Mechanical Engineering, Electrical and Electronic Engineering, Chemical Engineering) / Electron device and electronic equipment

Degree

  • Kyushu University  -  Doctor of Engineering   2007.02

Biography in Kyutech

  • 2019.04
     

    Kyushu Institute of Technology   Faculty of Computer Science and Systems Engineering   Department of Intelligent and Control Systems   Associate Professor  

  • 2018.05
    -
    2019.03
     

    Kyushu Institute of Technology   Faculty of Computer Science and Systems Engineering   Department of Mechanical Information Science and Technology   Associate Professor  

  • 2012.03
    -
    2018.04
     

    Kyushu Institute of Technology   Faculty of Computer Science and Systems Engineering   Department of Mechanical Information Science and Technology   Assistant Professor  

Academic Society Memberships

  • 2012.07   The Japan Society for Precision Engineering   Japan

  • 2009.02   The Institute of Electrical Engineers of Japan   Japan

  • 2001.07   The Society of Chemical Engineers. Japan   Japan

  • 2018.08   Institute of Electrical and Electronics Engineers (IEEE)   United States

  • 2010.10   The Japan Society of Mechanical Engineers   Japan

  • 2010.10   The Japan Society of Applied Physics   Japan

  • 2005.11   Japan Society for Food Engineering   Japan

  • 2005.11   Japanese Society for Biomaterials   Japan

▼display all

Papers

  • 多段階のエッチングを用いた複合形状の微小柱状構造アレイの作製

    角田 大成, 岩崎 正裕, 村上 直, 坂本 憲児, 伊藤 高廣

    精密工学会学術講演会講演論文集 ( 公益社団法人 精密工学会 )   2023S ( 0 )   642 - 643   2023.03

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    Authorship:Corresponding author   Language:Japanese   Publishing type:Research paper (conference, symposium, etc.)

    <p>基材表面への微細加工の手法として、エッチング加工が挙げられる。特にシリコンの深掘りエッチング(DRIE)は、シリコン基材の表面に微小な3次元構造体を加工・構築するために重要な技術であり、樹脂成形のための鋳型構造の作製にも適用可能である。本研究では、DRIEを含む多段階のエッチング加工を用いて、シリコン基材表面に複合形状の微小柱状構造アレイを作製した結果を報告する。</p>

    DOI: 10.11522/pscjspe.2023s.0_642

    CiNii Research

  • デバイス基材表面の構造による弾性表面波の伝搬特性の制御の試み

    岩崎 正裕, 井上 滉平, 村上 直, 伊藤 高廣

    精密工学会学術講演会講演論文集 ( 公益社団法人 精密工学会 )   2023S ( 0 )   640 - 641   2023.03

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    Authorship:Corresponding author   Language:Japanese   Publishing type:Research paper (conference, symposium, etc.)

    <p>弾性表面波(SAW)デバイスは圧電マイクロデバイスの一種である。そのデバイス特性は、くし歯型電極を含む素子構造や基材の種類・方位に応じたSAW伝搬特性により影響される。複数のSAW素子を同一の基材上に配置(アレイ化)する場合、各素子で励振されたSAWの近接素子との相互作用を抑制することが求められる。そこで本研究では、デバイス基板への表面構造の作製等により、SAW伝搬特性を制御することを試みた。</p>

    DOI: 10.11522/pscjspe.2023s.0_640

    CiNii Research

  • タンタル酸リチウム基材上に作製した弾性表面波デバイスの特性に関する研究

    井上 滉平, 岩崎 渉, 森田 伸友, 伊藤 高廣, 村上 直

    精密工学会学術講演会講演論文集 ( 公益社団法人 精密工学会 )   2023S ( 0 )   638 - 639   2023.03

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    Authorship:Corresponding author   Language:Japanese   Publishing type:Research paper (conference, symposium, etc.)

    <p>弾性表面波(SAW)デバイスは、基材の表面近傍を伝搬する機械振動を利用した圧電マイクロデバイスである。36度回転Y板X伝搬タンタル酸リチウム単結晶基材上を伝搬するSAWを用いると液相系センサを構築できることが報告されている。本研究では、液相系センサ構築へ向け上記基材上にSAWデバイスを作製し、SAW伝搬面に液体を負荷した場合におけるデバイス特性の評価および制御を試みた。</p>

    DOI: 10.11522/pscjspe.2023s.0_638

    CiNii Research

  • Microfabrication of surface acoustic wave devices with AlN thin film deposited on half-inch quartz wafer Reviewed International journal

    Nagano A., Kitamura K., Noda S., Murakami S., Iguchi K., Khumpuang S., Hara S.

    Electrical Engineering in Japan (English translation of Denki Gakkai Ronbunshi)   215 ( 4 )   2022.12

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    Authorship:Corresponding author   Language:English   Publishing type:Research paper (scientific journal)

    DOI: 10.1002/eej.23412

    Scopus

    Other Link: https://www.scopus.com/inward/record.uri?partnerID=HzOxMe3b&scp=85141419117&origin=inward

  • Impulse-driven capsule for medical inspection -Improvement of drive mechanism-

    Koki KOIZUMI, Koki IWASHITA, Takahiro ITO, Sunao MURAKAMI, Toshihiro KIMURA k, Kaoru KARASAWA, Chihiro KATSUTA, Akane TANAKA, Hiromu KUTSUMI

    Proceedings of 19th International Conference on Precision Engineering (ICPE 2022) ( The Japan Society for Precision Enginnering (JSPE) )   2022.11

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    Nara   2022.11.28  -  2022.12.02

  • Microfabrication of surface acoustic wave devices with micro-patterned AlN thin films International journal

    Sunao Murakami, Kanato Kitamura, Takahiro Ito

    Conference Proceedings of the 13th Japan-China-Korea Joint Conference on MEMS/NEMS (JCK MEMS/NEMS 2022)   43 - 44   2022.10

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    Authorship:Lead author, Corresponding author   Language:English   Publishing type:Research paper (international conference proceedings)

    Japan   Kagoshima   2022.10.16  -  2022.10.19

  • Microfabrication of Surface Acoustic Wave Devices with AlN Thin Film Deposited on Half-inch Quartz Wafer Reviewed

    Nagano Asahi, Kitamura Kanato, Noda Shuichi, Murakami Sunao, Iguchi Kohei, Khumpuang Sommawan, Hara Shiro

    IEEJ Transactions on Sensors and Micromachines ( The Institute of Electrical Engineers of Japan )   142 ( 9 )   248 - 253   2022.09

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    Authorship:Corresponding author   Language:Japanese   Publishing type:Research paper (scientific journal)

    <p>In this paper, we have fabricated surface acoustic wave (SAW) devices with six sets of interdigital transducers (IDTs) on half-inch wafers of quartz with deposited thin films of aluminum nitride (AlN). Firstly, AlN thin films have been deposited by reactive sputtering in Ar-N<sub>2</sub> gas mixture at 400°C with the high power impulse magnetron sputtering (HiPIMS) system which was developed for microfabrication process in the localized clean environment with half-inch wafer (Minimal Fab). After that, IDTs of Al thin films have been prepared on the AlN thin films. The X-ray diffraction (XRD) pattern of the AlN thin films shows that the AlN films have <i>c</i>-axis (002) orientation. Furthermore, the frequency responses have been measured with four paired IDTs of the SAW devices, which were selected from six sets of IDTs as an input electrode and an output electrode. These results show device properties responding to the design of the IDTs and also suggest the potential of the fabricated SAW devices as the 4-paralleled frequency filter and/or sensing system.</p>

    DOI: 10.1541/ieejsmas.142.248

    Scopus

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  • Improvement of Capsule Endoscope Drive Mechanism

    Koizumi Koki, Ito Takahiro, Murakami Sunao

    Proceedings of JSPE Semestrial Meeting ( The Japan Society for Precision Engineering )   2022S ( 0 )   221 - 222   2022.03

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    Language:Japanese   Publishing type:Research paper (conference, symposium, etc.)

    DOI: 10.11522/pscjspe.2022s.0_221

    CiNii Research

  • AlN膜の結晶性と弾性表面波デバイスの特性に関する研究

    井口 航平, 岩崎 渉, 森田 伸友, 伊藤 高廣, 村上 直

    精密工学会学術講演会講演論文集 ( 公益社団法人 精密工学会 )   2022S ( 0 )   284 - 285   2022.03

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    Authorship:Corresponding author   Language:Japanese   Publishing type:Research paper (conference, symposium, etc.)

    <p>弾性表面波(SAW)デバイスは、基材の表面近傍を伝搬する機械振動を利用した圧電マイクロデバイスであり、センサへの応用が期待されている。高感度なセンサとして利用するためには、高い周波数帯域で小さな伝搬損失が必要であり、AlNの結晶性とSAWデバイスの設計値がデバイス特性に大きく影響する。本研究では、AlNの結晶性とSAWデバイスの波長と伝搬距離に応じた特性変化について調査した。</p>

    DOI: 10.11522/pscjspe.2022s.0_284

    CiNii Research

  • Research on Impulse-Driven Capsule Endoscopy

    Iwashita Koki, Ito Takahiro, Murakami Sunao, Kimura Toshihiro, Karasawa Kaoru, Katsuta Chihiro, Tanaka Akane, Kutsumi Hiromu

    Proceedings of JSPE Semestrial Meeting ( The Japan Society for Precision Engineering )   2021A ( 0 )   385 - 386   2021.09

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    Language:Japanese   Publishing type:Research paper (conference, symposium, etc.)

    DOI: 10.11522/pscjspe.2021a.0_385

    CiNii Research

  • Compact and highly accurate flow rate measuring device for intravenous drip

    Uchimura Mamoru, Khajornrungruang Panart, Ito Takahiro, Murakami Sunao

    Proceedings of JSPE Semestrial Meeting ( The Japan Society for Precision Engineering )   2021A ( 0 )   383 - 384   2021.09

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    Language:Japanese   Publishing type:Research paper (conference, symposium, etc.)

    DOI: 10.11522/pscjspe.2021a.0_383

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  • Microneedle array for medical application

    Kawabata Kazuki, Matushima Syunya, Mizuguchi Ryou, Ito Takahiro, Hikima Tomohiro, Murakami Sunao, Matsuo Masaaki, Tashiro Yasunori, Hara Masaya, Tsubaki Hirotada

    Proceedings of JSPE Semestrial Meeting ( The Japan Society for Precision Engineering )   2021A ( 0 )   387 - 388   2021.09

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    Language:Japanese   Publishing type:Research paper (conference, symposium, etc.)

    DOI: 10.11522/pscjspe.2021a.0_387

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  • AlN膜の結晶性と弾性表面波デバイスの特性に関する研究

    井口 航平, 岩崎 渉, 上原 雅人, 大曲 新矢, 本村 大成, 森田 伸友, 伊藤 高廣, 村上 直

    精密工学会学術講演会講演論文集 ( 公益社団法人 精密工学会 )   2021A ( 0 )   360 - 361   2021.09

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    Authorship:Corresponding author   Language:Japanese   Publishing type:Research paper (conference, symposium, etc.)

    <p>弾性表面波(SAW)デバイスは、基材の表面近傍を伝播する機械振動を利用した圧電マイクロデバイスであり、センサへの応用が期待されている。高感度なセンサとして利用するためには、より高い信号強度での動作が必要であり、その圧電材の特性がデバイス性能に大きく影響する。AlN薄膜では、結晶性を改善することにより圧電性を向上できる。本研究では、AlN薄膜の結晶性に応じたSAWデバイスの特性変化について調査した。</p>

    DOI: 10.11522/pscjspe.2021a.0_360

    CiNii Research

  • Improved design of polymer micromachined transmission for flapping wing nano air vehicle "jointly worked" Reviewed International journal

    Rashmikant , Ishihara D., Suetsugu R., Murakami S., Ramegowda P.C.

    Proceedings of the 16th IEEE Annual International Conference on Nano/Micro Engineered and Molecular Systems (IEEE-NEMS 2021) ( IEEE )   1320 - 1325   2021.04

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    Language:English   Publishing type:Research paper (international conference proceedings)

    China   Xiamen   2021.04.25  -  2021.04.29

    DOI: 10.1109/NEMS51815.2021.9451440

    Scopus

    Other Link: https://ieeexplore.ieee.org/document/9451440

  • 微小柱状構造アレイの作製におけるドライエッチングの条件検討

    山本 雅喜, 村上 直, 伊藤 高廣

    精密工学会学術講演会講演論文集 ( 公益社団法人 精密工学会 )   2021 ( 0 )   822 - 823   2021.01

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    Authorship:Corresponding author   Language:Japanese   Publishing type:Research paper (conference, symposium, etc.)

    オンライン開催   2021.03.16  -  2021.03.22

    <p>シリコン基材表面への微小な3次元構造体の作製手法として、微細加工技術であるエッチングが挙げられる。特に、シリコンの深堀ドライエッチングは微細な3次元構造体を加工するために重要な技術であり、この技術を利用することで、シリコンウエハより、樹脂成形のための鋳型を作製することも可能である。今回は、シリコンウエハ上に樹脂成形用の凸形状の鋳型構造を作製することを目的に、ドライエッチングの条件検討を行った。</p>

    DOI: 10.11522/pscjspe.2021S.0_822

    CiNii Article

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    Other Link: https://ci.nii.ac.jp/naid/130008084230

  • New shape microneedle array for medical application "jointly worked" Reviewed International journal

    Shunya MATSUSHIMA, Kazuya YAMADA, Yuki MIZUNO, Tatsuya FUKUDA, Takahiro ITO, Tomohiro HIKIMA, Sunao MURAKAMI, Hirotada TSUBAKI, Masaya HARA, Yasunori TASHIRO

    Proceedings of 18th International Conference on Precision Engineering (ICPE 2020) ( The Japan Society for Precision Engineering )   C-2-1   2020.11

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    Language:English   Publishing type:Research paper (international conference proceedings)

    online   2020.11.23  -  2020.11.27

  • Fabrication of microneedle array for medical application "jointly worked" Reviewed International journal

    Kazuya YAMADA, Shunkya MATSUSHIMA, Yuki MIZUNO, Tatsuya FUKUDA, Kanae TAKASAWA a, Takahiro ITO* a, Sunao MURAKAMI a, Tomohiro HIKIMA, Hirotada TSUBAKI, Masaya HARA, Yasunori TASHIRO, Masaaki MATSUO

    Proceedings of 18th International Conference on Precision Engineering (ICPE 2020) ( The Japan Society for Precision Engineering )   C-2-2   2020.11

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    Language:English   Publishing type:Research paper (international conference proceedings)

    online   2020.11.23  -  2020.11.27

  • Impulse-driven Capsule for Medical Inspection "jointly worked" Reviewed International journal

    Yuichiro KAWASHIMA, Kenta ASAI, Shotaro WATANABE, Takahiro ITO, Sunao MURAKAMI, Kaoru KARASAWA, Chihiro KATSUTA, Akane TANAKA, Hiromu KUTSUMI

    Proceedings of 18th International Conference on Precision Engineering (ICPE 2020) ( The Japan Society for Precision Engineering )   C-2-3   2020.11

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    Language:English   Publishing type:Research paper (international conference proceedings)

    online   2020.11.23  -  2020.11.27

  • Polymer micromachined transmission for insect–inspired flapping wing nano air vehicles "jointly worked" Reviewed International journal

    Daisuke ISHIHARA, Sunao MURAKAMI, Naoto OHIRA, Jyunpei UEO, Masakatsu TAKAGI, Kohei URAKAWA, Tomoyoshi HORIE

    Proceedings of the 15th IEEE International Conference on Nano/Micro Engineered and Molecular Systems (IEEE-NEMS 2020)   176 - 179   PS2.3   2020.09

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    Language:English   Publishing type:Research paper (international conference proceedings)

    online   2020.09.27  -  2020.09.30

    DOI: 10.1109/NEMS50311.2020.9265594

    Scopus

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  • Karats Precision, Inc. "jointly worked" Invited

    Journal of the Japan Society for Precision Engineering ( The Japan Society for Precision Engineering )   86 ( 8 )   618 - 619   2020.01

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    Authorship:Last author, Corresponding author   Language:Japanese   Publishing type:Article, review, commentary, editorial, etc. (other)

    DOI: 10.2493/jjspe.86.618

    CiNii Article

    CiNii Research

    Other Link: https://ci.nii.ac.jp/naid/130007884654

  • Microneedle array for medical application "jointly worked"

    Yamada Kazuya, Hara Masaya, Tashiro Yasunori, Matsuo Masaaki, Matsushima Shunya, Mizuno Yuki, Fukuda Tatsuya, Takasawa Kanae, Ito Takahiro, Hikima Tomohiro, Murakami Sunao, Tsubaki Hirotada

    Proceedings of JSPE Semestrial Meeting ( The Japan Society for Precision Engineering )   2020 ( 0 )   472 - 473   2020.01

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    Language:Japanese   Publishing type:Research paper (other academic)

    DOI: 10.11522/pscjspe.2020A.0_472

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    Other Link: https://ci.nii.ac.jp/naid/130007989100

  • Effect of the crystal orientation of silicon substrates on the fabrication of three-dimensional microstructure "jointly worked"

    Murakami Sunao, Kihara Hoshito, Ito Takahiro

    Proceedings of JSPE Semestrial Meeting ( The Japan Society for Precision Engineering )   2020 ( 0 )   491 - 492   2020.01

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    Authorship:Lead author, Corresponding author   Language:Japanese   Publishing type:Research paper (other academic)

    DOI: 10.11522/pscjspe.2020A.0_491

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    Other Link: https://ci.nii.ac.jp/naid/130007989053

  • 自走式カプセル内視鏡の研究(共著)

    川島 雄一朗, 浅井 謙太, 渡邉 翔太朗, 伊藤 高廣, 村上 直, 唐澤 薫, 勝田 ちひろ, 田中 あかね, 久津見 弘

    精密工学会学術講演会講演論文集 ( 公益社団法人 精密工学会 )   2020 ( 0 )   474 - 475   2020.01

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    <p>従来のチューブ型の内視鏡に代わる新しい内視鏡検査の手法として、近年カプセル内視鏡が普及し始めている。筆者らが提案する、コイルと磁石の振動を利用した走行機構を搭載することで、検査時間の大幅な短縮が見込める。また、無線カメラモジュールの搭載により、チューブ型の内視鏡のようにリアルタイムでの検査を行うことも可能である。今回、イヌを用いた実験により。腸内でのカプセルの走行、カメラ画像の無線伝送を確認した。</p>

    DOI: 10.11522/pscjspe.2020A.0_474

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    Other Link: https://ci.nii.ac.jp/naid/130007989098

  • Frequency properties of surface acoustic wave devices with bi-layered piezoelectric thin films "jointly worked"

    20pm3-PS3-70   2019.11

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    浜松   2019.11.19  -  2019.11.21

  • Fabrication of Arrays of the Three-dimensional Microstructures on a Substrate Using the Combined Etching Processes, "jointly worked" Reviewed

    Murakami Sunao, Yamamoto Shusuke, Araki Kazuhiro, Ito Takahiro

    IEEJ Transactions on Sensors and Micromachines ( Institute of Electrical Engineers of Japan )   138 ( 6 )   263 - 267   2018.06

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    Authorship:Lead author, Corresponding author   Language:Japanese   Publishing type:Research paper (scientific journal)

    <p>Anisotropic etching is a useful processing method for the fabrication of three-dimensional (3D) microstructures on single crystal silicon (SCS) substrates. In this paper, we have fabricated the arrays of 3D convex microstructures using the combined etching process which includes two types of anisotropic etching process. The arrays of the micropillar structures with vertical sidewalls were firstly fabricated on the substrate surface using deep reactive ion etching (D-RIE) of SCS. Furthermore, anisotropic wet etching of the micropillars was performed in the etching solution and the shape of the additionally-etched 3D microstructures was investigated. We have also suggested the potential of the combined etching process to decrease the fabrication time of the arrays of micro pyramid which are usually fabricated using only the anisotropic wet etching of SCS.</p>

    DOI: 10.1541/ieejsmas.138.263

    Scopus

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  • Prototyping of Insect-like micro flyer with 2.5-dimensional structure

    TAKAGI Masakatsu, ISHIHARA Daisuke, OHIRA Naoto, MURAKAMI Sunao, HORIE Tomoyoshi

    The Proceedings of the Bioengineering Conference Annual Meeting of BED/JSME ( The Japan Society of Mechanical Engineers )   2018 ( 0 )   1I12   2018.01

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    Language:Japanese   Publishing type:Research paper (conference, symposium, etc.)

    DOI: 10.1299/jsmebio.2018.30.1I12

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    Other Link: https://ci.nii.ac.jp/naid/130007410874

  • Polymer-micromachining and driving test of a transmission for insect-like flyer "joinytly worked"

    URAKAWA Kohei, ISHIHARA Daisuke, TAKAGI Masakatsu, MURAKAMI Sunao, UEO Junpei, KUMAGAI Takeru, HORIE Tomoyoshi

    The Proceedings of Mechanical Engineering Congress, Japan ( The Japan Society of Mechanical Engineers )   2018 ( 0 )   J0270401   2018.01

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    Language:Japanese   Publishing type:Research paper (conference, symposium, etc.)

    DOI: 10.1299/jsmemecj.2018.J0270401

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    Other Link: https://ci.nii.ac.jp/naid/130007619310

  • Microfabrication of hybrid structure composed of rigid silicon and flexible PI membranes "jointly worked" Reviewed International journal

    Murakami S., Ishihara D., Araki M., Ohira N., Ito T., Horie T.

    Micro and Nano Letters ( The Institution of Engineering and Technology )   12 ( 11 )   913 - 915   2017.11

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    Authorship:Lead author, Corresponding author   Language:English   Publishing type:Research paper (scientific journal)

    DOI: 10.1049/mnl.2017.0428

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  • Microfabrication of the array of convex microstructures of silicon using the combined etching process with bilayer etching mask "jointly worked" Reviewed

    Murakami S., Araki K., Yamamoto S., Ito T.

    Proceedings of the 9th International Conference on Leading Edge Manufacturing in 21st Century, LEM 2017 ( Japan Society of Mechanical Engineers )   2017.9 ( 0 )   041   B12   2017.11

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    Authorship:Lead author, Corresponding author   Language:English   Publishing type:Research paper (international conference proceedings)

    Japan   Hiroshima   2017.11.13  -  2017.11.17

    <p>In this study, we have fabricated the arrays of convex microstructures on single crystal silicon (SCS) substrates using the procedure which includes two types of anisotropic etching process. We firstly fabricated the arrays of micropillars with vertical sidewalls using deep reactive ion etching (D-RIE) process of SCS. After that, we etched the micropillars additionally using the anisotropic wet etching process of SCS. We investigated the etched shape of the convex microstructures in the microfabrication procedure, and successfully fabricated the arrays with bilayer etching masks composed of the layer of aluminum and silicon dioxide with the controlled thickness.</p>

    DOI: 10.1299/jsmelem.2017.9.041

    Scopus

    CiNii Article

    CiNii Research

    Other Link: https://www.scopus.com/inward/record.uri?partnerID=HzOxMe3b&scp=85041374778&origin=inward

  • Fluid-structure interaction design of insect-like micro flapping wing "jointly worked" Reviewed International journal

    Ishihara D., Ohira N., Takagi M., Murakami S., Horie T.

    Proceedings of the VII International Conference on Computational Methods for Coupled Problems in Science and Engineering (COUPLED PRBLEMS 2017) ( International Center for Numerical Methods in Engineering )   2017-January   870 - 875   WeM02   2017.06

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    Scopus

    Other Link: https://www.scopus.com/inward/record.uri?partnerID=HzOxMe3b&scp=85033477617&origin=inward

  • Design and fabrication of MEMS-based transmission systems for micro flapping wing

    OHIRA Naoto, ISHIHARA Daisuke, MURAKAMI Sunao, HORIE Tomoyoshi

    The Proceedings of the Bioengineering Conference Annual Meeting of BED/JSME ( The Japan Society of Mechanical Engineers )   2017 ( 0 )   2F23   2017.01

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    Language:Japanese   Publishing type:Research paper (conference, symposium, etc.)

    DOI: 10.1299/jsmebio.2017.29.2F23

    CiNii Article

    CiNii Research

    Other Link: https://ci.nii.ac.jp/naid/130007123468

  • Fluid-Structure Interaction Design Approach for Insect-Inspired MEMS Wings

    ISHIHARA Daisuke, ARAKI Masateru, OHIRA Nato, MURAKAMI Sunao, HORIE Tomoyoshi

    NCTAM papers, National Congress of Theoretical and Applied Mechanics, Japan ( National Committee for IUTAM )   64 ( 0 )   OS8-02-01   2017.01

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    <p>In this study, a FSI design approach of an insect–inspired MEMS wing is proposed. Similar to actual insects, the proposed design actively uses the FSI to create the passive wing motion. Each design solution has a so-called 2.5–D structure for the MEMS technology. The 3–D unsteady monolithic FSI equation system is solved to find the satisfactory design solutions using a projection method. An area of satisfactory design solutions in a design parameter space is found. Each design solution in this area can generate the thrust sufficient to support the weight of the model insect.</p>

    DOI: 10.11345/japannctam.64.0_os8-02-01

    CiNii Article

    CiNii Research

  • 金/クロム薄膜電極を有する弾性表面波デバイスの作製

    力丸 真也, 冨山 直人, 村上 直, 伊藤 高廣

    精密工学会学術講演会講演論文集 ( 公益社団法人 精密工学会 )   2017A ( 0 )   289 - 290   2017.01

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    1種類のガス検出用のセンサは既に一部で実用化されている一方、広範な複数種のガスを同時に検知可能で、携帯可能なガスセンサは開発途上である。本研究では、弾性表面波(Surface Acoustic Wave; SAW)デバイスをセンサ素子のベース構造に用いたセンサチップの開発を最終目的としている。そのデバイスで、電極構造は、SAWの励振・検出を行う非常に重要な要素である。今回は、金/クロム薄膜を電極素材として選択し、SAWデバイスの作製を行った。

    DOI: 10.11522/pscjspe.2017a.0_289

    CiNii Article

    CiNii Research

  • Microneedle array for medical application

    Hanada Taichi, Ito Takahiro, Hikima Tomohiro, Murakami Sunao, Tsubaki Hirotada, Hara Masaya, Kuroki Junji, Tashiro Yasunori, Matsuo Masaaki

    Proceedings of JSPE Semestrial Meeting ( The Japan Society for Precision Engineering )   2017A ( 0 )   287 - 288   2017.01

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    DOI: 10.11522/pscjspe.2017a.0_287

    CiNii Article

    CiNii Research

  • 弾性表面波デバイスアレイへの素子分離溝の作製(共著)

    冨山 直人, 石井朋幸, 村上直, 伊藤高廣

    第33回「センサ・マイクロマシンと応用システム」シンポジウム(電気学会) 論文集   25am2-PS-021   2016.10

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    日本   平戸   2016.10.24  -  2016.10.26

  • Capsule Micromechanism Driven by Impulse - Wireless Implementation"jointly worked" Reviewed International journal

    T. Ito, S. Murakami

    Microactuators and Micromechanisms ( Kluwer Academic Publishers )   45   67 - 77   2016.10

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    Germany   Ilmenau   2016.10.05  -  2016.10.07

    DOI: 10.1007/978-3-319-45387-3

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    Other Link: https://www.scopus.com/inward/record.uri?partnerID=HzOxMe3b&scp=84989941826&origin=inward

  • Fluid-structure interaction design of micro flexible wing mimicking insect flapping flight "jointly worked" Reviewed

    D. Ishihara, S. Murakami, M. Araki, T. Horie

    Proceedings of the 12th World Congress on Computational Mechanics (WCCM XII)   No. 151142   2016.07

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    Korea   Seoul   2016.07.24  -  2016.07.29

  • 異方性エッチングを用いた複合加工による3次元微小構造アレイの作製

    荒木 一宏, 村上 直, 伊藤 高廣

    精密工学会学術講演会講演論文集 ( 公益社団法人 精密工学会 )   2016A ( 0 )   295 - 296   2016.01

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    Authorship:Corresponding author   Language:Japanese   Publishing type:Research paper (conference, symposium, etc.)

    シリコン基材の3次元微細加工の手法としてエッチングが挙げられる。うち、特定の方向にのみ基材を除去する加工を異方性エッチングという。本研究では,真空環境下および液中での異方性エッチングを組み合わせてシリコン基板表面に対する複合加工を行った。まず真空下でのドライエッチングで作製した柱状構造を、更に液中でのウェットエッチングで加工することにより、複雑な3次元形状の微小構造アレイを作製した結果を報告する。

    DOI: 10.11522/pscjspe.2016a.0_295

    CiNii Article

    CiNii Research

  • 微小孔アレイへの送液のための温調機能付きマイクロ流路デバイスの作製とその機能評価

    吉賀 雅史, 青井 将士, 石井 朋幸, 藤 圭亮, 村上 直, 伊藤 高廣

    精密工学会学術講演会講演論文集 ( 公益社団法人 精密工学会 )   2016S ( 0 )   493 - 494   2016.01

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    本研究では,医療用微小針等の孔アレイに組み合わせて送液に使用することを想定した,マイクロ流路およびマイクロヒーターの作製を目的とした.流路デバイスは,微細切削加工により流路を加工したガラス基板を樹脂基板で封止することで作製した.また,MEMS技術を利用することで,温度調整用のニッケル薄膜抵抗型マイクロヒーターを作製した.両デバイスを組み合わせたデバイスにおいて,液の加熱・流通等の機能評価を行った.

    DOI: 10.11522/pscjspe.2016s.0_493

    CiNii Article

    CiNii Research

  • Direct hydrogen peroxide synthesis using glass microfabricated reactor - Paralleled packed bed operation "jointly worked" Reviewed

    278   517 - 526   2015.10

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    DOI: 10.1016/j.cej.2014.11.019

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    Other Link: http://www.sciencedirect.com/science/article/pii/S1385894714014624

  • Direct synthesis of hydrogen peroxide using glass fabricated microreactor - Multichannel operation and catalyst comparison "jointly worked" Invited Reviewed

    248   169 - 176   2014.5オンライン公開済み   2015.06

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    DOI: 10.1016/j.cattod.2014.03.065

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    Other Link: http://www.sciencedirect.com/science/article/pii/S092058611400296X

  • 結晶異方性ウェットエッチング加工によるマイクロピラミッド形状の表面微細構造の作製(共著)

    石井 朋幸、清水 正義、村上 直、伊藤 高廣

    第31回「センサ・マイクロマシンと応用システム」シンポジウム(電気学会)論文集   21pm3-PS34   2014.10

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    日本   島根県松江市   2014.10.20  -  2014.10.22

  • Improvement of shape homogeneity in the surface microstructures fabricated by anisotropic etching on 4-inch silicon wafer (jointly worked) Reviewed

    Sunao Murakami, Ryunosuke Ohmori, Seigi Shimizu, Takahiro Ito

    134 ( 8 )   258 - 263   2014.08

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    Authorship:Corresponding author   Language:Japanese   Publishing type:Research paper (scientific journal)

    DOI: 10.1541/ieejsmas.134.258

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    CiNii Article

    Other Link: https://www.jstage.jst.go.jp/article/ieejsmas/134/8/134_258/_article/-char/ja/

  • Impulse-driven capsule for medical treatment - Wireless implementation- "jointly worked" Reviewed

    C27   2014.07

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    Japan   Kanazawa   2014.07.22  -  2014.07.25

  • Sub-micron-wide surficial trench frames to define the coating areas of sensitive layers on silicon MEMS resonant chemical sensors "jointly worked" Invited Reviewed

    96 ( 10 )   60 - 66   2013.10

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    DOI: 10.1002/ecj.11379

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    Other Link: http://onlinelibrary.wiley.com/doi/10.1002/ecj.11379/abstract

  • Direct synthesis of hydrogen peroxide based on microreactor technology, "jointly worked" Reviewed International journal

    Fuel Processing Technology ( Elsevier B.V. )   108   8 - 11   2013.04

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    DOI: 10.1016/j.fuproc.2012.04.009

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  • Frequency stability of a closed-loop oscillator using micro-electro-mechanical cantilever resonator against temperature fluctuation(jointly worked) Reviewed

    51 ( 6 )   06FL08   2012.06

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    DOI: 10.1143/JJAP.51.06FL08

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    Other Link: http://iopscience.iop.org/1347-4065/51/6S/06FL08/

  • Parallelization of catalytic packed-bed microchannels with pressure-drop microstructures for gas-liquid multiphase reactions (jointly worked) Reviewed

    Japanese Journal of Applled Physics   51 ( 6 )   06FK11   2012.06

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    DOI: 10.1143/JJAP.51.06FK11

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    Other Link: http://iopscience.iop.org/1347-4065/51/6S/06FK11/

  • Design, fabrication, and evaluation of highly sensitive compact chemical sensor system employing a micro cantilever array and a preconcentrator (jointly worked) Reviewed

    Takashi Mihara, Tsuyoshi Ikehara, Mitsuo Konno, Sunao Murakami, Ryutaro Maeda, Tadashi Fukawa, Mutsumi Kimura

    Sensors and Materials   23 ( 7 )   397 - 417   2011.10

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    Other Link: http://myukk.org/sm_pdf/SM0855.pdf

  • Integration of p-n junction diode to cantilever mass sensor for frequency drift compensation due to temperature fluctuation (jointly worked) Reviewed International journal

    Tsuyoshi Ikehara, Mitsuo Konno, Sunao Murakami, Tadashi Fukawa, Mutsumi Kimura, Takashi Mihara

    Sensors and Materials   23 ( 7 )   381 - 396   2011.10

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    Other Link: http://myukk.org/sm_pdf/SM0854.pdf

  • Fabrication of two-point-supported annular microresonators with vertical transducer gaps (jointly worked) Reviewed International journal

    Sunao Murakami, Mitsuo Konno,Tsuyoshi Ikehara, Ryutaro Maeda, Takashi Mihara

    Micro and Nano Letters ( The Institution of Engineering and Technology )   6 ( 7 )   469 - 472   2011.07

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    DOI: 10.1049/mnl.2011.0097

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    Other Link: https://digital-library.theiet.org/content/journals/10.1049/mnl.2011.0097;jsessionid=52h5n50qs1tj2.x-iet-live-01

  • Novel MEMS oscillator using in-plane disk resonator with sensing platform and its mass sensing (jointly worked) Reviewed

    Mitsuo Konnno, Tsuyoshi Ikehara, Sunao Murakami, Ryutaro Maeda, Tadashi Fukawa, Mutsumi Kimura, Takashi Mihara

    Proceedings of 2011 16th International Solid-State Sensors, Actuators and Microsystems Conference (Transducers 2011)   518 - 521   2011.06

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    P.R. China   Beijing   2011.06.05  -  2011.06.09

    DOI: 10.1109/TRANSDUCERS.2011.5969670

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    Other Link: http://ieeexplore.ieee.org/xpl/articleDetails.jsp?arnumber=5969670

  • Effects of Anisotropy of Single Crystal Silicon on the Vibration Properties of Disk-Type MEMS Resonators "jointly worked" Reviewed

    IEEJ Transactions on Sensors and Micromachines ( Institute of Electrical Engineers of Japan )   130 ( 9 )   - 426   430   2010.09

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    DOI: 10.1541/ieejsmas.130.426

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    CiNii Article

    Other Link: https://www.jstage.jst.go.jp/article/ieejsmas/130/9/130_9_426/_article/-char/ja/

  • Fabrication of 150 nm-wide transducer gaps for disk-type resonators by single dry etching process (jointly worked) Reviewed

    Sunao Murakami, Mitsuo Konno, Tsuyoshi Ikehara, Ryutaro Maeda, Takashi Mihara

    Japanese Journal of Applied Physics   49 ( 6 )   06GN04   2010.06

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    DOI: 10.1143/JJAP.49.06GN04

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    Other Link: http://iopscience.iop.org/1347-4065/49/6S/06GN04/

  • カンチレバー型化学センサのオンチップ温度センサによる温度補償(共著)

    池原毅,村上直,昆野舜夫,布川正史,木村睦,三原孝士

    (査読有)平成22年度 電気学会センサ・マイクロマシン部門総合研究会 ケミカルセンサ研究会資料   57 - 62   2010.06

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  • MEMS振動子等価回路を用いた発振器の開発と質量センサへの応用(共著)

    昆野舜夫,池原毅,村上直,前田龍太郎,三原孝士

    (査読有)第26回「センサ・マイクロマシンと応用システム」シンポジウム(電気学会)論文集   524 - 527   2009.10

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  • In vivo tissue response and degradation behavior of PLLA and stereocomplexed PLA nanofibers (jointly worked) Reviewed International journal

    Daisuke Ishii, Tang H. Ying, Atsushi Mahara, Sunao Murakami, Tetsuji Yamaoka, Won-ki. Lee, Tadahisa Iwata

    Biomacromolecules ( American Chemical Society )   10 ( 2 )   237 - 242   2009.02

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    Language:English   Publishing type:Research paper (scientific journal)

    DOI: 10.1021/bm8009363

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    Other Link: https://pubs.acs.org/doi/10.1021/bm8009363

  • Scaffolds from electrospun polyhydroxyalkanoate copolymers: Fabrication, characterization, bioabsorption and tissue response (jointly worked) Reviewed International journal

    Tang H. Ying, Daisuke Ishii, Atsushi Mahara, Sunao Murakami, Tetsuji Yamaoka, Kamar Sudesh, Razip Samian, Masahiro Fujita, Mizuo Maeda, Tadahisa Iwata

    Biomaterials ( Elsevier Ltd )   29 ( 10 )   1307 - 1317   2008.04

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  • Effect of diglucosamine on the entrapment of protein into liposomes "jointly worked" Reviewed

    ( Taylor & Francis Group, LLC ) 16 ( 2 )   103 - 112   2006.05

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    Authorship:Lead author   Language:English   Publishing type:Research paper (scientific journal)

    DOI: 10.1080/08982100600680667

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    PubMed

    Other Link: https://www.tandfonline.com/doi/abs/10.1080/08982100600680667?journalCode=ilpr20

  • Enhancement of the liver specific functions of primary rat hepatocytes co-cultured with bone marrow cells on tissue culture treated polystyrene surfaces "jointly worked" Reviewed International journal

    Journal of Artificial Organs ( The Japanese Society for Artificial Organs )   8 ( 2 )   104 - 109   2005.08

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    Language:English   Publishing type:Research paper (scientific journal)

    DOI: 10.1007/s10047-005-0289-9

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    PubMed

    Other Link: https://link.springer.com/article/10.1007%2Fs10047-005-0289-9

  • Development of co-culture system of hepatocytes with bone marrow cells for expression and maintenance of hepatic functions "jointly worked" Reviewed

    ( Wichtig Editore ) 27 ( 2 )   118 - 126   2004.02

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    PubMed

    Other Link: https://journals.sagepub.com/doi/10.1177/039139880402700207

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Conference Prsentations (Oral, Poster)

  • 多段階のエッチングを用いた複合形状の微小柱状構造アレイの作製

    角田 大成, 岩崎 正裕, 村上 直, 坂本 憲児, 伊藤 高廣

    2023年度精密工学会春季大会 学術講演会   2023.03  精密工学会

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    Event date: 2023.03.14 - 2023.03.16   Language:English   Country:Japan  

  • デバイス基材表面の構造による弾性表面波の伝搬特性の制御の試み

    岩崎 正裕, 井上 滉平, 村上 直, 伊藤 高廣

    2023年度精密工学会春季大会 学術講演会   2023.03  精密工学会

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    Event date: 2023.03.14 - 2023.03.16   Language:Japanese   Country:Japan  

  • タンタル酸リチウム基材上に作製した弾性表面波デバイスの特性に関する研究

    井上 滉平, 伊藤 高廣, 村上 直, 岩崎 渉, 森田 伸友

    2023年度精密工学会春季大会 学術講演会  2023.03  精密工学会

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    Event date: 2023.03.14 - 2023.03.16   Language:Japanese   Country:Japan  

  • Impulse-driven capsule for medical inspection -Improvement of drive mechanism-

    Koki Koizumi, Koki IWASHITA, Takahiro ITO, Sunao MURAKAMI, Toshihiro KIMURA, Kaoru KARASAWA, Chihiro KATSUTA, Akane TANAKA, Hiromu KUTSUMI

    19th International Conference on Precision Engineering (ICPE 2022)  2022.12  The Japan Society for Precision Enginering

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    Event date: 2022.11.28 - 2022.12.02   Language:English   Country:Japan  

    Other Link: http://www.scoop-japan.com/kaigi/icpe2022/

  • Microfabrication of surface acoustic wave devices with micro-patterned AlN thin films

    Sunao Murakami, Kanato Kitamura, Takahiro Ito

    13th Japan-China-Korea Joint Conference on MEMS/NEMS (JCK MEMS/NEMS 2022)  2022.10 

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    Event date: 2022.10.16 - 2022.10.19   Language:English   Country:Japan  

  • 点滴用高精度流量計測器の開発と研究

    目黒 輝, 内村 護, カチョンルンルアン パナート, 伊藤 高廣, 村上 直

    2022年度精密工学会秋季大会 学術講演会  2022.09  精密工学会

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    Event date: 2022.09.07 - 2202.09.09   Language:Japanese  

  • 消化管内カプセル走行改善の研究

    小泉 皓暉, 伊藤 高廣, 村上 直

    2022年度精密工学会春季大会 学術講演会  2022.03  精密工学会

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    Event date: 2022.03.15 - 2022.03.17   Language:Japanese  

  • AlN 膜の結晶性と弾性表面波デバイスの特性に関する研究

    井口 航平, 伊藤 高廣, 村上 直, 岩崎 渉, 森田 伸友

    2022年度精密工学会春季大会 学術講演会  2022.03  精密工学会

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    Event date: 2022.03.15 - 2022.03.17   Language:Japanese  

  • ハーフインチ径水晶ウエハ上へ成膜したAlN薄膜上への弾性表面波デバイスアレイの試作と評価

    永野 朝日,北村 奏人,野田 周一,井口 航平,村上 直,クンプアン ソマワン,原 史朗

    第38回「センサ・マイクロマシンと応用システム」シンポジウム  2021.11  電気学会

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    Event date: 2021.11.09 - 2021.11.11   Language:Japanese  

  • AlN 膜の結晶性と弾性表面波デバイスの特性に関する研究

    井口 航平, 岩崎 渉, 上原 雅人, 大曲 新也, 本村 大成, 森田 伸友, 村上 直, 伊藤 高廣

    2021年度精密工学会秋季大会 学術講演会  2021.09  精密工学会

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    Event date: 2021.09.21 - 2021.09.30   Language:Japanese  

  • 医療用マイクロニードルの研究

    川端 一輝, 松島 俊也, 水口 凌, 伊藤 高廣, 引間 知広, 村上 直, 松尾 正昭, 原 正哉, 椿 浩忠田代 康典,

    2021年度精密工学会秋季大会 学術講演会  2021.09  精密工学会

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    Event date: 2021.09.21 - 2021.09.30   Language:Japanese  

  • 自走式カプセル内視鏡の研究—無線給電と動物実験—

    岩下 広樹, 伊藤 高廣, 村上 直, 木村 俊広, 唐澤 薫, 勝田 ちひろ, 田中 あかね, 久津 見弘

    2021年度精密工学会秋季大会 学術講演会  2021.09  精密工学会

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    Event date: 2021.09.21 - 2021.09.30   Language:Japanese  

  • 点滴流量計測小型高精度化の研究

    内村 護, カチョーンルンルアンパナート, 伊藤 高廣, 村上 直

    2021年度精密工学会秋季大会 学術講演会  2021.09  精密工学会

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    Event date: 2021.09.21 - 2021.09.30   Language:Japanese  

  • Improved design of polymer micromachined transmission for flapping wing nano air vehicle

    Rashmikant, Daisuke ISHIHARA, Ryotaro SUETSUGU, Sunao MURAKAMI, Prakasha C. RAMEGOWDA

    16th IEEE Annual International Conference on Nano/Micro Engineered and Molecular Systems (IEEE-NEMS 2021)   2021.04  IEEE Nanotechnology Council

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    Event date: 2021.04.25 - 2021.04.29   Language:English   Country:China  

  • 微小柱状構造アレイの作製におけるドライエッチングの条件検討

    山本 雅喜, 村上 直, 伊藤 高廣

    2021年度精密工学会春季大会 学術講演会  精密工学会

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    Event date: 2021.03.16 - 2021.03.22   Language:Japanese  

  • New shape microneedle array for medical application

    Shunya MATSUSHIMA, Kazuya YAMADA, Yuki MIZUNO, Tatsuya FUKUDA, Takahiro ITO, Tomohiro HIKIMA, Sunao MURAKAMI, Hirotada TSUBAKI, Masaya HARA, Yasunori TASHIRO

    18th International Conference on Precision Engineering (ICPE 2020)  The Japan Society for Precision Engineering (JSPE)

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    Event date: 2020.11.23 - 2020.11.27   Language:English  

    Other Link: http://www.scoop-japan.com/kaigi/icpe2020/program.html

  • Fabrication of microneedle array for medical application

    Kazuya YAMADA, Shunya MATSUSHIMA, Yuki MIZUNO, Tatsuya FUKUDA, Kanae TAKASAWA, Takahiro ITO, Sunao MURAKAMI, Tomohiro HIKIMA, Hirotada TSUBAKI, Masaya HARA, Yasunori TASHIRO, Masaaki MATSUO

    18th International Conference on Precision Engineering (ICPE 2020)  The Japan Society for Precision Engineering (JSPE)

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    Event date: 2020.11.23 - 2020.11.27   Language:English  

    Other Link: http://www.scoop-japan.com/kaigi/icpe2020/program.html

  • Impulse-driven Capsule for Medical Inspection

    Yuichiro KAWASHIMA, Kenta ASAI, Shotaro WATANABE, Takahiro ITO, Sunao MURAKAMI, Kaoru KARASAWA, Chihiro KATSUTA, Akane TANAKA, Hiromu KUTSUMI

    18th International Conference on Precision Engineering (ICPE 2020)  The Japan Society for Precision Engineering (JSPE)

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    Event date: 2020.11.23 - 2020.11.27   Language:English  

    Other Link: http://www.scoop-japan.com/kaigi/icpe2020/program.html

  • Polymer micromachined transmission for insect–inspired flapping wing nano air vehicles

    Daisuke ISHIHARA, Sunao MURAKAMI, Naoto OHIRA, Jyunpei UEO, Masakatsu TAKAGI, Kohei URAKAWA, Tomoyoshi HORIE

    the 13th IEEE International Conference on Nano/Micro Engineered and Molecular Systems  IEEE Nanotechnology Council

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    Event date: 2020.09.27 - 2020.09.30   Language:English  

    Other Link: https://ieee-nems.org/2020/program/

  • 医療用マイクロニードルの研究

    山田 一也, 松島 俊也, 水野 有希, 福田 龍彌, 高澤 香奈衣, 伊藤 高廣, 引間 知広, 村上 直, 椿 浩忠, 原 正哉, 田代 康典, 松尾 正昭

    2020年度精密工学会秋季大会 学術講演会  精密工学会

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    Event date: 2020.09.01 - 2020.09.07   Language:Japanese  

  • 微小3次元構造アレイ作製におけるシリコン基板表面の結晶方位の影響

    村上 直,木原 帆慧,伊藤 高廣

    2020年度精密工学会秋季大会 学術講演会  精密工学会

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    Event date: 2020.09.01 - 2020.09.07   Language:Japanese  

  • 自走式カプセル内視鏡の研究

    川島 雄一朗, 浅井 謙太, 渡邉 翔太朗, 伊藤 高廣, 村上 直, 唐澤 薫, 勝田 ちひろ, 田中 あかね, 久津 見弘

    2020年度精密工学会秋季大会 学術講演会  精密工学会

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    Event date: 2020.09.01 - 2020.09.07   Language:Japanese  

  • 圧電薄膜の追加形成による弾性表面波デバイスの周波数特性の変化

    力丸 真也, 北村 奏人, 村上 直, 伊藤 高廣

    2019年度精密工学会春季大会 学術講演会 

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    Event date: 2019.03.13 - 2019.03.15   Language:Japanese  

  • Impulse-driven capsule for medical inspection

    Hiroyuki Ichiki, Kenta Asai, Shotaro Watanabe, Takahiro Ito, Sunao Murakami

    17th International Conference on Precision Engineering (ICPE 2018)  2018.11  The Japan Society for Precision Engineering (JSPE)

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    Event date: 2018.11.12 - 2018.11.16   Language:English   Country:Japan  

    Other Link: http://www.scoop-japan.com/kaigi/icpe2018/program.html

  • Microneedle array for medical application

    Taichi Hanada, Takahiro Ito, Tomohiro Hikinma, Sunao Murakami, Hirotada Tsubaki, Masaya Hara, Yasunori Tashiro, Masaaki Matsuo

    17th International Conference on Precision Engineering (ICPE 2018)  2018.11  The Japan Society for Precision Engineering (JSPE)

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    Event date: 2018.11.12 - 2018.11.16   Language:English   Country:Japan  

    Other Link: http://www.scoop-japan.com/kaigi/icpe2018/program.html

  • 金/クロム薄膜電極を有する弾性表面波デバイスの作製

    力丸 真也, 冨山 直人, 村上 直, 伊藤 高廣

    2017年度精密工学会秋季大会学術講演会 講演論文集 

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    Event date: 2017.09.20 - 2017.09.22   Language:Japanese  

    1種類のガス検出用のセンサは既に一部で実用化されている一方、広範な複数種のガスを同時に検知可能で、携帯可能なガスセンサは開発途上である。本研究では、弾性表面波(Surface Acoustic Wave; SAW)デバイスをセンサ素子のベース構造に用いたセンサチップの開発を最終目的としている。そのデバイスで、電極構造は、SAWの励振・検出を行う非常に重要な要素である。今回は、金/クロム薄膜を電極素材として選択し、SAWデバイスの作製を行った。

    CiNii Article

  • Microneedle array for medical application

    Proceedings of JSPE Semestrial Meeting 

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    Event date: 2017.09.20 - 2017.09.22   Language:Japanese  

    CiNii Article

  • Fluid–structure interaction design of insect–like micro flapping wing

    Daisuke Ishihara, Naoto Ohira, Masakatsu Takagi, Sunao Murakami, Masateru Araki, Tomoyoshi Horie

    The VII International Conference on Computational Methods for Coupled Problems in Science and Engineering (COUPLED PRBLEMS 2017)  2017.06  International Centre for Numerical Methods in Engineering

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    Event date: 2017.06.12 - 2017.06.14   Language:English   Country:Greece  

    Other Link: https://congress.cimne.com/coupled2017/frontal/default.asp

  • Fluid – structure interaction design of micro flexible wing mimicking insect flapping flight Invited

    Daisuke Ishihara, Sunao Murakami, Masateru Araki, Tomoyoshi Horie

    The 12th World Congress on Computational Mechanics (WCCM XII) / The 6th Asia-Pacific Congress on Computational Mechanics (APCOM VI)  International Association for Computational Mechanics (IACM)

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    Event date: 2016.06.24 - 2016.06.29   Language:English   Country:Korea, Republic of  

  • 消化管内走行カプセルの走行動作の研究

    瀬野浦 聖洸, 井上 星矢, 村上 直, 伊藤 高廣, 林 輝

    精密工学会学術講演会講演論文集 

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    Event date: 2015.01   Language:Japanese  

    現在、消化管検査には内視鏡が多く用いられる。しかし、従来の内視鏡では小腸の検査が困難であるため、カプセル内視鏡が普及し始めている。カプセル内視鏡は、消化管のぜん動運動に依存して管内を進むため、検査時間が長くなり、任意箇所に留まることができない。これらを解決するために、本研究では振動を利用することで管内を自立移動できるカプセルの開発を目的としている。今回は、カプセルの走行に利用する振動を考察した。

    CiNii Article

  • Fabrication of conical microstructures on the surface of single crystal silicon substrate by anisotropic etching

    Ishii Tomoyuki, Shimizu Seigi, Murakami Sunao, Tashiro Yasunori, Oniki Takahiro, Ito Takahiro

    Proceedings of JSPE Semestrial Meeting 

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    Event date: 2015.01   Language:Japanese  

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Honors and Awards

  • The 18th International Conference on Precision Engineering (ICPE2020) Best Paper Award

    公益社団法人 精密工学会   Impulse-driven Capsule for Medical Inspection   2020.11.26

    Yuichiro KAWASHIMA, Kenta ASAI, Shotaro WATANABE, Takahiro ITO, Sunao MURAKAMI, Kaoru KARASAWA, Chihiro KATSUTA, Akane TANAKA, Hiromu KUTSUMI

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    Country:Japan

    本賞は、ICPE2020において発表された全講演の中より特に研究内容が優れた講演に対して授与された論文賞である

Grants-in-Aid for Scientific Research

  • 微小体積での多成分ガス検知を目指したセンサ用素子の階層的配置と3次元溝構造の制御

    Grant number:15K21225  2015.04 - 2018.03   若手研究(B)

Award for Educational Activities

  • 2017年度 精密工学会九州支部 熊本地方講演会 ベストプレゼンテーション賞

    公益社団法人 精密工学会 九州支部   2017.12.02

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    研究指導を実質的に主担当している博士前期課程の学生が行った口頭発表(タイトル:「圧電マイクロデバイスのための金属薄膜電極パターンの作製」)が、研究および講演の内容が優れた講演発表に対して贈られる賞を受賞

Activities of Academic societies and Committees

  • The Japan Society for Precision Engineering  

    2016.02

  • The Japan Society for Precision Engineering  

    2018.04

  • The Japan Society for Precision Engineering  

    2017.10

  • The Institute of Electrical Engineers of Japan  

    2019.02

  • 電気学会   第41回「センサ・マイクロマシンと応用システム」シンポジウム 分野8 主査  

    2024.01

  • 電気学会   第40回「センサ・マイクロマシンと応用システム」シンポジウム 分野8 副査  

    2023.01 - 2023.12

  • The 13th Japan-China-Korea Joint Conference on MEMS/NEMS   Program Committee member  

    2022.08 - 2022.10

  • 日本機械学会 生産加工・工作機械部門   第10回JSME先端生産技術に関する国際会議 (LEM21) 実行委員  

    2020.10 - 2021.11

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Social activity outside the university

  • 飯塚キャンパスオープンキャンパス・学科研究紹介

    Role(s):Organizing member, Demonstrator

    飯塚キャンパスオープンキャンパス2023  飯塚キャンパス  2023.07.15 - 2023.07.16

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    Audience: High school students, Guardians

    Type:University open house

  • マイクロ化総合技術センター 一般公開(工大祭の際に実施)

    Role(s):Organizing member

    2017.11.19

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    Audience: General

    Type:Seminar, workshop

  • マイクロ化総合技術センター 2017年度 製造中核人材育成セミナー

    Role(s):Lecturer, Organizing member

    2017.08.01 - 2017.08.02

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    Audience: General

    Type:Seminar, workshop

  • 飯塚キャンパスオープンキャンパス・オープンラボ「ミクロの機械の不思議 マイクロマシン」

    Role(s):Demonstrator

    飯塚キャンパスオープンキャンパス2017  飯塚キャンパス  2017.07.15 - 2017.07.16

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    Audience: High school students, Guardians, General

    Type:University open house

  • 飯塚キャンパスオープンキャンパス・オープンラボ「ミクロの機械の不思議 マイクロマシン」

    Role(s):Demonstrator

    飯塚キャンパスオープンキャンパス2016  飯塚キャンパス  2016.07.16 - 2016.07.17

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    Audience: High school students, Guardians, General

    Type:University open house