Updated on 2024/05/14

 
SHIMIZU Hiroki
 
Scopus Paper Info  
Total Paper Count: 0  Total Citation Count: 0  h-index: 2

Citation count denotes the number of citations in papers published for a particular year.

Affiliation
Faculty of Engineering Department of Mechanical and Control Engineering
Job
Associate Professor
External link

Research Interests

  • measurement

Research Areas

  • Manufacturing Technology (Mechanical Engineering, Electrical and Electronic Engineering, Chemical Engineering) / Measurement engineering

  • Manufacturing Technology (Mechanical Engineering, Electrical and Electronic Engineering, Chemical Engineering) / Manufacturing and production engineering

Degree

  • Osaka University  -  Doctor of Engineering   2000.03

Biography in Kyutech

  • 2008.04
     

    Kyushu Institute of Technology   Faculty of Engineering   Department of Mechanical and Control Engineering   Associate Professor  

  • 2007.04
    -
    2008.03
     

    Kyushu Institute of Technology   School of Engineering   Department of Mechanical and Control Engineering   Associate Professor  

Academic Society Memberships

  • 2006.04   The Japan Society for Precision Engineering   Japan

  • 2007.04   The Japan Society of Mechanical Engineers   Japan

Papers

  • Confocal probe based on the second harmonic generation for measurement of linear and angular displacements Reviewed International journal

    Sato R., Shimizu Y., Shimizu H., Matsukuma H., Gao W.

    Optics Express   31 ( 7 )   11982 - 11993   2023.03

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    Language:English   Publishing type:Research paper (scientific journal)

    DOI: 10.1364/OE.486421

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  • Study of Second Harmonic Confocal Probe

    Sato Ryo, Shimizu Yuki, Shimizu Hiroki, Matsukuma Hiraku, Gao Wei

    Proceedings of JSPE Semestrial Meeting ( The Japan Society for Precision Engineering )   2023S ( 0 )   412 - 413   2023.03

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    Language:Japanese   Publishing type:Research paper (other academic)

    <p>Unlike conventional autocollimators that use collimated light, a new angle measurement method that can measure angles in a local area using converged light based on a confocal probe employing the principle of second harmonic generation in nonlinear optical crystals is proposed. The feasibility of the proposed principle is discussed in this paper by conducting numerical simulation analysis based on the proposed principle, and then examining the angle measurement range and measurement resolution.</p>

    DOI: 10.11522/pscjspe.2023s.0_412

    CiNii Research

  • 多点同時計測可能なカンチレバー式変位計デバイス

    加倉 誠勝, 小濱 大輝, 田丸 雄摩, 清水 浩貴

    精密工学会学術講演会講演論文集 ( 公益社団法人 精密工学会 )   2023S ( 0 )   436 - 437   2023.03

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    <p>一本のカンチレバーに2ないし3の探針と,探針数以上のひずみ検出部を設けることで多点変位の同時計測が可能なカンチレバー式変位計を提案する.この変位計は多点法形状計測に応用できる一方,変位とひずみの関係が複雑になる問題がある.そこで有限要素法によるひずみ解析の結果に機械学習の回帰の手法を適用してひずみと変位の変換モデルの作成を行い,変位の測定が行えることを確認した.</p>

    DOI: 10.11522/pscjspe.2023s.0_436

    CiNii Research

  • 3×3正方形配置センサユニットを用いた平面形状測定

    時實 拓紀, 野田 樹生, 田丸 雄摩, 清水 浩貴

    精密工学会学術講演会講演論文集 ( 公益社団法人 精密工学会 )   2023S ( 0 )   382 - 383   2023.03

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    <p>9つの距離センサを縦横に3つずつ並べた正方形配置のセンサユニットを用い,これを工作機械上で走査することで取得したデータを接続して平面加工物の形状再現を行う手法について検討した.既に算出済みの形状値にステージの運動誤差を考慮して測定データを接続する際の重ね合わせ領域のデータ処理方法,及び測定データの接続経路を変更することによる形状再現精度を数値シミュレーションを用いて比較した結果を報告する.</p>

    DOI: 10.11522/pscjspe.2023s.0_382

    CiNii Research

  • Investigation of Angle Measurement Based on Direct Third Harmonic Generation in Centrosymmetric Crystals Reviewed International journal

    Li K., Lin J., Zhang Z., Sato R., Shimizu H., Matsukuma H., Gao W.

    Applied Sciences (Switzerland)   13 ( 2 )   2023.01

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    Language:English   Publishing type:Research paper (scientific journal)

    DOI: 10.3390/app13020996

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  • Reduction of Crosstalk Errors in a Surface Encoder Having a Long Z-Directional Measuring Range Reviewed International journal

    Hong Y., Sato R., Shimizu Y., Matsukuma H., Shimizu H., Gao W.

    Sensors   22 ( 23 )   2022.12

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    Language:English   Publishing type:Research paper (scientific journal)

    DOI: 10.3390/s22239563

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  • A MEMS Device Integrating Multiple Cantilever Displacement Sensors to Evaluate Flat Machined Surfaces Reviewed International journal

    Shimizu Hiroki, Tamiya Koichi, Mizukami Shoichiro, Tamaru Yuuma

    International Journal of Automation Technology ( Fuji Technology Press Ltd. )   16 ( 5 )   582 - 587   2022.09

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    Authorship:Lead author, Corresponding author   Language:English   Publishing type:Research paper (scientific journal)

    <p>Multi-point scanning measurement, which is effective in eliminating motion errors of the stage in on-machine profile measurement, requires multiple displacement sensors of equal pitch to measure displacements simultaneously. However, it is not easy to arrange small sensors with high alignment accuracy when applying the multi-point method at a narrow pitch. In addition, if many sensors can be arranged in parallel, improvement in measurement accuracy can be expected. Therefore, a new micro electro mechanical system (MEMS) device for straightness measurement, one that integrates 10 cantilever displacement sensors, has been proposed. This device can be expected to solve the problem involved in the multi-point method because of the characteristics of MEMS, as the semiconductor processing method can make mechanical structures with high accuracy and it can easily make the device with many identical structures. The device is designed to measure waviness less than 100 μm in height. Ten cantilevers of 11 mm length are fabricated in parallel with 1.8 mm pitch on a side of a base substrate 20 mm square. The strain induced by a displacement of the probe placed near the front edge of the cantilever is detected as a change in the resistance of the piezo resistor at the foot of the cantilever. In the fabrication process of this device, crystal anisotropic etching is performed for 12 hours to form probes 250 μm high. A new fabrication process is also proposed in which a protective process is added to prevent damage to the circuits already formed during the etching. A prototype is investigated, and it is found that the resistance value increases about 0.45% in proportion to the displacement of 100 μm. It is therefore confirmed that this device has the basic ability to detect displacement.</p>

    DOI: 10.20965/ijat.2022.p0582

    Scopus

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  • Design and Prototyping of Biaxial Flexible Support Table for Fine Positioning Through Controlled Magnetic Attraction Forces Reviewed International journal

    Tamaru Yuuma, Kawata Kensuke, Shimizu Hiroki

    International Journal of Automation Technology ( Fuji Technology Press Ltd. )   16 ( 5 )   588 - 597   2022.09

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    <p>High-precision positioning can be obtained by reducing sliding friction and securing support rigidity. A prototype of a biaxial positioning table with non-contact drive by magnetic force and flexible mechanism support was developed to meet these requirements. The magnetic poles of a permanent magnet and an electromagnet were placed opposite to each other with an appropriate gap between them, and the attraction force between the two poles was used as the actuator for fine feed. The table was supported with a flexible mechanism composed of metal (A2017) beams with notches and elastic hinges assembled into a square frame shape. The permanent magnets were commercial neodymium magnets, and the electromagnets were self-made of S45C core bars. Two types of attraction force, maximum and minimum, were set depending on the number of neodymium magnets and the magnetic pole gap. The relationship between the applied current and attraction force for each type was calibrated using an electronic balance. Upon increasing and decreasing the applied current to the electromagnets, a linear relationship was shown between them. The relationship between the attraction force and the <i>X</i>- and <i>Y</i>-axes displacements was simulated by finite element analysis. Based on both results, the relationship between the applied current and displacement was estimated. The fine-feed experiment was conducted in both directions of the <i>X</i>- and <i>Y</i>-axes by applying current to electromagnets in a stepwise sequence. The displacements of total strokes in the long-stroke feed on applying the maximum attraction force were 340 μm and 315 μm for the <i>X</i>-axis and 160 μm and 133 μm for the <i>Y</i>-axis. These values are 2.0–2.8 times larger than the estimated displacement. Additionally, 3%–12% of the other axes interference occurred between the <i>X</i>- and <i>Y</i>-axes. In the high resolution feed applying the minimum attraction force, the displacement per step was 75 nm and 78 nm for the <i>X</i>-axis and 35 nm and 39 nm for the <i>Y</i>-axis. Cooperative feed with a combination of long stroke and high resolution was verified to be feasible.</p>

    DOI: 10.20965/ijat.2022.p0588

    CiNii Research

  • Development of fine positioning table supported by squeezed air films based on levitation force control (6th report)

    Tamaru Yuma, Ushijima Tomohiro, Shimizu Hiroki

    Proceedings of JSPE Semestrial Meeting ( The Japan Society for Precision Engineering )   2022A ( 0 )   28 - 29   2022.08

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    DOI: 10.11522/pscjspe.2022a.0_28

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  • Development of fine positioning table supported by squeezed air films based on levitation force control (5th report)

    Tamaru Yuma, Ushijima Tomohiro, Shimizu Hiroki

    Proceedings of JSPE Semestrial Meeting ( The Japan Society for Precision Engineering )   2022S ( 0 )   680 - 681   2022.03

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    DOI: 10.11522/pscjspe.2022s.0_680

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  • Feasibility study of multi-point two-dimensional profile measurement by 3-2-1 and 3×3 sensor layout Reviewed International journal

    Fujiwara R., Shimizu H.

    Measurement: Sensors   18   2021.12

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    Authorship:Last author, Corresponding author   Language:English   Publishing type:Research paper (international conference proceedings)

    DOI: 10.1016/j.measen.2021.100358

    Kyutacar

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  • A MEMS device for straightness measurement integrating 10 cantilever displacement sensors Reviewed International journal

    Shimizu H., Tamiya K., Mizukami S., Tamaru Y.

    10th International Conference on Leading Edge Manufacturing Technologies in 21st Century, LEM 2021   409 - 411   2021.11

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    Authorship:Lead author, Corresponding author   Language:English   Publishing type:Research paper (international conference proceedings)

    JAPAN   Kitakyushu, Fukuoka   2021.11.14  -  2021.11.18

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  • Consideration of Biaxial Flexible Support Table for Fine Positioning Through Controlled Magnetic Attraction Forces Reviewed International journal

    Tamaru Y., Kawata K., Shimizu H.

    10th International Conference on Leading Edge Manufacturing Technologies in 21st Century, LEM 2021   640 - 645   2021.11

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    JAPAN   Kitakyushu, Fukuoka   2021.11.14  -  2021.11.18

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  • Development of fine positioning table supported by squeezed air films based on levitation force control (4th report)

    Tamaru Yuuma, Ushijima Tomohiro, Shimizu Hiroki

    Proceedings of JSPE Semestrial Meeting ( The Japan Society for Precision Engineering )   2021A ( 0 )   154 - 155   2021.09

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    DOI: 10.11522/pscjspe.2021a.0_154

    CiNii Research

  • MEMS技術を応用した多点法走査形状測定用センサデバイスの開発(第9報)

    田宮 弘一, 田丸 雄摩, 清水 浩貴

    精密工学会学術講演会講演論文集 ( 公益社団法人 精密工学会 )   2021S ( 0 )   629 - 630   2021.03

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    <p>真直形状測定のための10点同時計測MEMSデバイスをシリコンバルクマイクロマシニング技術により製作した.前報より製作条件を変更することでプロセスの改善を図った.試作デバイスを評価するために各カンチレバー根元のピエゾ抵抗体を1辺とするブリッジ回路を組み,カンチレバー先端に変位を加えて出力電圧の変化を測定した.その結果,変位量に比例して出力電圧が減少し,デバイスが変位検出能を有していることを確認した.</p>

    DOI: 10.11522/pscjspe.2021s.0_629

    CiNii Article

    CiNii Research

  • Development of fine positioning table supported by squeezed air films based on levitation force control (3rd report)

    Tamaru Yuuma, Tofuku Shutaro, Shimizu Hiroki

    Proceedings of JSPE Semestrial Meeting ( The Japan Society for Precision Engineering )   2021S ( 0 )   471 - 472   2021.03

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    DOI: 10.11522/pscjspe.2021s.0_471

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  • Developing of flexible support table for fine feed by magnetic attraction controlled (3rd report)

    Tamaru Yuuma, Kawata Kensuke, Shimizu Hiroki

    Proceedings of JSPE Semestrial Meeting ( The Japan Society for Precision Engineering )   2020S ( 0 )   270 - 271   2020.03

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    Authorship:Last author   Language:Japanese   Publishing type:Research paper (conference, symposium, etc.)

    DOI: 10.11522/pscjspe.2020s.0_270

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  • High sensitivity MEMS displacement sensor device for planar shape measurement by deposition of piezoelectric materials Reviewed International journal

    K. Murayama, Y. Tamaru, H. Shimizu

    Proceedings of 8th International Conference of Asian Society for Precision Engineering and Nanotechnology ( Asian Society for Precision Engineering and Nanotechnology )   C13   2019.11

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    Japan   Matsue   2019.11.12  -  2019.11.15

  • Error Evaluation of Straightness Measurement Using a MEMS Device Integrating 10 Cantilever Displacement Sensors Reviewed

    Hiroki Shimizu, Shoichiro Mizukami, Makoto Manabe, Yuuma Tamaru

    Proceedings of the 14th International Symposium on Measurement Technology and Intelligent Instruments   D08   Paper ID:125   2019.09

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    Japan   Niigata   2019.09.01  -  2019.09.04

  • 磁気吸引力を利用した可撓支持微動テーブルの開発(第2報)

    田丸 雄摩, 河田 謙介, 清水 浩貴

    精密工学会学術講演会講演論文集 ( 公益社団法人 精密工学会 )   2019A ( 0 )   351 - 352   2019.08

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    <p>摺動摩擦を排除して高精度位置決めを達成するために永久磁石と電磁石を対にした磁気吸引力を利用する微動テーブルを提案している.前報では1軸の装置開発と性能について発表した.今回,1軸装置と同様に吸引力の較正や可撓機構の剛性見積を行って印加電流と変位の関係を予測し,新たに2軸駆動の装置を開発した.X,Y各軸の長ストロークと高分解能および2対の吸引力調整による両者連係での微動性能について報告する.</p>

    DOI: 10.11522/pscjspe.2019a.0_351

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  • Development of sensor device using MEMS technology for scanning profile measurement with multi-point method (8th Report)

    Mizukami Shoichiro, Manabe Makoto, Tamaru Yuuma, Shimizu Hiroki

    Proceedings of JSPE Semestrial Meeting ( The Japan Society for Precision Engineering )   2019S ( 0 )   473 - 474   2019.03

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    DOI: 10.11522/pscjspe.2019s.0_473

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  • On machine straightness measurement combining sequential two-point method and differential autocollimation method

    Miyata Tasuku, Tamaru Yuuma, Shimizu Hiroki

    Proceedings of JSPE Semestrial Meeting ( The Japan Society for Precision Engineering )   2019S ( 0 )   475 - 476   2019.03

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    DOI: 10.11522/pscjspe.2019s.0_475

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  • Developing of flexible support table for fine positioning by magnetic attraction controlled

    Tamaru Yuuma, Takuno Genki, Shimizu Hiroki

    Proceedings of JSPE Semestrial Meeting ( The Japan Society for Precision Engineering )   2019S ( 0 )   728 - 729   2019.03

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    DOI: 10.11522/pscjspe.2019s.0_728

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  • Accuracy improvement of 5 point MEMS displacement sensor device for planar form measurement by using SOI wafer

    SUGITA Kenya, MATSUMOTO Tetsuya, TAMARU Yuma, SHIMIZU Hiroki

    The Proceedings of Conference of Kyushu Branch ( The Japan Society of Mechanical Engineers )   2019.72 ( 0 )   A44   2019.01

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    <p>In the 5-point method, the straight profile measurement of one line is performed using the sequential three point method, and the relation between the lines is simultaneously measured by two sensors arranged on the next scan line. Using this relation, straightness measurement results of each line, which is acquired by the three-point method, are connected to obtain a planar shape. In order to realize the on-machine measurement by this principle, the authors have prototyped a 5-point MEMS displacement sensor device for measuring a planar shape with five cantilever displacement sensors in a 20 mm square silicon wafer. Each displacement sensor has a probe of a quadrilateral frustum with a height of 250 μm at the tip of the cantilever and detects the strain generated at the root portion as a resistance value change of the piezo resistor according to the displacement. With bulk silicon wafers, when fabricating a probe by etching, they were difficult to control the thickness of the cantilever after etching and the height of the probe according to the target values. Therefore, the authors adopted the Silicon-on-insulator (SOI) wafer to improve dimensional accuracy by using etching stopped at the SiO2 layer. With the fabrication process adopting the SOI wafer, variations in height of the probe are reduced compared with conventional fabrication process using bulk silicon wafer and the size of the tip of the probe can be controlled independently. Therefore, efficiency of fabrication process using the SOI wafer is confirmed.</p>

    DOI: 10.1299/jsmekyushu.2019.72.a44

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    Other Link: https://www.jstage.jst.go.jp/article/jsmekyushu/2019.72/0/2019.72_A44/_pdf

  • Improvement of zero adjustment error compensation in square layout four-point method by introducing angle sensor

    SASAHARA Ryutaro, SHIMIZU Hiroki, TAMARU Yuuma

    The Proceedings of Conference of Kyushu Branch ( The Japan Society of Mechanical Engineers )   2019.72 ( 0 )   A43   2019.01

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    <p>Square layout four-point method with angle correction has been proposed as an on-machine profile measurement method of machined flat surfaces. In this method, it is possible to measure the planar shape without the influence of translational error, pitching, and rolling of a stage. However, a zero-adjustment error, which is a deviation of the origin height of the four displacement sensors, causes a large form error of twist shape when the planar shape is reconstructed. To solve this problem, a back calculation method of the zero-adjustment error was proposed: which calculate zero-adjustment error from the difference in the error cumulative amount of two different calculation paths for a square measurement region, the raster scanning path and the diagonal path. To improve the calculation accuracy of zero-adjustment error, the authors have proposed to apply two-point method with angle correction to the diagonal direction by measuring the posture change of the stage unit with the angle sensor newly added in the diagonal direction. Monte Carlo simulations of the square layout four-point method and back calculation of zero-adjustment error were carried out. As a result, it was confirmed that the proposed method is effective to improve correction accuracy of the zero-adjustment error.</p>

    DOI: 10.1299/jsmekyushu.2019.72.a43

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    Other Link: https://www.jstage.jst.go.jp/article/jsmekyushu/2019.72/0/2019.72_A43/_pdf

  • Square layout four-point method for two-dimensional profile measurement and self-calibration method of zero-adjustment error Reviewed International journal

    12 ( 5 )   707 - 713   2018.09

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    Authorship:Lead author, Corresponding author   Language:English   Publishing type:Research paper (scientific journal)

    DOI: 10.20965/ijat.2018.p0707

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  • Development of fine positioning table supported by squeezed air films based on levitation force control (2nd report)

    Tamaru Yuuma, Magarifuchi Hironori, Matsumoto Tetsuya, Shimizu Hiroki

    Proceedings of JSPE Semestrial Meeting ( The Japan Society for Precision Engineering )   2018A ( 0 )   494 - 495   2018.08

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    DOI: 10.11522/pscjspe.2018a.0_494

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  • A novel compensation method of zero-adjustment error in flatness measurement using serial four-point method Reviewed International journal

    SHIMIZU Hiroki, YAMASHITA Ryousuke, HASHIGUCHI Takuya, MIYATA Tasuku

    Proceedings of International Conference on Leading Edge Manufacturing in 21st century : LEM21 ( The Japan Society of Mechanical Engineers )   2017.9 ( 0 )   163   2017.11

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    <p>The authors proposed a novel on-machine measurement method for evaluating three-dimensional profiles of machined flat surface: square layout four point (SLFP) method with angle compensation. The SLFP method enables to connect the results of straightness measurements of each scanning line by using additional two sensors and an angle sensor. Numerical simulation showed that the accumulation of zero adjustment error of displacement sensors makes unignorable distortion on the measurement results. Hence, a new calibration method for zero adjustment error was proposed and the validity of the method was confirmed by an experiment.</p>

    DOI: 10.1299/jsmelem.2017.9.163

    Scopus

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  • Linear slider supported by squeezed air films with self-propulsion mechanism based on floating height difference Reviewed

    TAMARU Yuuma, SHIMIZU Hiroki

    Transactions of the JSME (in Japanese)   83 ( 854 )   17 - 00278-17-00278   2017.10

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    Language:Japanese   Publishing type:Research paper (scientific journal)

    DOI: 10.1299/transjsme.17-00278

    CiNii Article

    Other Link: https://ci.nii.ac.jp/naid/130006181353

  • 角度補正付き逐次多点法を用いた走査型平面形状測定(第4報)

    橋口 拓也, 清水 浩貴, 田丸 雄摩

    精密工学会学術講演会講演論文集 ( 公益社団法人 精密工学会 )   2017S ( 0 )   297 - 298   2017.01

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    本研究は,広範囲の平面形状測定法として逐次多点法に基づく走査型測定法を提案するものである.本報では,4本の変位センサを正方配置し,2軸の角度補正を併用する測定法について検討した.まず,センサのノイズレベルと測定結果の不確かさの関係をモンテカルロシミュレーションにより確認した.次に単一のセンサに感度差を与え,それに起因する誤差が累積することで測定結果に与える影響を確認した.

    DOI: 10.11522/pscjspe.2017s.0_297

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  • Development of fine motion table supported by squeezed air films based on levitation force control

    Tamaru Yuuma, Matsumoto Tetsuya, Shimizu Hiroki

    Proceedings of JSPE Semestrial Meeting ( The Japan Society for Precision Engineering )   2017A ( 0 )   727 - 728   2017.01

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    DOI: 10.11522/pscjspe.2017a.0_727

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  • MEMS技術を応用した多点法走査形状測定用センサデバイスの開発(第7報)

    本永 聡一朗, 是永 遼介, 清水 浩貴, 田丸 雄摩

    精密工学会学術講演会講演論文集 ( 公益社団法人 精密工学会 )   2017S ( 0 )   291 - 292   2017.01

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    Language:Japanese   Publishing type:Research paper (other academic)

    本研究は,等間隔に並べたカンチレバー式高分解能変位センサ3つと,次走査線上に配置したセンサ2つを一体化した多点法平面測定用MEMSデバイスを開発するものである.本デバイスは感度向上のため,応力検出部が存在するカンチレバー根元部に応力集中が効率的に生じるよう,矩形梁の採用と穴形状の付加を行った.本報では改良の定量評価のため行ったFEM解析の結果と,それを元に作製したデバイスについて報告する.

    DOI: 10.11522/pscjspe.2017s.0_291

    CiNii Article

    CiNii Research

  • Redesign of cantilever displacement sensor to improve sensitivity and channel separation Reviewed

    2015.10

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    Language:English   Publishing type:Research paper (international conference proceedings)

    Scopus

    Other Link: https://www.scopus.com/inward/record.uri?partnerID=HzOxMe3b&scp=84974604593&origin=inward

  • Property Evaluation of Eccentric Astigmatic Method to Apply Micro Tactile Probe Reviewed

    9 ( 5 )   551 - 557   2015.09

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    Authorship:Corresponding author   Language:English   Publishing type:Research paper (scientific journal)

    DOI: 10.20965/ijat.2015.p0551

    Scopus

  • Design of a MEMS device for scanning profile measurement with three cantilever displacement sensors Reviewed

    1 - 5   Paper ID 1196   2015.09

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    Authorship:Corresponding author   Language:English   Publishing type:Research paper (international conference proceedings)

    Taiwan   Taipei   2015.09.22  -  2015.09.25

  • Displacment Detection of Small Sphere using Eccentric Astigmatic Method Reviewed

    1 - 4   index: B18   2014.09

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    Authorship:Corresponding author   Language:English   Publishing type:Research paper (international conference proceedings)

    Japan   Tsukuba   2014.09.02  -  2014.09.05

  • Correction of positioning and angular errors for ball screw feed unit Reviewed

    Yuuma TAMARU, Hiroki SHIMIZU, Hiroshi KAMODA

    Transactions of the JSME   80 ( 816 )   1 - 11   DR0240   2014.08

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    Language:Japanese   Publishing type:Research paper (scientific journal)

    DOI: 10.1299/transjsme.2014dr0240

    CiNii Article

  • Development of a Compact Deformable Mirror using Push-Pull Actuators Reviewed

    613   200 - 203   2014.05

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    Authorship:Corresponding author   Language:English   Publishing type:Research paper (scientific journal)

  • 16・8 加工計測(16.加工学・加工機器,<特集>機械工学年鑑)

    清水 浩貴

    日本機械学会誌 ( 一般社団法人 日本機械学会 )   116 ( 1137 )   571 - 572   2013.01

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    Language:Japanese   Publishing type:Article, review, commentary, editorial, etc. (scientific journal)

    DOI: 10.1299/jsmemag.116.1137_571

    CiNii Article

    Other Link: https://ci.nii.ac.jp/naid/110009635464

  • 長ストロークと高精度位置決めを両立する連係微動 Reviewed

    田丸雄摩,高藤和樹,清水浩貴

    日本機械学会論文集(C編)   74 ( 745 )   2294 - 2299   2008.09

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    主要雑誌

  • Theoretical Study on Self-calibration for the Wide-rangeLaser Auto-collimation Method Reviewed

    H.Shimizu,O.Hayashi

    Key Engineering Materials   381-382   271 - 274   2008.06

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    Kyutacar

  • 高感度2軸マイクロ角度センサの開発 Reviewed

    高偉,齋藤悠佑,佐藤隼人,清野慧,清水浩貴,広瀬純

    精密工学会誌   72 ( 9 )   1174 - 1178   2006.09

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    主要雑誌

  • Three-Dimensional Slit Width Measurement for Long Precision Slot Dies Reviewed

    M. Furukawa,W. Gao,H. Shimizu,S. Kiyono,M. Yasutake,K. Takahashi

    Key Engineering Materials   295-296   343 - 348   2005.10

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  • A Biological Sensor for Detecting Foreign Bodies Using a Balloon Probe Reviewed

    H. Shimizu,S. Kiyono,W. Gao,H. Shoji

    Key Engineering Materials   295-296   133 - 138   2005.10

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  • An electrical pen for signature verification using a two-dimensional optical angle sensor Reviewed

    Hiroki Shimizu,Satoshi Kiyono,Takenori Motoki,Wei Gao

    Sensors and Actuators, A   111   216 - 221   2004.04

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Conference Prsentations (Oral, Poster)

  • MEMS技術を応用した多点法走査形状測定用センサデバイスの開発(第9報)-10点同時計測MEMSデバイスの試作と評価-

    田宮弘一,田丸雄摩,清水浩貴

    2021年度精密工学会春季大会学術講演会  精密工学会

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    Event date: 2021.03.16 - 2021.03.22   Language:Japanese  

  • MEMS技術を応用した多点法走査形状測定用センサデバイスの開発(第8報)—10点同時測定による誤差累積の影響低減—

    水上 翔一朗, 真鍋 真, 田丸 雄摩, 清水 浩貴

    2019年度精密工学会春季大会学術講演会  精密工学会

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    Event date: 2019.03.13 - 2019.03.15   Language:Japanese  

  • 逐次二点法と差動オートコリメーション法を併用した真直度機上測定

    宮田 佑, 田丸 雄摩, 清水 浩貴

    2019年度精密工学会春季大会学術講演会  精密工学会

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    Event date: 2019.03.13 - 2019.03.15   Language:Japanese  

  • Development of fine motion table supported by squeezed air films based on levitation force control

    Proceedings of JSPE Semestrial Meeting 

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    Event date: 2017.03.13 - 2017.03.15   Language:Japanese  

    CiNii Article

  • Sensitivity improvement of a multi cantilever device for straightness measurement using the three-point method

    The Proceedings of Mechanical Engineering Congress, Japan 

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    Event date: 2016.09.11 - 2016.09.14   Language:Japanese  

    CiNii Article

  • 角度補正付き逐次多点法を用いた走査型平面形状測定(第2報)一長ピッチ測定を援用した2次誤差軽減法の検討一

    夘田将太

    2015 年度精密工学会春季大会  精密工学会

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    Event date: 2015.03.17 - 2015.03.19   Language:Japanese  

  • MEMS技術を応用した多点法走査形状測定用センサデバイスの開発(第6報)一平面測定用デバイスの製作一

    菊地洋輝

    2015 年度精密工学会春季大会  精密工学会

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    Event date: 2015.03.17 - 2015.03.19   Language:Japanese  

  • MEMS技術を応用した多点法走査型形状測定用センサデバイスの開発(第5報)—平面測定用デバイスの設計と構造解析—

    菊地洋輝

    2014 年度精密工学会秋季大会  精密工学会

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    Event date: 2014.09.16 - 2014.09.18   Language:Japanese  

  • スクイーズ効果によって浮上支持された物体のアクティブ制振 (完全非接触支持による制振特性検証の精度向上)

    松本勇毅

    2014 年度精密工学会春季大会  精密工学会

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    Event date: 2014.03.18 - 2014.03.20   Language:Japanese  

  • MEMS技術を応用した多点法走査形状測定用マルチカンチレバーの開発(第4報)—表面荒れを抑えた探針製作法—

    殘華智仁

    2014 年度精密工学会春季大会  精密工学会

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    Event date: 2014.03.18 - 2014.03.20   Language:Japanese  

  • 角度補正付き逐次多点法を用いた走査型平面形状測定(第1報)—測定原理の検討と基礎的検証—

    藤田豊栄

    2014 年度精密工学会春季大会  精密工学会

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    Event date: 2014.03.18 - 2014.03.20   Language:Japanese  

  • On-machine profiler for machined surface using 3-point method

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    Event date: 2014.03.13 - 2014.03.14   Language:Japanese  

  • MEMS技術を応用した多点法走査形状測定用マルチカンチレバーの開発(第3報)—ピエゾ抵抗体の試作と製作プロセスの統合—

    水頭正一郎

    2012 年度精密工学会秋季大会  精密工学会

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    Event date: 2012.09.14 - 2012.09.16   Language:Japanese  

  • スクイーズ膜支持リニアスライダのアクティブ制振

    松本勇毅

    2012 年度精密工学会秋季大会  精密工学会

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    Event date: 2012.09.14 - 2012.09.16   Language:Japanese  

  • 拡張レーザオートコリメーション法による形状測定装置の開発(第2報-曲面の法線方向を高分解能で測定できる角度センサ-

    機械知能工学科

    2010年度精密工学会春季大会学術講演会講演論文集 

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    Event date: 2010.03.16 - 2010.03.18   Language:Japanese  

  • 可変形鏡を用いた光学測定機器の較正と高機能化(第2報)-押し引き可能な変形機構を用いた可変形鏡の開発-

    機械知能工学専攻

    2010年度精密工学会春季大会学術講演会講演論文集 

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    Event date: 2010.03.16 - 2010.03.18   Language:Japanese  

  • 非点収差法を利用したマイクロタッチプローブ

    機械知能工学専攻,佐々木啓成

    日本機械学会九州支部講演論文集 

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    Event date: 2008.03.18   Language:Japanese  

  • 可変形鏡を用いた光学測定機器の較正と高機能化(第1報)-特性補正の基礎実験-

    機械知能工学専攻,諸冨啓

    2008年度精密工学会春季大会学術講演会 

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    Event date: 2008.03.17 - 2008.03.19   Language:Japanese  

  • 姿勢補正機能をもつボールねじ式位置決めステージ-第1報 構想と装置の試作-

    機械知能工学専攻,鎌田紘介

    2009年度精密工学会春季大会学術講演会講演論文集 

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    Event date: 2008.03.11 - 2008.03.13   Language:Japanese  

  • 拡張レーザーオートコリメーション法による形状測定装置の開発―自律校正法の検討―

    機械知能工学専攻

    精密工学会春季大会講演論文集 

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    Event date: 2007.03.20 - 2007.03.22   Language:Japanese  

  • An Extended Auto-Collimation Method Combined with a Deflect Optical System for Non-Contact Profile Measurement

    Proc. of 5th International euspen Conference 

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    Event date: 2005.05.08 - 2005.05.11   Language:English  

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Honors and Awards

  • 工作機械技術振興財団 奨励賞

    工作機械技術振興財団   2014.06.23

    崎田浩輔, 清水浩貴, 田丸雄摩

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    Country:Japan

Grants-in-Aid for Scientific Research

  • 機械平面形状計測のための多点変位同時測定デバイスの開発

    Grant number:25420057  2013.04 - 2016.03   基盤研究(C)

  • 運動誤差測定用3点法マイクロプローブユニットの開発と新調整アルゴリズムの実証

    Grant number:22760099  2010.04 - 2013.03   若手研究(B)

Other External Funds

  • 高品位機械加工面創成のための加工計測用MEMSデバイスの開発

    2016.04 - 2017.03

    平成28年度新成長戦略推進研究開発事業(シーズ創出・実用性検証事業)  

Social activity outside the university

  • 教員免許状更新講習会

    Role(s):Lecturer

    2018.08.28

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    Audience: Teachers

    Type:Certification seminar

    教員免許状更新講習会 選択領域「放射線の測り方/福島と原発の今」を開催した

  • 教員免許状更新講習会

    Role(s):Lecturer

    2017.08.25

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    Audience: Teachers

    Type:Certification seminar

    教員免許状更新講習会 選択領域「放射線の測り方/福島と原発の今」を開催した