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• High sensitivity MEMS displacement sensor device for planar shape measurement by deposition of piezoelectric materials

  K. Murayama, Y. Tamaru, H. Shimizu

  Proceedings of 8th International Conference of Asian Society for Precision Engineering and Nanotechnology  ( Asian Society for Precision Engineering and Nanotechnology )    C13   2019年11月  [査読有り]

  Japan  Matsue  2019年11月  -  2019年11月

• Error Evaluation of Straightness Measurement Using a MEMS Device Integrating 10 Cantilever Displacement Sensors

  Hiroki Shimizu, Shoichiro Mizukami, Makoto Manabe, Yuuma Tamaru

  Proceedings of the 14th International Symposium on Measurement Technology and Intelligent Instruments      D08   Paper ID:125   2019年09月  [査読有り]

  Japan  Niigata  2019年09月  -  2019年09月

• Square layout four-point method for two-dimensional profile measurement and self-calibration method of zero-adjustment error

  Shimizu H., Yamashita R., Hashiguchi T., Miyata T., Tamaru Y.

  International Journal of Automation Technology    12 ( 5 ) 707 - 713   2018年09月  [査読有り]

   概要を見る

  © 2018, Fuji Technology Press. All rights reserved. An on-machine measurement method, called the square-layout four-point (SLFP) method with angle compensation, for evaluating two-dimensional (2-D) profiles of flat machined surfaces is proposed. In this method, four displacement sensors are arranged in a square and mounted to the scanning table of a 2-D stage. For measuring the 2-D profile of a target plane, height data corresponding to all measuring points are acquired by means of the raster scanning motion. At the same time, pitching data of the first primary scan line and rolling data of the first subsidiary scan line are monitored by means of two auto-collimators to compensate for major profile errors that arise out of the posture error. Use of the SLFP method facilitates connection of the results of straightness-measurements results obtained for each scanning line by using two additional sensors and rolling data of the first subsidiary scan line. Specifically, the height of a measuring point is calculated by means of a recurrence equation using three predetermined height data for adjacent points in conjunction with data acquired by the four displacement sensors. Results of the numerical simulation performed in this study demonstrate higher efficiency of the SLFP method with angle compensation. During actual measurement, however, it is difficult to perfectly align inline the origin height of each displacement sensor. With regard to the SLFP method, zero-adjustment error is defined as the relative height of a sensor’s origin with respect to the plane comprising origins of the other three sensors. This error accumulates in proportion to number of times the recurrence equation is applied. Simulation results containing the zero-adjustment error demonstrate that accumulation of the said error results in unignorable distortion of measurement results. Therefore, a new self-calibration method for the zero-adjustment error has been proposed. During 2-D profile measurement, two different calculation paths – the raster scan path and orthogonal path – can be used to determine the height of a measurement point. Although heights determined through use of the two paths must ideally be equal, they are observed to be different because accumulated zero-adjustment errors for the two paths are different. In view of this result, the zero-adjustment error can be calculated backwards and calibrated. Validity of the calibration method has been confirmed via simulations and experiments.

  DOI Scopus CiNii

• A novel compensation method of zero-adjustment error in flatness measurement using serial four-point method

  Shimizu H., Yamashita R., Hashiguchi T., Miyata T.

  Proceedings of the 9th International Conference on Leading Edge Manufacturing in 21st Century, LEM 2017      2017年11月  [査読有り]

   概要を見る

  The authors proposed a novel on-machine measurement method for evaluating three-dimensional profiles of machined flat surface: square layout four point (SLFP) method with angle compensation. The SLFP method enables to connect the results of straightness measurements of each scanning line by using additional two sensors and an angle sensor. Numerical simulation showed that the accumulation of zero adjustment error of displacement sensors makes unignorable distortion on the measurement results. Hence, a new calibration method for zero adjustment error was proposed and the validity of the method was confirmed by an experiment.

  Scopus

• 浮上量差による推進機構を付加したスクイーズ効果支持リニアスライダ

  田丸 雄摩, 清水 浩貴

  日本機械学会論文集    83 ( 854 ) 17 - 00278-17-00278   2017年10月  [査読有り]

   概要を見る

  Non-contact supports involving air or magnetic forces are used as guide supports for linear motion mechanisms. In the present study, non-contact supports are generated using the effect of the static pressure force produced by a squeezed air film. The linear slider is supported at just two of its ends. Applying a different excitation amplitude to the two transducers leads to a difference in the floating height at either end of the slider due to the different air-film thicknesses. This causes the slider to tilt, which produces a propulsion force due to the dead load. An experimental apparatus with a flat plate slider was developed and its floating characteristics were examined. In addition, the propulsion force was measured for sliders with different weights. The results indicated that the floating height was 2 to 3 times the excitation amplitude. The slider was capable of travelling all over the movement stroke. The traveling force increased with increasing slider weight, and was about 0.15-0.35 mN. The measurement results were in good agreement with theoretical calculations. Thus, the present study showed that the slider could be successfully supported in a non-contact state and was capable of movement under the influence of a propulsion force generated only by the dead load.

  DOI CiNii

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• 浮上力制御を利用したスクイーズ効果支持微動テーブルの開発

  田丸 雄摩

  精密工学会学術講演会講演論文集  (慶應義塾大学)  2017年03月  -  2017年03月    精密工学会

   概要を見る

  微動性能向上の鍵は摺動部の摩擦低減にある．本研究ではスクイーズ効果で浮上支持させ，浮上力制御と自重バランスで駆動可能な微動テーブルを開発した．加振振幅を与えることで浮上力が得られ，振幅調整によって微動が生じる．試験の結果，テーブルが非接触で支持されていることを確認した．また，振幅をステップ状に変化させたところ変化に応じてテーブルが微動し，全ストローク変位と最小変位を観察できた．

  CiNii

• 真直形状測定用 3 点法マルチカンチレバー変位計の高感度化モデルの検討

  荒牧 健太郎

  日本機械学会2016年度年次大会  (九州大学伊都キャンパス)  2016年09月  -  2016年09月    日本機械学会

   概要を見る

  <p>In this study, we developed a multi cantilever device for straightness measurement using the three point method. This device has three triangular cantilever works as displacement sensors. When the displacement is given at the probe placed at the end of the cantilever, stress arises in the cantilever. Displacement is measured by detecting the stress change using two piezo resistances at the root of the cantilever. This paper presents the results of sensitivity evaluation of improved device models. To improve the sensitivity, we considered the shape to make stress concentration in the strain detecting section of the device, and examined the effects by the finite element method. As a result, it was confirmed that transverse notches on both sides at the root of the cantilever and a rectangular hole between the piezo resisances are effective for sensitivity improvement and crosstalk reduction. Furthermore, we also simulate models of changing thickness of each part and models of changing position of piezo resistance.</p>

  CiNii

• 角度補正付き逐次多点法を用いた走査型平面形状測定（第2報）一長ピッチ測定を援用した2次誤差軽減法の検討一

  夘田将太

  2015 年度精密工学会春季大会  (東洋大学　白山キャンパス)  2015年03月  -  2015年03月    精密工学会

• MEMS技術を応用した多点法走査形状測定用センサデバイスの開発（第6報）一平面測定用デバイスの製作一

  菊地洋輝

  2015 年度精密工学会春季大会  (東洋大学　白山キャンパス)  2015年03月  -  2015年03月    精密工学会

• MEMS技術を応用した多点法走査型形状測定用センサデバイスの開発（第5報）—平面測定用デバイスの設計と構造解析—

  菊地洋輝

  2014 年度精密工学会秋季大会  (鳥取大学　鳥取キャンパス)  2014年09月  -  2014年09月    精密工学会

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• 工作機械技術振興財団 奨励賞

  2014年06月23日   工作機械技術振興財団   日本国

  受賞者：  崎田浩輔, 清水浩貴, 田丸雄摩

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• 機械平面形状計測のための多点変位同時測定デバイスの開発

  基盤研究(C)

  研究期間:  2013年04月  -  2016年03月

  研究課題番号:  25420057

• 運動誤差測定用3点法マイクロプローブユニットの開発と新調整アルゴリズムの実証

  若手研究(B)

  研究期間:  2010年04月  -  2013年03月

  研究課題番号:  22760099

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• 高品位機械加工面創成のための加工計測用MEMSデバイスの開発

  提供機関:  公益財団法人　北九州産業学術推進機構 

  研究期間:  2016年04月  -  2017年03月

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