Faculty Profiles - SHIMIZU Hiroki

Papers - SHIMIZU Hiroki

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Confocal probe based on the second harmonic generation for measurement of linear and angular displacements Reviewed International journal

Sato R., Shimizu Y., Shimizu H., Matsukuma H., Gao W.

Optics Express 31 ( 7 ) 11982 - 11993 2023.03

Study of Second Harmonic Confocal Probe

Sato Ryo, Shimizu Yuki, Shimizu Hiroki, Matsukuma Hiraku, Gao Wei

Proceedings of JSPE Semestrial Meeting ( The Japan Society for Precision Engineering ) 2023S ( 0 ) 412 - 413 2023.03

Language：Japanese Publishing type：Research paper (other academic)

Unlike conventional autocollimators that use collimated light, a new angle measurement method that can measure angles in a local area using converged light based on a confocal probe employing the principle of second harmonic generation in nonlinear optical crystals is proposed. The feasibility of the proposed principle is discussed in this paper by conducting numerical simulation analysis based on the proposed principle, and then examining the angle measurement range and measurement resolution.

DOI： 10.11522/pscjspe.2023s.0_412

CiNii Research

多点同時計測可能なカンチレバー式変位計デバイス

加倉誠勝, 小濱大輝, 田丸雄摩, 清水浩貴

精密工学会学術講演会講演論文集 ( 公益社団法人精密工学会 ) 2023S ( 0 ) 436 - 437 2023.03

Authorship：Last author Language：Japanese Publishing type：Research paper (other academic)

一本のカンチレバーに２ないし３の探針と,探針数以上のひずみ検出部を設けることで多点変位の同時計測が可能なカンチレバー式変位計を提案する.この変位計は多点法形状計測に応用できる一方,変位とひずみの関係が複雑になる問題がある.そこで有限要素法によるひずみ解析の結果に機械学習の回帰の手法を適用してひずみと変位の変換モデルの作成を行い,変位の測定が行えることを確認した.

DOI： 10.11522/pscjspe.2023s.0_436

CiNii Research

3×3正方形配置センサユニットを用いた平面形状測定

時實拓紀, 野田樹生, 田丸雄摩, 清水浩貴

精密工学会学術講演会講演論文集 ( 公益社団法人精密工学会 ) 2023S ( 0 ) 382 - 383 2023.03

Authorship：Last author Language：Japanese Publishing type：Research paper (other academic)

9つの距離センサを縦横に3つずつ並べた正方形配置のセンサユニットを用い，これを工作機械上で走査することで取得したデータを接続して平面加工物の形状再現を行う手法について検討した．既に算出済みの形状値にステージの運動誤差を考慮して測定データを接続する際の重ね合わせ領域のデータ処理方法，及び測定データの接続経路を変更することによる形状再現精度を数値シミュレーションを用いて比較した結果を報告する．

DOI： 10.11522/pscjspe.2023s.0_382

CiNii Research

Investigation of Angle Measurement Based on Direct Third Harmonic Generation in Centrosymmetric Crystals Reviewed International journal

Li K., Lin J., Zhang Z., Sato R., Shimizu H., Matsukuma H., Gao W.

Applied Sciences (Switzerland) 13 ( 2 ) 2023.01

Reduction of Crosstalk Errors in a Surface Encoder Having a Long Z-Directional Measuring Range Reviewed International journal

Hong Y., Sato R., Shimizu Y., Matsukuma H., Shimizu H., Gao W.

Sensors 22 ( 23 ) 2022.12

A MEMS Device Integrating Multiple Cantilever Displacement Sensors to Evaluate Flat Machined Surfaces Reviewed International journal

Shimizu Hiroki, Tamiya Koichi, Mizukami Shoichiro, Tamaru Yuuma

International Journal of Automation Technology ( Fuji Technology Press Ltd. ) 16 ( 5 ) 582 - 587 2022.09

Authorship：Lead author,　Corresponding author Language：English Publishing type：Research paper (scientific journal)

Multi-point scanning measurement, which is effective in eliminating motion errors of the stage in on-machine profile measurement, requires multiple displacement sensors of equal pitch to measure displacements simultaneously. However, it is not easy to arrange small sensors with high alignment accuracy when applying the multi-point method at a narrow pitch. In addition, if many sensors can be arranged in parallel, improvement in measurement accuracy can be expected. Therefore, a new micro electro mechanical system (MEMS) device for straightness measurement, one that integrates 10 cantilever displacement sensors, has been proposed. This device can be expected to solve the problem involved in the multi-point method because of the characteristics of MEMS, as the semiconductor processing method can make mechanical structures with high accuracy and it can easily make the device with many identical structures. The device is designed to measure waviness less than 100 μm in height. Ten cantilevers of 11 mm length are fabricated in parallel with 1.8 mm pitch on a side of a base substrate 20 mm square. The strain induced by a displacement of the probe placed near the front edge of the cantilever is detected as a change in the resistance of the piezo resistor at the foot of the cantilever. In the fabrication process of this device, crystal anisotropic etching is performed for 12 hours to form probes 250 μm high. A new fabrication process is also proposed in which a protective process is added to prevent damage to the circuits already formed during the etching. A prototype is investigated, and it is found that the resistance value increases about 0.45% in proportion to the displacement of 100 μm. It is therefore confirmed that this device has the basic ability to detect displacement.

DOI： 10.20965/ijat.2022.p0582

Scopus

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Design and Prototyping of Biaxial Flexible Support Table for Fine Positioning Through Controlled Magnetic Attraction Forces Reviewed International journal

Tamaru Yuuma, Kawata Kensuke, Shimizu Hiroki

International Journal of Automation Technology ( Fuji Technology Press Ltd. ) 16 ( 5 ) 588 - 597 2022.09

Authorship：Last author Language：English Publishing type：Research paper (scientific journal)

High-precision positioning can be obtained by reducing sliding friction and securing support rigidity. A prototype of a biaxial positioning table with non-contact drive by magnetic force and flexible mechanism support was developed to meet these requirements. The magnetic poles of a permanent magnet and an electromagnet were placed opposite to each other with an appropriate gap between them, and the attraction force between the two poles was used as the actuator for fine feed. The table was supported with a flexible mechanism composed of metal (A2017) beams with notches and elastic hinges assembled into a square frame shape. The permanent magnets were commercial neodymium magnets, and the electromagnets were self-made of S45C core bars. Two types of attraction force, maximum and minimum, were set depending on the number of neodymium magnets and the magnetic pole gap. The relationship between the applied current and attraction force for each type was calibrated using an electronic balance. Upon increasing and decreasing the applied current to the electromagnets, a linear relationship was shown between them. The relationship between the attraction force and the X- and Y-axes displacements was simulated by finite element analysis. Based on both results, the relationship between the applied current and displacement was estimated. The fine-feed experiment was conducted in both directions of the X- and Y-axes by applying current to electromagnets in a stepwise sequence. The displacements of total strokes in the long-stroke feed on applying the maximum attraction force were 340 μm and 315 μm for the X-axis and 160 μm and 133 μm for the Y-axis. These values are 2.0–2.8 times larger than the estimated displacement. Additionally, 3%–12% of the other axes interference occurred between the X- and Y-axes. In the high resolution feed applying the minimum attraction force, the displacement per step was 75 nm and 78 nm for the X-axis and 35 nm and 39 nm for the Y-axis. Cooperative feed with a combination of long stroke and high resolution was verified to be feasible.

DOI： 10.20965/ijat.2022.p0588

CiNii Research

Development of fine positioning table supported by squeezed air films based on levitation force control (6th report)

Tamaru Yuma, Ushijima Tomohiro, Shimizu Hiroki

Proceedings of JSPE Semestrial Meeting ( The Japan Society for Precision Engineering ) 2022A ( 0 ) 28 - 29 2022.08

Development of fine positioning table supported by squeezed air films based on levitation force control (5th report)

Tamaru Yuma, Ushijima Tomohiro, Shimizu Hiroki

Proceedings of JSPE Semestrial Meeting ( The Japan Society for Precision Engineering ) 2022S ( 0 ) 680 - 681 2022.03

Feasibility study of multi-point two-dimensional profile measurement by 3-2-1 and 3×3 sensor layout Reviewed International journal

Fujiwara R., Shimizu H.

Measurement: Sensors 18 2021.12

A MEMS device for straightness measurement integrating 10 cantilever displacement sensors Reviewed International journal

Shimizu H., Tamiya K., Mizukami S., Tamaru Y.

10th International Conference on Leading Edge Manufacturing Technologies in 21st Century, LEM 2021 409 - 411 2021.11

Consideration of Biaxial Flexible Support Table for Fine Positioning Through Controlled Magnetic Attraction Forces Reviewed International journal

Tamaru Y., Kawata K., Shimizu H.

10th International Conference on Leading Edge Manufacturing Technologies in 21st Century, LEM 2021 640 - 645 2021.11

Development of fine positioning table supported by squeezed air films based on levitation force control (4th report)

Tamaru Yuuma, Ushijima Tomohiro, Shimizu Hiroki

Proceedings of JSPE Semestrial Meeting ( The Japan Society for Precision Engineering ) 2021A ( 0 ) 154 - 155 2021.09

MEMS技術を応用した多点法走査形状測定用センサデバイスの開発（第9報）

田宮弘一, 田丸雄摩, 清水浩貴

精密工学会学術講演会講演論文集 ( 公益社団法人精密工学会 ) 2021S ( 0 ) 629 - 630 2021.03

Authorship：Last author Language：Japanese Publishing type：Research paper (other academic)

真直形状測定のための10点同時計測MEMSデバイスをシリコンバルクマイクロマシニング技術により製作した．前報より製作条件を変更することでプロセスの改善を図った．試作デバイスを評価するために各カンチレバー根元のピエゾ抵抗体を1辺とするブリッジ回路を組み，カンチレバー先端に変位を加えて出力電圧の変化を測定した．その結果，変位量に比例して出力電圧が減少し，デバイスが変位検出能を有していることを確認した．

DOI： 10.11522/pscjspe.2021s.0_629

CiNii Article

CiNii Research

Development of fine positioning table supported by squeezed air films based on levitation force control (3rd report)

Tamaru Yuuma, Tofuku Shutaro, Shimizu Hiroki

Proceedings of JSPE Semestrial Meeting ( The Japan Society for Precision Engineering ) 2021S ( 0 ) 471 - 472 2021.03

Developing of flexible support table for fine feed by magnetic attraction controlled (3rd report)

Tamaru Yuuma, Kawata Kensuke, Shimizu Hiroki

Proceedings of JSPE Semestrial Meeting ( The Japan Society for Precision Engineering ) 2020S ( 0 ) 270 - 271 2020.03

High sensitivity MEMS displacement sensor device for planar shape measurement by deposition of piezoelectric materials Reviewed International journal

K. Murayama, Y. Tamaru, H. Shimizu

Proceedings of 8th International Conference of Asian Society for Precision Engineering and Nanotechnology ( Asian Society for Precision Engineering and Nanotechnology ) C13 2019.11

Error Evaluation of Straightness Measurement Using a MEMS Device Integrating 10 Cantilever Displacement Sensors Reviewed

Hiroki Shimizu, Shoichiro Mizukami, Makoto Manabe, Yuuma Tamaru

Proceedings of the 14th International Symposium on Measurement Technology and Intelligent Instruments D08 Paper ID:125 2019.09

磁気吸引力を利用した可撓支持微動テーブルの開発（第2報）

田丸雄摩, 河田謙介, 清水浩貴

精密工学会学術講演会講演論文集 ( 公益社団法人精密工学会 ) 2019A ( 0 ) 351 - 352 2019.08

Authorship：Last author Language：Japanese Publishing type：Research paper (other academic)

摺動摩擦を排除して高精度位置決めを達成するために永久磁石と電磁石を対にした磁気吸引力を利用する微動テーブルを提案している．前報では1軸の装置開発と性能について発表した．今回，1軸装置と同様に吸引力の較正や可撓機構の剛性見積を行って印加電流と変位の関係を予測し，新たに2軸駆動の装置を開発した．X，Y各軸の長ストロークと高分解能および2対の吸引力調整による両者連係での微動性能について報告する．

DOI： 10.11522/pscjspe.2019a.0_351

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Papers - SHIMIZU Hiroki