Faculty Profiles - SHIMIZU Hiroki

Papers - SHIMIZU Hiroki

Division display >> ／ All the affair displays1 - 45 of about 45

Confocal probe based on the second harmonic generation for measurement of linear and angular displacements Reviewed International journal

Sato R., Shimizu Y., Shimizu H., Matsukuma H., Gao W.

Optics Express 31 ( 7 ) 11982 - 11993 2023.03

Study of Second Harmonic Confocal Probe

Sato Ryo, Shimizu Yuki, Shimizu Hiroki, Matsukuma Hiraku, Gao Wei

Proceedings of JSPE Semestrial Meeting ( The Japan Society for Precision Engineering ) 2023S ( 0 ) 412 - 413 2023.03

Language：Japanese Publishing type：Research paper (other academic)

Unlike conventional autocollimators that use collimated light, a new angle measurement method that can measure angles in a local area using converged light based on a confocal probe employing the principle of second harmonic generation in nonlinear optical crystals is proposed. The feasibility of the proposed principle is discussed in this paper by conducting numerical simulation analysis based on the proposed principle, and then examining the angle measurement range and measurement resolution.

DOI： 10.11522/pscjspe.2023s.0_412

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多点同時計測可能なカンチレバー式変位計デバイス

加倉誠勝, 小濱大輝, 田丸雄摩, 清水浩貴

精密工学会学術講演会講演論文集 ( 公益社団法人精密工学会 ) 2023S ( 0 ) 436 - 437 2023.03

Authorship：Last author Language：Japanese Publishing type：Research paper (other academic)

一本のカンチレバーに２ないし３の探針と,探針数以上のひずみ検出部を設けることで多点変位の同時計測が可能なカンチレバー式変位計を提案する.この変位計は多点法形状計測に応用できる一方,変位とひずみの関係が複雑になる問題がある.そこで有限要素法によるひずみ解析の結果に機械学習の回帰の手法を適用してひずみと変位の変換モデルの作成を行い,変位の測定が行えることを確認した.

DOI： 10.11522/pscjspe.2023s.0_436

CiNii Research

3×3正方形配置センサユニットを用いた平面形状測定

時實拓紀, 野田樹生, 田丸雄摩, 清水浩貴

精密工学会学術講演会講演論文集 ( 公益社団法人精密工学会 ) 2023S ( 0 ) 382 - 383 2023.03

Authorship：Last author Language：Japanese Publishing type：Research paper (other academic)

9つの距離センサを縦横に3つずつ並べた正方形配置のセンサユニットを用い，これを工作機械上で走査することで取得したデータを接続して平面加工物の形状再現を行う手法について検討した．既に算出済みの形状値にステージの運動誤差を考慮して測定データを接続する際の重ね合わせ領域のデータ処理方法，及び測定データの接続経路を変更することによる形状再現精度を数値シミュレーションを用いて比較した結果を報告する．

DOI： 10.11522/pscjspe.2023s.0_382

CiNii Research

Investigation of Angle Measurement Based on Direct Third Harmonic Generation in Centrosymmetric Crystals Reviewed International journal

Li K., Lin J., Zhang Z., Sato R., Shimizu H., Matsukuma H., Gao W.

Applied Sciences (Switzerland) 13 ( 2 ) 2023.01

Reduction of Crosstalk Errors in a Surface Encoder Having a Long Z-Directional Measuring Range Reviewed International journal

Hong Y., Sato R., Shimizu Y., Matsukuma H., Shimizu H., Gao W.

Sensors 22 ( 23 ) 2022.12

A MEMS Device Integrating Multiple Cantilever Displacement Sensors to Evaluate Flat Machined Surfaces Reviewed International journal

Shimizu Hiroki, Tamiya Koichi, Mizukami Shoichiro, Tamaru Yuuma

International Journal of Automation Technology ( Fuji Technology Press Ltd. ) 16 ( 5 ) 582 - 587 2022.09

Authorship：Lead author,　Corresponding author Language：English Publishing type：Research paper (scientific journal)

Multi-point scanning measurement, which is effective in eliminating motion errors of the stage in on-machine profile measurement, requires multiple displacement sensors of equal pitch to measure displacements simultaneously. However, it is not easy to arrange small sensors with high alignment accuracy when applying the multi-point method at a narrow pitch. In addition, if many sensors can be arranged in parallel, improvement in measurement accuracy can be expected. Therefore, a new micro electro mechanical system (MEMS) device for straightness measurement, one that integrates 10 cantilever displacement sensors, has been proposed. This device can be expected to solve the problem involved in the multi-point method because of the characteristics of MEMS, as the semiconductor processing method can make mechanical structures with high accuracy and it can easily make the device with many identical structures. The device is designed to measure waviness less than 100 μm in height. Ten cantilevers of 11 mm length are fabricated in parallel with 1.8 mm pitch on a side of a base substrate 20 mm square. The strain induced by a displacement of the probe placed near the front edge of the cantilever is detected as a change in the resistance of the piezo resistor at the foot of the cantilever. In the fabrication process of this device, crystal anisotropic etching is performed for 12 hours to form probes 250 μm high. A new fabrication process is also proposed in which a protective process is added to prevent damage to the circuits already formed during the etching. A prototype is investigated, and it is found that the resistance value increases about 0.45% in proportion to the displacement of 100 μm. It is therefore confirmed that this device has the basic ability to detect displacement.

DOI： 10.20965/ijat.2022.p0582

Scopus

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Other Link： https://www.scopus.com/inward/record.uri?partnerID=HzOxMe3b&scp=85137591308&origin=inward

Design and Prototyping of Biaxial Flexible Support Table for Fine Positioning Through Controlled Magnetic Attraction Forces Reviewed International journal

Tamaru Yuuma, Kawata Kensuke, Shimizu Hiroki

International Journal of Automation Technology ( Fuji Technology Press Ltd. ) 16 ( 5 ) 588 - 597 2022.09

Authorship：Last author Language：English Publishing type：Research paper (scientific journal)

High-precision positioning can be obtained by reducing sliding friction and securing support rigidity. A prototype of a biaxial positioning table with non-contact drive by magnetic force and flexible mechanism support was developed to meet these requirements. The magnetic poles of a permanent magnet and an electromagnet were placed opposite to each other with an appropriate gap between them, and the attraction force between the two poles was used as the actuator for fine feed. The table was supported with a flexible mechanism composed of metal (A2017) beams with notches and elastic hinges assembled into a square frame shape. The permanent magnets were commercial neodymium magnets, and the electromagnets were self-made of S45C core bars. Two types of attraction force, maximum and minimum, were set depending on the number of neodymium magnets and the magnetic pole gap. The relationship between the applied current and attraction force for each type was calibrated using an electronic balance. Upon increasing and decreasing the applied current to the electromagnets, a linear relationship was shown between them. The relationship between the attraction force and the X- and Y-axes displacements was simulated by finite element analysis. Based on both results, the relationship between the applied current and displacement was estimated. The fine-feed experiment was conducted in both directions of the X- and Y-axes by applying current to electromagnets in a stepwise sequence. The displacements of total strokes in the long-stroke feed on applying the maximum attraction force were 340 μm and 315 μm for the X-axis and 160 μm and 133 μm for the Y-axis. These values are 2.0–2.8 times larger than the estimated displacement. Additionally, 3%–12% of the other axes interference occurred between the X- and Y-axes. In the high resolution feed applying the minimum attraction force, the displacement per step was 75 nm and 78 nm for the X-axis and 35 nm and 39 nm for the Y-axis. Cooperative feed with a combination of long stroke and high resolution was verified to be feasible.

DOI： 10.20965/ijat.2022.p0588

CiNii Research

Development of fine positioning table supported by squeezed air films based on levitation force control (6th report)

Tamaru Yuma, Ushijima Tomohiro, Shimizu Hiroki

Proceedings of JSPE Semestrial Meeting ( The Japan Society for Precision Engineering ) 2022A ( 0 ) 28 - 29 2022.08

Development of fine positioning table supported by squeezed air films based on levitation force control (5th report)

Tamaru Yuma, Ushijima Tomohiro, Shimizu Hiroki

Proceedings of JSPE Semestrial Meeting ( The Japan Society for Precision Engineering ) 2022S ( 0 ) 680 - 681 2022.03

Feasibility study of multi-point two-dimensional profile measurement by 3-2-1 and 3×3 sensor layout Reviewed International journal

Fujiwara R., Shimizu H.

Measurement: Sensors 18 2021.12

A MEMS device for straightness measurement integrating 10 cantilever displacement sensors Reviewed International journal

Shimizu H., Tamiya K., Mizukami S., Tamaru Y.

10th International Conference on Leading Edge Manufacturing Technologies in 21st Century, LEM 2021 409 - 411 2021.11

Consideration of Biaxial Flexible Support Table for Fine Positioning Through Controlled Magnetic Attraction Forces Reviewed International journal

Tamaru Y., Kawata K., Shimizu H.

10th International Conference on Leading Edge Manufacturing Technologies in 21st Century, LEM 2021 640 - 645 2021.11

Development of fine positioning table supported by squeezed air films based on levitation force control (4th report)

Tamaru Yuuma, Ushijima Tomohiro, Shimizu Hiroki

Proceedings of JSPE Semestrial Meeting ( The Japan Society for Precision Engineering ) 2021A ( 0 ) 154 - 155 2021.09

MEMS技術を応用した多点法走査形状測定用センサデバイスの開発（第9報）

田宮弘一, 田丸雄摩, 清水浩貴

精密工学会学術講演会講演論文集 ( 公益社団法人精密工学会 ) 2021S ( 0 ) 629 - 630 2021.03

Authorship：Last author Language：Japanese Publishing type：Research paper (other academic)

真直形状測定のための10点同時計測MEMSデバイスをシリコンバルクマイクロマシニング技術により製作した．前報より製作条件を変更することでプロセスの改善を図った．試作デバイスを評価するために各カンチレバー根元のピエゾ抵抗体を1辺とするブリッジ回路を組み，カンチレバー先端に変位を加えて出力電圧の変化を測定した．その結果，変位量に比例して出力電圧が減少し，デバイスが変位検出能を有していることを確認した．

DOI： 10.11522/pscjspe.2021s.0_629

CiNii Article

CiNii Research

Development of fine positioning table supported by squeezed air films based on levitation force control (3rd report)

Tamaru Yuuma, Tofuku Shutaro, Shimizu Hiroki

Proceedings of JSPE Semestrial Meeting ( The Japan Society for Precision Engineering ) 2021S ( 0 ) 471 - 472 2021.03

Developing of flexible support table for fine feed by magnetic attraction controlled (3rd report)

Tamaru Yuuma, Kawata Kensuke, Shimizu Hiroki

Proceedings of JSPE Semestrial Meeting ( The Japan Society for Precision Engineering ) 2020S ( 0 ) 270 - 271 2020.03

High sensitivity MEMS displacement sensor device for planar shape measurement by deposition of piezoelectric materials Reviewed International journal

K. Murayama, Y. Tamaru, H. Shimizu

Proceedings of 8th International Conference of Asian Society for Precision Engineering and Nanotechnology ( Asian Society for Precision Engineering and Nanotechnology ) C13 2019.11

Error Evaluation of Straightness Measurement Using a MEMS Device Integrating 10 Cantilever Displacement Sensors Reviewed

Hiroki Shimizu, Shoichiro Mizukami, Makoto Manabe, Yuuma Tamaru

Proceedings of the 14th International Symposium on Measurement Technology and Intelligent Instruments D08 Paper ID:125 2019.09

磁気吸引力を利用した可撓支持微動テーブルの開発（第2報）

田丸雄摩, 河田謙介, 清水浩貴

精密工学会学術講演会講演論文集 ( 公益社団法人精密工学会 ) 2019A ( 0 ) 351 - 352 2019.08

Authorship：Last author Language：Japanese Publishing type：Research paper (other academic)

摺動摩擦を排除して高精度位置決めを達成するために永久磁石と電磁石を対にした磁気吸引力を利用する微動テーブルを提案している．前報では1軸の装置開発と性能について発表した．今回，1軸装置と同様に吸引力の較正や可撓機構の剛性見積を行って印加電流と変位の関係を予測し，新たに2軸駆動の装置を開発した．X，Y各軸の長ストロークと高分解能および2対の吸引力調整による両者連係での微動性能について報告する．

DOI： 10.11522/pscjspe.2019a.0_351

CiNii Article

CiNii Research

Development of sensor device using MEMS technology for scanning profile measurement with multi-point method (8th Report)

Mizukami Shoichiro, Manabe Makoto, Tamaru Yuuma, Shimizu Hiroki

Proceedings of JSPE Semestrial Meeting ( The Japan Society for Precision Engineering ) 2019S ( 0 ) 473 - 474 2019.03

On machine straightness measurement combining sequential two-point method and differential autocollimation method

Miyata Tasuku, Tamaru Yuuma, Shimizu Hiroki

Proceedings of JSPE Semestrial Meeting ( The Japan Society for Precision Engineering ) 2019S ( 0 ) 475 - 476 2019.03

Developing of flexible support table for fine positioning by magnetic attraction controlled

Tamaru Yuuma, Takuno Genki, Shimizu Hiroki

Proceedings of JSPE Semestrial Meeting ( The Japan Society for Precision Engineering ) 2019S ( 0 ) 728 - 729 2019.03

Improvement of zero adjustment error compensation in square layout four-point method by introducing angle sensor

SASAHARA Ryutaro, SHIMIZU Hiroki, TAMARU Yuuma

The Proceedings of Conference of Kyushu Branch ( The Japan Society of Mechanical Engineers ) 2019.72 ( 0 ) A43 2019.01

Language：Japanese Publishing type：Research paper (other academic)

Square layout four-point method with angle correction has been proposed as an on-machine profile measurement method of machined flat surfaces. In this method, it is possible to measure the planar shape without the influence of translational error, pitching, and rolling of a stage. However, a zero-adjustment error, which is a deviation of the origin height of the four displacement sensors, causes a large form error of twist shape when the planar shape is reconstructed. To solve this problem, a back calculation method of the zero-adjustment error was proposed: which calculate zero-adjustment error from the difference in the error cumulative amount of two different calculation paths for a square measurement region, the raster scanning path and the diagonal path. To improve the calculation accuracy of zero-adjustment error, the authors have proposed to apply two-point method with angle correction to the diagonal direction by measuring the posture change of the stage unit with the angle sensor newly added in the diagonal direction. Monte Carlo simulations of the square layout four-point method and back calculation of zero-adjustment error were carried out. As a result, it was confirmed that the proposed method is effective to improve correction accuracy of the zero-adjustment error.

DOI： 10.1299/jsmekyushu.2019.72.a43

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CiNii Research

Other Link： https://www.jstage.jst.go.jp/article/jsmekyushu/2019.72/0/2019.72_A43/_pdf

Accuracy improvement of 5 point MEMS displacement sensor device for planar form measurement by using SOI wafer

SUGITA Kenya, MATSUMOTO Tetsuya, TAMARU Yuma, SHIMIZU Hiroki

The Proceedings of Conference of Kyushu Branch ( The Japan Society of Mechanical Engineers ) 2019.72 ( 0 ) A44 2019.01

Authorship：Last author Language：Japanese Publishing type：Research paper (other academic)

In the 5-point method, the straight profile measurement of one line is performed using the sequential three point method, and the relation between the lines is simultaneously measured by two sensors arranged on the next scan line. Using this relation, straightness measurement results of each line, which is acquired by the three-point method, are connected to obtain a planar shape. In order to realize the on-machine measurement by this principle, the authors have prototyped a 5-point MEMS displacement sensor device for measuring a planar shape with five cantilever displacement sensors in a 20 mm square silicon wafer. Each displacement sensor has a probe of a quadrilateral frustum with a height of 250 μm at the tip of the cantilever and detects the strain generated at the root portion as a resistance value change of the piezo resistor according to the displacement. With bulk silicon wafers, when fabricating a probe by etching, they were difficult to control the thickness of the cantilever after etching and the height of the probe according to the target values. Therefore, the authors adopted the Silicon-on-insulator (SOI) wafer to improve dimensional accuracy by using etching stopped at the SiO2 layer. With the fabrication process adopting the SOI wafer, variations in height of the probe are reduced compared with conventional fabrication process using bulk silicon wafer and the size of the tip of the probe can be controlled independently. Therefore, efficiency of fabrication process using the SOI wafer is confirmed.

DOI： 10.1299/jsmekyushu.2019.72.a44

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CiNii Research

Other Link： https://www.jstage.jst.go.jp/article/jsmekyushu/2019.72/0/2019.72_A44/_pdf

Square layout four-point method for two-dimensional profile measurement and self-calibration method of zero-adjustment error Reviewed International journal

12 ( 5 ) 707 - 713 2018.09

Development of fine positioning table supported by squeezed air films based on levitation force control (2nd report)

Tamaru Yuuma, Magarifuchi Hironori, Matsumoto Tetsuya, Shimizu Hiroki

Proceedings of JSPE Semestrial Meeting ( The Japan Society for Precision Engineering ) 2018A ( 0 ) 494 - 495 2018.08

A novel compensation method of zero-adjustment error in flatness measurement using serial four-point method Reviewed International journal

SHIMIZU Hiroki, YAMASHITA Ryousuke, HASHIGUCHI Takuya, MIYATA Tasuku

Proceedings of International Conference on Leading Edge Manufacturing in 21st century : LEM21 ( The Japan Society of Mechanical Engineers ) 2017.9 ( 0 ) 163 2017.11

Authorship：Lead author,　Corresponding author Language：English Publishing type：Research paper (international conference proceedings)

The authors proposed a novel on-machine measurement method for evaluating three-dimensional profiles of machined flat surface: square layout four point (SLFP) method with angle compensation. The SLFP method enables to connect the results of straightness measurements of each scanning line by using additional two sensors and an angle sensor. Numerical simulation showed that the accumulation of zero adjustment error of displacement sensors makes unignorable distortion on the measurement results. Hence, a new calibration method for zero adjustment error was proposed and the validity of the method was confirmed by an experiment.

DOI： 10.1299/jsmelem.2017.9.163

Scopus

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Other Link： https://www.scopus.com/inward/record.uri?partnerID=HzOxMe3b&scp=85041341905&origin=inward

Linear slider supported by squeezed air films with self-propulsion mechanism based on floating height difference Reviewed

TAMARU Yuuma, SHIMIZU Hiroki

Transactions of the JSME (in Japanese) 83 ( 854 ) 17 - 00278-17-00278 2017.10

角度補正付き逐次多点法を用いた走査型平面形状測定（第4報）

橋口拓也, 清水浩貴, 田丸雄摩

精密工学会学術講演会講演論文集 ( 公益社団法人精密工学会 ) 2017S ( 0 ) 297 - 298 2017.01

Language：Japanese Publishing type：Research paper (other academic)

本研究は，広範囲の平面形状測定法として逐次多点法に基づく走査型測定法を提案するものである．本報では，4本の変位センサを正方配置し，2軸の角度補正を併用する測定法について検討した．まず，センサのノイズレベルと測定結果の不確かさの関係をモンテカルロシミュレーションにより確認した．次に単一のセンサに感度差を与え，それに起因する誤差が累積することで測定結果に与える影響を確認した．

DOI： 10.11522/pscjspe.2017s.0_297

CiNii Article

CiNii Research

Development of fine motion table supported by squeezed air films based on levitation force control

Tamaru Yuuma, Matsumoto Tetsuya, Shimizu Hiroki

Proceedings of JSPE Semestrial Meeting ( The Japan Society for Precision Engineering ) 2017A ( 0 ) 727 - 728 2017.01

MEMS技術を応用した多点法走査形状測定用センサデバイスの開発（第7報）

本永聡一朗, 是永遼介, 清水浩貴, 田丸雄摩

精密工学会学術講演会講演論文集 ( 公益社団法人精密工学会 ) 2017S ( 0 ) 291 - 292 2017.01

Language：Japanese Publishing type：Research paper (other academic)

本研究は，等間隔に並べたカンチレバー式高分解能変位センサ3つと，次走査線上に配置したセンサ2つを一体化した多点法平面測定用MEMSデバイスを開発するものである．本デバイスは感度向上のため，応力検出部が存在するカンチレバー根元部に応力集中が効率的に生じるよう，矩形梁の採用と穴形状の付加を行った．本報では改良の定量評価のため行ったFEM解析の結果と，それを元に作製したデバイスについて報告する．

DOI： 10.11522/pscjspe.2017s.0_291

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Redesign of cantilever displacement sensor to improve sensitivity and channel separation Reviewed

2015.10

Property Evaluation of Eccentric Astigmatic Method to Apply Micro Tactile Probe Reviewed

9 ( 5 ) 551 - 557 2015.09

Design of a MEMS device for scanning profile measurement with three cantilever displacement sensors Reviewed

1 - 5 Paper ID 1196 2015.09

Displacment Detection of Small Sphere using Eccentric Astigmatic Method Reviewed

1 - 4 index: B18 2014.09

Correction of positioning and angular errors for ball screw feed unit Reviewed

Yuuma TAMARU, Hiroki SHIMIZU, Hiroshi KAMODA

Transactions of the JSME 80 ( 816 ) 1 - 11 DR0240 2014.08

Development of a Compact Deformable Mirror using Push-Pull Actuators Reviewed

613 200 - 203 2014.05

16・8 加工計測(16.加工学・加工機器,<特集>機械工学年鑑)

清水浩貴

日本機械学会誌 ( 一般社団法人日本機械学会 ) 116 ( 1137 ) 571 - 572 2013.01

長ストロークと高精度位置決めを両立する連係微動 Reviewed

田丸雄摩，高藤和樹，清水浩貴

日本機械学会論文集（Ｃ編） 74 ( 745 ) 2294 - 2299 2008.09

Theoretical Study on Self-calibration for the Wide-rangeLaser Auto-collimation Method Reviewed

H.Shimizu,O.Hayashi

Key Engineering Materials 381-382 271 - 274 2008.06

高感度2軸マイクロ角度センサの開発 Reviewed

高偉,齋藤悠佑,佐藤隼人,清野慧,清水浩貴,広瀬純

精密工学会誌 72 ( 9 ) 1174 - 1178 2006.09

Three-Dimensional Slit Width Measurement for Long Precision Slot Dies Reviewed

M. Furukawa,W. Gao,H. Shimizu,S. Kiyono,M. Yasutake,K. Takahashi

Key Engineering Materials 295-296 343 - 348 2005.10

A Biological Sensor for Detecting Foreign Bodies Using a Balloon Probe Reviewed

H. Shimizu,S. Kiyono,W. Gao,H. Shoji

Key Engineering Materials 295-296 133 - 138 2005.10

An electrical pen for signature verification using a two-dimensional optical angle sensor Reviewed

Hiroki Shimizu,Satoshi Kiyono,Takenori Motoki,Wei Gao

Sensors and Actuators, A 111 216 - 221 2004.04

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Papers - SHIMIZU Hiroki