研究者詳細 - 清水　浩貴

論文 - 清水　浩貴

分割表示45 件中 21 - 40 件目／全件表示 >>

MEMS技術を応用した多点法走査形状測定用センサデバイスの開発（第8報）

水上翔一朗, 真鍋真, 田丸雄摩, 清水浩貴

精密工学会学術講演会講演論文集 ( 公益社団法人精密工学会 ) 2019S ( 0 ) 473 - 474 2019年03月

担当区分：最終著者記述言語：日本語掲載種別：研究論文（その他学術会議資料等）

機械加工平面の真直形状計測を目的とした走査型変位センサデバイスの設計を行った。MEMS製造技術を用いることで10本のカンチレバー型変位計が一体となったセンサデバイスとなっている。高精度な真直形状計測を行うために10か所の変位をセンサで同時に測定し、短いピッチ間隔での横分解能の高い測定データと、長いピッチ間隔での測定データを組み合わせ計算処理することで、誤差累積の影響の低減を図った。

DOI： 10.11522/pscjspe.2019s.0_473

CiNii Article

CiNii Research

磁気吸引力を利用した可撓支持微動テーブルの開発

田丸雄摩, 宅野元気, 清水浩貴

精密工学会学術講演会講演論文集 ( 公益社団法人精密工学会 ) 2019S ( 0 ) 728 - 729 2019年03月

担当区分：最終著者記述言語：日本語掲載種別：研究論文（その他学術会議資料等）

高精度位置決めを目的として摺動摩擦を排除した微動テーブルを提案している．本研究では永久磁石と電磁石を対向させて相互の吸引力を駆動源とする可撓支持微動テーブルを構想した．今回は1軸の装置を設計し，吸引力の校正や可撓機構の剛性見積を行い，印加電流と変位の関係を推定した．そして推定に基づいて装置を製作し，長ストロークと高分解能および，両者を連係させた場合の微動性能を評価した．

DOI： 10.11522/pscjspe.2019s.0_728

CiNii Article

CiNii Research

逐次二点法と差動オートコリメーション法を併用した真直度機上測定

宮田佑, 田丸雄摩, 清水浩貴

精密工学会学術講演会講演論文集 ( 公益社団法人精密工学会 ) 2019S ( 0 ) 475 - 476 2019年03月

担当区分：最終著者記述言語：日本語掲載種別：研究論文（その他学術会議資料等）

本報では，金型など比較的広範囲で鏡面に近い平面を対象とした，角度補正付逐次二点法を用いる真直度測定をオンマシンで行う手法を提案する．この実証のため，二点法用の２本の変位センサと２つのオートコリメーション式角度センサを組み合わせた測定ユニットを開発し，計測を行った．２つの角度センサにより走査中の姿勢変化をユニット単体で測定でき，外部モニタリングが不要となるので，オンマシン測定が容易となる．

DOI： 10.11522/pscjspe.2019s.0_475

CiNii Article

CiNii Research

SOIウエハによる平面測定用5点法MEMS変位計デバイスの高精度化

杉田賢哉, 松本哲也, 田丸雄摩, 清水浩貴

日本機械学会九州支部講演論文集 ( 一般社団法人日本機械学会 ) 2019.72 ( 0 ) A44 2019年01月

担当区分：最終著者記述言語：日本語掲載種別：研究論文（その他学術会議資料等）

In the 5-point method, the straight profile measurement of one line is performed using the sequential three point method, and the relation between the lines is simultaneously measured by two sensors arranged on the next scan line. Using this relation, straightness measurement results of each line, which is acquired by the three-point method, are connected to obtain a planar shape. In order to realize the on-machine measurement by this principle, the authors have prototyped a 5-point MEMS displacement sensor device for measuring a planar shape with five cantilever displacement sensors in a 20 mm square silicon wafer. Each displacement sensor has a probe of a quadrilateral frustum with a height of 250 μm at the tip of the cantilever and detects the strain generated at the root portion as a resistance value change of the piezo resistor according to the displacement. With bulk silicon wafers, when fabricating a probe by etching, they were difficult to control the thickness of the cantilever after etching and the height of the probe according to the target values. Therefore, the authors adopted the Silicon-on-insulator (SOI) wafer to improve dimensional accuracy by using etching stopped at the SiO2 layer. With the fabrication process adopting the SOI wafer, variations in height of the probe are reduced compared with conventional fabrication process using bulk silicon wafer and the size of the tip of the probe can be controlled independently. Therefore, efficiency of fabrication process using the SOI wafer is confirmed.

DOI： 10.1299/jsmekyushu.2019.72.a44

CiNii Article

CiNii Research

その他リンク： https://www.jstage.jst.go.jp/article/jsmekyushu/2019.72/0/2019.72_A44/_pdf

正方配置逐次4点法のゼロ点誤差補正法への角度センサ導入による精度改善

笹原隆太郎, 清水浩貴, 田丸雄摩

日本機械学会九州支部講演論文集 ( 一般社団法人日本機械学会 ) 2019.72 ( 0 ) A43 2019年01月

記述言語：日本語掲載種別：研究論文（その他学術会議資料等）

Square layout four-point method with angle correction has been proposed as an on-machine profile measurement method of machined flat surfaces. In this method, it is possible to measure the planar shape without the influence of translational error, pitching, and rolling of a stage. However, a zero-adjustment error, which is a deviation of the origin height of the four displacement sensors, causes a large form error of twist shape when the planar shape is reconstructed. To solve this problem, a back calculation method of the zero-adjustment error was proposed: which calculate zero-adjustment error from the difference in the error cumulative amount of two different calculation paths for a square measurement region, the raster scanning path and the diagonal path. To improve the calculation accuracy of zero-adjustment error, the authors have proposed to apply two-point method with angle correction to the diagonal direction by measuring the posture change of the stage unit with the angle sensor newly added in the diagonal direction. Monte Carlo simulations of the square layout four-point method and back calculation of zero-adjustment error were carried out. As a result, it was confirmed that the proposed method is effective to improve correction accuracy of the zero-adjustment error.

DOI： 10.1299/jsmekyushu.2019.72.a43

CiNii Article

CiNii Research

その他リンク： https://www.jstage.jst.go.jp/article/jsmekyushu/2019.72/0/2019.72_A43/_pdf

Square layout four-point method for two-dimensional profile measurement and self-calibration method of zero-adjustment error 査読有り国際誌

Shimizu H., Yamashita R., Hashiguchi T., Miyata T., Tamaru Y.

International Journal of Automation Technology 12 ( 5 ) 707 - 713 2018年09月

担当区分：筆頭著者,　責任著者記述言語：英語掲載種別：研究論文（学術雑誌）

© 2018, Fuji Technology Press. All rights reserved. An on-machine measurement method, called the square-layout four-point (SLFP) method with angle compensation, for evaluating two-dimensional (2-D) profiles of flat machined surfaces is proposed. In this method, four displacement sensors are arranged in a square and mounted to the scanning table of a 2-D stage. For measuring the 2-D profile of a target plane, height data corresponding to all measuring points are acquired by means of the raster scanning motion. At the same time, pitching data of the first primary scan line and rolling data of the first subsidiary scan line are monitored by means of two auto-collimators to compensate for major profile errors that arise out of the posture error. Use of the SLFP method facilitates connection of the results of straightness-measurements results obtained for each scanning line by using two additional sensors and rolling data of the first subsidiary scan line. Specifically, the height of a measuring point is calculated by means of a recurrence equation using three predetermined height data for adjacent points in conjunction with data acquired by the four displacement sensors. Results of the numerical simulation performed in this study demonstrate higher efficiency of the SLFP method with angle compensation. During actual measurement, however, it is difficult to perfectly align inline the origin height of each displacement sensor. With regard to the SLFP method, zero-adjustment error is defined as the relative height of a sensor’s origin with respect to the plane comprising origins of the other three sensors. This error accumulates in proportion to number of times the recurrence equation is applied. Simulation results containing the zero-adjustment error demonstrate that accumulation of the said error results in unignorable distortion of measurement results. Therefore, a new self-calibration method for the zero-adjustment error has been proposed. During 2-D profile measurement, two different calculation paths – the raster scan path and orthogonal path – can be used to determine the height of a measurement point. Although heights determined through use of the two paths must ideally be equal, they are observed to be different because accumulated zero-adjustment errors for the two paths are different. In view of this result, the zero-adjustment error can be calculated backwards and calibrated. Validity of the calibration method has been confirmed via simulations and experiments.

DOI： 10.20965/ijat.2018.p0707

Scopus

CiNii Article

その他リンク： https://www.scopus.com/inward/record.uri?partnerID=HzOxMe3b&scp=85055258719&origin=inward

浮上力制御を利用したスクイーズ効果支持微動テーブルの開発（第2報）

田丸雄摩, 曲淵公紀, 松本哲也, 清水浩貴

精密工学会学術講演会講演論文集 ( 公益社団法人精密工学会 ) 2018A ( 0 ) 494 - 495 2018年08月

担当区分：最終著者記述言語：日本語掲載種別：研究論文（その他学術会議資料等）

摺動摩擦を排除したスクイーズ効果支持微動テーブルを提案している．ところでスクイーズ効果では加振に励起してテーブルが振動し，微動に揺動が伴うことを確認している．この原因としてテーブル両側を同位相で支持する浮上静圧力に脈動が生じるが，脈動の振幅が不一致であるためと考える．そこで180°位相差で加振させ，テーブル中央部が振動の節となることを利用した制振を試みた．あわせてテーブル微動についても評価した．

DOI： 10.11522/pscjspe.2018a.0_494

CiNii Article

CiNii Research

A novel compensation method of zero-adjustment error in flatness measurement using serial four-point method 査読有り国際誌

Shimizu H., Yamashita R., Hashiguchi T., Miyata T.

Proceedings of the 9th International Conference on Leading Edge Manufacturing in 21st Century, LEM 2017 ( 一般社団法人日本機械学会 ) 2017.9 ( 0 ) 163 2017年11月

担当区分：筆頭著者,　責任著者記述言語：英語掲載種別：研究論文（国際会議プロシーディングス）

The authors proposed a novel on-machine measurement method for evaluating three-dimensional profiles of machined flat surface: square layout four point (SLFP) method with angle compensation. The SLFP method enables to connect the results of straightness measurements of each scanning line by using additional two sensors and an angle sensor. Numerical simulation showed that the accumulation of zero adjustment error of displacement sensors makes unignorable distortion on the measurement results. Hence, a new calibration method for zero adjustment error was proposed and the validity of the method was confirmed by an experiment.

DOI： 10.1299/jsmelem.2017.9.163

Scopus

CiNii Article

CiNii Research

その他リンク： https://www.scopus.com/inward/record.uri?partnerID=HzOxMe3b&scp=85041341905&origin=inward

浮上量差による推進機構を付加したスクイーズ効果支持リニアスライダ査読有り

田丸雄摩, 清水浩貴

日本機械学会論文集 83 ( 854 ) 17 - 00278-17-00278 2017年10月

記述言語：日本語掲載種別：研究論文（学術雑誌）

Non-contact supports involving air or magnetic forces are used as guide supports for linear motion mechanisms. In the present study, non-contact supports are generated using the effect of the static pressure force produced by a squeezed air film. The linear slider is supported at just two of its ends. Applying a different excitation amplitude to the two transducers leads to a difference in the floating height at either end of the slider due to the different air-film thicknesses. This causes the slider to tilt, which produces a propulsion force due to the dead load. An experimental apparatus with a flat plate slider was developed and its floating characteristics were examined. In addition, the propulsion force was measured for sliders with different weights. The results indicated that the floating height was 2 to 3 times the excitation amplitude. The slider was capable of travelling all over the movement stroke. The traveling force increased with increasing slider weight, and was about 0.15-0.35 mN. The measurement results were in good agreement with theoretical calculations. Thus, the present study showed that the slider could be successfully supported in a non-contact state and was capable of movement under the influence of a propulsion force generated only by the dead load.

DOI： 10.1299/transjsme.17-00278

CiNii Article

その他リンク： https://ci.nii.ac.jp/naid/130006181353

MEMS技術を応用した多点法走査形状測定用センサデバイスの開発（第7報）

本永聡一朗, 是永遼介, 清水浩貴, 田丸雄摩

精密工学会学術講演会講演論文集 ( 公益社団法人精密工学会 ) 2017S ( 0 ) 291 - 292 2017年01月

記述言語：日本語掲載種別：研究論文（その他学術会議資料等）

本研究は，等間隔に並べたカンチレバー式高分解能変位センサ3つと，次走査線上に配置したセンサ2つを一体化した多点法平面測定用MEMSデバイスを開発するものである．本デバイスは感度向上のため，応力検出部が存在するカンチレバー根元部に応力集中が効率的に生じるよう，矩形梁の採用と穴形状の付加を行った．本報では改良の定量評価のため行ったFEM解析の結果と，それを元に作製したデバイスについて報告する．

DOI： 10.11522/pscjspe.2017s.0_291

CiNii Article

CiNii Research

角度補正付き逐次多点法を用いた走査型平面形状測定（第4報）

橋口拓也, 清水浩貴, 田丸雄摩

精密工学会学術講演会講演論文集 ( 公益社団法人精密工学会 ) 2017S ( 0 ) 297 - 298 2017年01月

記述言語：日本語掲載種別：研究論文（その他学術会議資料等）

本研究は，広範囲の平面形状測定法として逐次多点法に基づく走査型測定法を提案するものである．本報では，4本の変位センサを正方配置し，2軸の角度補正を併用する測定法について検討した．まず，センサのノイズレベルと測定結果の不確かさの関係をモンテカルロシミュレーションにより確認した．次に単一のセンサに感度差を与え，それに起因する誤差が累積することで測定結果に与える影響を確認した．

DOI： 10.11522/pscjspe.2017s.0_297

CiNii Article

CiNii Research

浮上力制御を利用したスクイーズ効果支持微動テーブルの開発

田丸雄摩, 松本哲也, 清水浩貴

精密工学会学術講演会講演論文集 ( 公益社団法人精密工学会 ) 2017A ( 0 ) 727 - 728 2017年01月

担当区分：最終著者記述言語：日本語掲載種別：研究論文（その他学術会議資料等）

微動性能向上の鍵は摺動部の摩擦低減にある．本研究ではスクイーズ効果で浮上支持させ，浮上力制御と自重バランスで駆動可能な微動テーブルを開発した．加振振幅を与えることで浮上力が得られ，振幅調整によって微動が生じる．試験の結果，テーブルが非接触で支持されていることを確認した．また，振幅をステップ状に変化させたところ変化に応じてテーブルが微動し，全ストローク変位と最小変位を観察できた．

DOI： 10.11522/pscjspe.2017a.0_727

CiNii Article

CiNii Research

Redesign of cantilever displacement sensor to improve sensitivity and channel separation 査読有り

Shimizu H., Komatsu S., Tamaru Y.

Proceedings of the 8th International Conference on Leading Edge Manufacturing in 21st Century, LEM 2015 2015年10月

記述言語：英語掲載種別：研究論文（国際会議プロシーディングス）

A new structural design of a micro electro mechanical system (MEMS) device for straightness measurement with the three point method has been studied. This device integrates three cantilever displacement sensors with a 5mm pitch on a silicon chip. To improve sensitivity and channel separation, some structural designs to make stress concentration part and to reduce interference between each displacement sensor were investigated using a finite element method code. Based on the calculation results, an integrated model was designed; in this model, each cantilever has a cutting off part and a groove near the base and notches were added to the support base. It was confirmed that integrated model has the feasibility to improve both sensitivity and channel separation.

Scopus

その他リンク： https://www.scopus.com/inward/record.uri?partnerID=HzOxMe3b&scp=84974604593&origin=inward

Property Evaluation of Eccentric Astigmatic Method to Apply Micro Tactile Probe 査読有り

Hiroki Shimizu, Atsuo Ogawa, Yoshinori Sasaki, Yuuma Tamaru

International Journal of Automation Technology 9 ( 5 ) 551 - 557 2015年09月

Design of a MEMS device for scanning profile measurement with three cantilever displacement sensors 査読有り

Hiroki Shimizu, Takahiro Akiyoshi, Shinya Yanagihara, Yuuma Tamaru, Akiyoshi Baba

Proceedings of 12th International Symposium on Measurement Technology and Intelligent Instruments 1 - 5 Paper ID 1196 2015年09月

Displacment Detection of Small Sphere using Eccentric Astigmatic Method 査読有り

Hiroki Shimizu, Atsuo Ogawa, Yoshinori Sasaki, Yuuma Tamaru

Proceedings of 11th IMEKO Symposium LMPMI2014 (Laser Metrology for Precision Measurement and Inspection in Industry) 1 - 4 index: B18 2014年09月

ボールねじ式送りテーブルの位置・角度補正査読有り

田丸雄摩, 清水浩貴, 加茂田浩史

日本機械学会論文集 80 ( 816 ) 1 - 11 DR0240 2014年08月

Development of a Compact Deformable Mirror using Push-Pull Actuators 査読有り

Hiroki Shimizu, Keitaro Tanaka, Yuuma Tamaru

Key Engineering Materials 613 200 - 203 2014年05月

16・8 加工計測(16.加工学・加工機器,<特集>機械工学年鑑)

清水浩貴

日本機械学会誌 ( 一般社団法人日本機械学会 ) 116 ( 1137 ) 571 - 572 2013年01月

長ストロークと高精度位置決めを両立する連係微動査読有り

田丸雄摩，高藤和樹，清水浩貴

日本機械学会論文集（Ｃ編） 74 ( 745 ) 2294 - 2299 2008年09月

　前のページ - 次のページ　

<清水 浩貴>

論文 - 清水 浩貴

<清水　浩貴>

論文 - 清水　浩貴