Affiliation
Faculty of Computer Science and Systems Engineering Department of Physics and Information Technology
Job
Associate Professor
External link
SHINKAI Satoko
Scopus Paper Info
Total Paper Count: 40 Total Citation Count: 357 h-index: 10
Research Interests
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Ga2O3
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process
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dry etching
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wet etching
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Semiconductor
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GaN
Research Areas
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Manufacturing Technology (Mechanical Engineering, Electrical and Electronic Engineering, Chemical Engineering) / Electric/electronic material engineering
Biography in Kyutech
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2021.04
Kyushu Institute of Technology Faculty of Computer Science and Systems Engineering Department of Physics and Information Technology Associate Professor
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2010.04-2021.03
Kyushu Institute of Technology Organization for Promotion of Research and Open Innovation Center for Microelectronic Systems Associate Professor
Papers
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Development of Through Semiconductor via Manufacturing Process for Heterogeneous Integration of GaN Power Device on Si-LSI Reviewed
Mishima H., Zheng K., Matsumoto S., Shinkai S.
13th IEEE CPMT Symposium Japan Innovation of Packaging Technology for Advanced Heterogeneous Integration Icsj 2024 152 - 153 2024.01
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Development of a heterogeneous integration of GaN power device on Si-LSI Reviewed
Miyasaka S., Norihide Y., Furue A., Shinkai S., Matsumoto S.
Proceedings Electronic Components and Technology Conference 2023-May 1698 - 1702 2023.01
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