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論文 - 馬場　昭好

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Novel 600 v low reverse recovery loss vertical PiN diode with hole pockets by Bosch deep trench 査読有り

Tsukuda M., Baba A., Shiba Y., Omura I.

Proceedings of the International Symposium on Power Semiconductor Devices and ICs 2016-July 295 - 298 2016年07月

記述言語：英語掲載種別：研究論文（国際会議プロシーディングス）

© 2016 IEEE.The performance of a novel diode with characteristic trench shape is predicted by TCAD simulation. A novel 600 V vertical PiN diode with hole pockets by the Bosch deep trench process is proposed for a better trade-off curve between reverse recovery loss and forward voltage. The reverse recovery loss is reduced to a half. In addition, the active chip size of the novel diode is reduced to two-thirds that of the conventional PiN diode in the same forward voltage. The novel diode structure is a strong candidate when the simple fabrication process under development is established.

DOI： 10.1109/ISPSD.2016.7520836

Scopus

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The Influence of Plasma Conditions on Surface-Activation that Affect the Bonded Area 査読有り

Sethavut Duangchan, Ryouya Shirahama, Tomoki Murayama, Souchi Hamada, Akiyoshi Baba

Asia-Pacific Conference of Transducers and Micro-Nano Technology 2016 283 - 284 2016年06月

Novel 600 V Low Reverse Recovery Loss Vertical PiN Diode with Hole Pockets by Bosch Deep Trench 査読有り

Masanori Tsukuda, Akiyoshi Baba, Yuji Shiba, Ichiro Omura

Proceedings of the 2016 28th International Symposium on Power Semiconductor Devices and ICs (ISPSD) 295 - 298 2016年06月

The heat performance study of nanocrystal diamond film used in a thin film device 査読有り

Sethavut Duangchan,Yusuke Koishikawa,Ryouya Shirahama,Koichiro Oishi,Akiyoshi Baba,Satoshi Matsumoto,Masataka Hasegawa

International Conference on Solid State Devices and Materials (SSDM2015) 2015年09月

Design of a MEMS device for scanning profile measurement with three cantilever displacement sensors 査読有り

Hiroki Shimizu, Takahiro Akiyoshi, Shinya Yanagihara, Yuuma Tamaru, Akiyoshi Baba

Proceedings of 12th International Symposium on Measurement Technology and Intelligent Instruments 2015年09月

Influential factors in low-temperature direct bonding of silicon dioxide 査読有り

Ryouya Shirahama,Sethavut Duangchan,Yusuke Koishikawa,Akiyoshi Baba

IEEE International 3D System Integration Conference (3DIC 2015) 2015年08月

The silicon on diamond structure by low-temperature bonding technique 査読有り

Sethavut Duangchan,Yusuke Uchikawa,Yusuke Koishikawa,Baba Akiyoshi,Kentaro Nakagawa,Satoshi Matsumoto,Masataka Hasegawa,Shinichi Nishizawa

The 65th Electronic Components and Technology Conference (ECTC 2015) 2015年05月

Finite element analysis using a hierarchal decomposition for the interaction of structure, fluid and electrostatic field in mems 査読有り

Ishihara D., Horie T., Niho T., Baba A.

COUPLED PROBLEMS 2015 - Proceedings of the 6th International Conference on Coupled Problems in Science and Engineering 1023 - 1028 2015年01月

記述言語：英語掲載種別：研究論文（国際会議プロシーディングス）

In this study, a hierarchal decomposition for the interaction of the structure, fluid and electrostatic field or the structure-fluid-electrostatic interaction, which is one of typical phenomena in micro-electro-mechanical system (MEMS), is proposed in order to solve it efficiently. The proposed decomposition partitions the structure-fluid-electrostatic interaction into the fluid-structure interaction (FSI) and the electrostatic field, and, moreover, splits the FSI into the velocity and fluid pressure fields. In this way, the whole interaction system is decomposed into the three fields in a hierarchal way. The proposed decomposition is implemented using a finite element method and is applied to a micro cantilever beam actuated by the electrostatic force in air. It follows from the comparison among the results for the structure-fluid-electrostatic interaction, the FSI and the experiment that the proposed method taking into account the full-interaction can predict the vibration characteristic of the MEMS accurately.

Scopus

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Hierarchal decomposition for the structure-fluid-electrostatic interaction in a microelectromechanical system 査読有り

Ishihara D., Horie T., Niho T., Baba A.

CMES - Computer Modeling in Engineering and Sciences 108 ( 6 ) 429 - 452 2015年01月

記述言語：英語掲載種別：研究論文（学術雑誌）

Copyright © 2015 Tech Science Press.In this study, a hierarchal decomposition is proposed to solve the structure- fluid-electrostatic interaction in a microelectromechanical system (MEMS). In the proposed decomposition, the structure-fluid-electrostatic interaction is partitioned into the structure-fluid interaction and the electrostatic field using the iteratively staggered method, and the structure-fluid interaction is split into the structurefluid velocity field and the fluid pressure field using the projection method. The proposed decomposition is applied to a micro cantilever beam actuated by the electrostatic force in air. It follows from the comparisons among the numerical and experimental results that the proposed method can predict the MEMS vibration characteristics accurately.

Scopus

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The effect of surface roughness in SiO2/SiO2 low-temperature bonding 査読有り

Sethavut Duangchan, Shota Osaki, Yusuke Uchikawa, Shuhei Kawai, Yusuke Koishikawa, Akiyoshi Baba

The 2nd Universiti Putra Malaysia - Kyushu Institute of Tecnology International Symposium on Applied Engineering and Sciences (SAES 2014) B-1-3 2014年12月

MEMS 構造要素における構造‐流体‐静電界連成の階層的分解による有限要素解析査読有り

石原大輔, 堀江知義, 二保知也, 馬場昭好

日本機械学会論文集（A編） 79 ( 804 ) 1291 - 1302 2013年08月

Side-Illuminated Color photo Sensor 査読有り

Tetsuya Ariyoshi, Akiyoshi Baba, Yutaka

Japanese Journal of Applied Phyasics ( 52 ) 04CE10 2013年03月

2513 MEMS構造要素における構造 : 流体-静電界連成現象の有限要素解析

宿輪雄介, 石原大輔, 堀江知義, 二保知也, 馬場昭好

計算力学講演会講演論文集 ( 一般社団法人日本機械学会 ) 2013 ( 0 ) _2513 - 1_-_2513-2_ 2013年01月

High Efficiency Near-Infrared Detection using Deep-Trench Photo-Diode 招待有り査読有り

Tetsuya Matsuda, Akiyoshi Baba

25th International Microprocesses and Nanotechnology Conference 1-p-7-101 2012年10月

Fabrication of a polylactide micro-needle array using transfer mold technique for transdermal drug delivery 招待有り査読有り

Akiyoshi Baba

25th International Microprocesses and Nanotechnology Conference 1-P-7-94 2012年10月

Side-Illuminated Color photo Sensor 査読有り

Tetsuya Ariyoshi, Akiyoshi Baba, Yutaka Arima

International Conference on Solid State Devices and Materials 144 - 145 2012年09月

Finite element analysis for interaction problems of structure, fluid and electrostatic field in micro cantilever beams 招待有り査読有り

Daisuke Ishihara, Tomoyoshi Horie, Tomoya Niho, Akiyoshi Baba

Proceedings of KSME-JSME Joint Symposium on Computational Mechanics & CAE 2012 255 - 260 2012年09月

Improved Near-Infrared Sensitivity with a Side-Illuminated Photosensor 査読有り

Tetsuya Ariyoshi, Noriyuki Uryu, Akiyoshi Baba and Yutaka Arima

Jpnese Journal of Applied Physics 51 02BE01 2012年02月

Fabrication of pn junction at the wall of deep trench for near-infrared sensor 査読有り

Akiyoshi Baba, Noriyuki Uryu, Senichi Sumi

24th International Microprocesses and Nanotechnology Conference 2011年10月

Improved Near-Infrared Sensitivity for a Side-Illuminated Photo Sensor 査読有り

Tetsuya Ariyoshi, Noriyuki Uryu, Akiyoshi Baba, Yutaka Arima

2011 Int'l Conference on Solid State Devices and Materials 1031 - 1032 2011年09月

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