Faculty Profiles - KHAJORNRUNGRUANG, Panart

Papers - KHAJORNRUNGRUANG, Panart

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Study on groove pattern layout for slurry flow control in CMP process Reviewed

K. Kimura,K. Nagayama,H. Morishita,Y. Inatsu,P. Khajornrungruang

Advanced Metallization Conference 2006 (ADMETA 2006) ( CMP 5-16 ) 2006.09

A Computational Study on Slurry Flow between a Wafer and CMP Pad with Grooves Reviewed

Katsuya Nagayama,Hirofumi Morishita,Keiichi Kimura,Kazuhiro Tanaka,Panart Khajornrungruang,Yousuke Inatsu

The 11th International Conference on Precision Engineering (ICPE) 277 - 280 2006.09

小径工具切れ刃プロファイルの光回折オンマシン計測に関する研究（第2報，極小径工具(φ300μm)摩耗の測定評価） Reviewed

カチョーンルンルアン　パナート，三好隆志，木村景一，高谷裕浩，原田孝，砂金総一郎

日本機械学会論文集（C編） 72 ( 718 ) 1730 - 1737 2006.06

On-Machine Cutting Edge Profile Measurement for Micro Milling Tool (2nd Report, Micro Endmill (.PHI.300.MU.m) Wear Measurement and Evaluation):2nd Report, Micro Endmill (φ300μm) Wear Measurement and Evaluation Reviewed

KHAJORNRUNGRUANG Panart, MIYOSHI Takashi, TAKAYA Yasuhiro, HARADA Takashi, ISAGO Soichiro

TRANSACTIONS OF THE JAPAN SOCIETY OF MECHANICAL ENGINEERS Series C ( The Japan Society of Mechanical Engineers ) 72 ( 6 ) 1730 - 1737 2006.06

Authorship：Lead author Language：English Publishing type：Research paper (scientific journal)

The extremely precise level of cutting work's demand has been increasing, recently. Therefore, the establishment of a supreme measurement technology for micro endmills during operating on ultra-precision machining center plays an important role in many micro fabrication industries. The “Diffraction Gauge Method”, a novel measuring technique based on far-field laser diffraction, has been proposed to measure cutting-edge profiles of micro tools (φ<500μm) with repeatability of better than 100 nm even though on-machine surroundings. In this paper, cutting-edge profile measurement of worn micro endmills (φ300μm), which operated side-milling on graphite work material, is carried out. Agreement of the measured profiles with SEM image confirms the high accuracy of the measurement technique. Subsequently, the tool wear evaluations in various cutting lengths of micro endmills before and after cutting notify the relationship between increase in tool wears and cutting length. These experimental results verify the validity of our novel micro endmill measurement technique, which can be applied into ultra-precision machining center in the near future.

DOI： 10.1299/kikaic.72.1730

Scopus

CiNii Article

Other Link： https://www.scopus.com/inward/record.uri?partnerID=HzOxMe3b&scp=33748329393&origin=inward

Study on Polishing Characteristics in High Temperature Chemical Mechanical Polishing for SiC Ceramics (Selected paper) Reviewed

Panart Khajornrungruang,Hidenori Matano,Tadashi Matsumoto and Keiichi Kimura

2006 International Conference on Micro/Nano Fabrication Technologies MNPX ( 12 ) 1 - 6 2006.05

Study on UV irradiation CMP process

Kuzuma Hayato, Fukuda Jyunya, Kimura Keiiti, Khajornrungruang Panart

Proceedings of JSPE Semestrial Meeting ( The Japan Society for Precision Engineering ) 2006 ( 0 ) 523 - 524 2006.01

Micro Endmill Cutting–edge Profile Measurement for On–machine Monitoring using Laser Diffraction

Khajornrungruang Panart, Kimura Keiichi, Miyoshi Takashi, Takaya Yasuhiro

Proceedings of JSPE Semestrial Meeting ( The Japan Society for Precision Engineering ) 2006 ( 0 ) 1103 - 1104 2006.01

Authorship：Lead author Language：Japanese Publishing type：Research paper (other academic)

Recently, much more micro–shaped milling work, such as die/mold and parts machining, with supreme precision has been required. Therefore, establishment of the high precision measurement technology for tool cutting–edge profile during operation is indispensable. The aim of our study is to develop a measurement technique, which is based on the far–field laser diffraction, in order to evaluate cutting–edge profiles of micro endmill as sub–micrometer precision. In addition, the technique is applicable for on–machine measurement due to simplicity and long working distance of the optical system. In this article, the measurements of poly–crystalline diamond (PCD) micro endmill diameters are curried out. The measured results show the validity of measurement method and the measurement repeatability.

DOI： 10.11522/pscjspe.2006S.0.1103.0

CiNii Article

Other Link： https://ci.nii.ac.jp/naid/130005027134

20102 An attempt on polishing pad surface modeling in Chemical Mechanical Polishing

Hashiyama Yuuichi, Kimura Keiichi, Panart Khajomrungruang

The Proceedings of Conference of Kanto Branch ( The Japan Society of Mechanical Engineers ) 2006 ( 0 ) 25 - 26 2006.01

Language：Japanese Publishing type：Research paper (other academic)

The material removal mechanism of Chemical Mechanical Polishing has a lot of unidentified aspects which are not yet clarified. Moreover, it is very difficult to build up the systematic simulation system on the mechanism. It is indispensable to model the contact mechanism among abrasive particles, surface of wafer and surface of polishing pad in order to construct a simulation system in CMP. However, the conventional modeling of polishing pad surface is not appropriate for the simulation. In this research, by observing the surface of the polishing pad, a model of the polishing pad surface was proposed. Further, the relationship was considered between the surface structure of polishing pad and material removal mechanism.

DOI： 10.1299/jsmekanto.2006.12.25

CiNii Article

Other Link： https://ci.nii.ac.jp/naid/110006638491

Study on Chemical Mechanical Polishing for SiC Ceramics

Matano Hidenori, Kimura Keiiti, Khajornrungruang Panart, Matumoto Tadashi

Proceedings of JSPE Semestrial Meeting ( The Japan Society for Precision Engineering ) 2006 ( 0 ) 559 - 560 2006.01

Study on slurry flow visualization in CMP process

Inatu Yousuke, Koutake Yoshihiro, Kimura Keiiti, Khajornrungruang Panart

Proceedings of JSPE Semestrial Meeting ( The Japan Society for Precision Engineering ) 2006 ( 0 ) 537 - 538 2006.01

316 Development of On-machine Micro Tool Measurement Device using Laser Diffraction : Fundamental Characteristics of Measurement Device

KHAJORNRUNGRUANG Panart, Kimura Keiichi, MIYOSHI Takashi, TAKAYA Yasuhiro, Ueda Masahiro

The Proceedings of The Manufacturing & Machine Tool Conference ( The Japan Society of Mechanical Engineers ) 2006 ( 0 ) 131 - 132 2006.01

Authorship：Lead author Language：Japanese Publishing type：Research paper (other academic)

According to advanced functionality in a wide variety of equipments in these days, ultra precision, high complexity and high efficiency of fine-fabrication is required. Not only performance of machine tool but also downsizing of high accurate working tool itself has been an important issue to realize above conditions. In this study, on-machine tool measurement technology using laser diffraction which is able to manage micro tool and able to post in the machine tool has been establishing. In this article, the on-machine tool measurement device is developed. The developed on-machine device is carried out a response measurement experiment of hundreds nano-displacement using piezo stage then the fundamental characteristics of the developed measurement device is verified.

DOI： 10.1299/jsmemmt.2006.6.131

CiNii Article

Other Link： https://ci.nii.ac.jp/naid/110006638933

On-machine tool measurement for cutting-edge profile of micro endmill using laser diffraction Reviewed

Khajornrungruang P., Miyoshi T., Takaya Y., Harada T., Isago S.

LEM 2005 - 3rd International Conference on Leading Edge Manufacturing in 21st Century 351 - 356 2005.12

On-Machine Tool Measurement for Cutting-Edge Profile of Micro Endmill using Laser Diffraction Reviewed

P. Khajornrungruang,T. Miyoshi,Y. Takaya,T. Harada and S. Isago

Proceedings of International Conference on Leading Edge Manufacturing in 21st Century (LEM21) ( 05-204 ) 351 - 356 2005.10

2624 3D Cutting edge profile measurement of micro endmill by means of laser diffraction gauge method

TAKAYA Yasuhiro, KHAJORNRUNGRUANG Panart, HAYASHI Terutake, MIYOSHI Takashi

The proceedings of the JSME annual meeting ( The Japan Society of Mechanical Engineers ) 2005 ( 0 ) 85 - 86 2005.01

Language：Japanese Publishing type：Research paper (other academic)

The aim of this study is to develop a new measuring technique bsed on laser diffraction such as Fraunhofer diffraction theory which is called the diffraction gauge method. This method makes it possible to evaluate a three-dimensional cutting-edge profile of a micro-endmill with precision of better than 100nm even though on-machine measurement. The measurement resolution was experimentally achived to be 15nm for a helical endmill and repeatability of ±50nm with valid accuracy for new tool. In this paper, in order to verify that the diffraction gauge method is of practical use such as on-machine measurement, the three-dimensional cutting edge profile measurements of a worn tool with the diameter of 0.3mm, which has performed side milling on graphite with 40000 rpm rotational speed, is discussed. The experimantal results show that the diffraction gauge method has enough high performance to be able to evaluate wear quantity of a worn micro endmill.

DOI： 10.1299/jsmemecjo.2005.4.0_85

CiNii Article

Other Link： https://ci.nii.ac.jp/naid/110006190914

Study on chemical mechanical polishing for SiC ceramics

Kimura Keiichi, Kahjornrungruang Panart, Matano Hidenori, Matsumoto Tadashi

Proceedings of JSPE Semestrial Meeting ( The Japan Society for Precision Engineering ) 2005 ( 0 ) 335 - 336 2005.01

Language：Japanese Publishing type：Research paper (other academic)

SiC ceramics have broad application area due to its high temperarture strength, high heat conductivity and chemical stability. Recently, not only sintered but single crystal SiC are developed and it is expected the application for glass lens mold die material and semicondictor base plate. For the applications, it is required to develop important technology for obtaining defect free surfaces and reasonable cost for finishing. CMP process, as forming chemical reaction layer on material surface and remove, is considered to fulfill the requirements. In the report, polishing in high temperature is tried on SiC polishing to achieve the requirements.

DOI： 10.11522/pscjspe.2005A.0.335.0

CiNii Article

Other Link： https://ci.nii.ac.jp/naid/130004656915

小径工具切れ刃プロファイルの光回折オンマシン計測に関する研究（第１報，光回折ゲージ法の提案とその検証実験） Reviewed

Panart KHAJORNRUNGRUANG、三好隆志、高谷裕浩、原田孝、砂金総一郎

日本機械学会論文集（C編） 70 ( 700 ) 3556 - 3563 2004.12

On-machine cutting edge profile measurement for micro milling tool (1st report, laser diffraction gauge method and its verifications) Reviewed

Khajornrungruang P., Miyoshi T., Takaya Y., Harada T., Isago S.

Nihon Kikai Gakkai Ronbunshu, C Hen/Transactions of the Japan Society of Mechanical Engineers, Part C 70 ( 12 ) 3556 - 3563 2004.12

Authorship：Lead author Language：English Publishing type：Research paper (scientific journal)

A new optical measuring method of cutting edge profiles with a few nanometerresolutions for micro milling tool is proposed. The edge profile is scaled by the width between the first order maxima in a diffraction pattern, which relates to the spacing of a slit-type aperture formed between a reference knife-edge and a tool cutting-edge. The technique is applicable for on-machine measurement due to simplicity and long working distance of the optical system. In this paper, first, the theoretical analysis reveals the measurement resolution, and then the proposal of laser diffraction gauge method is mentioned. Next, the calibratability and the practicability of our technique are affirmed with fundamental experiments. Furthermore, experimental verifications are carried out for commercial tools such as straight-flute and helical-flute of micro endmills. Subsequently, excellent agreement of the profiles, which are measured with our developed experimental systems, with an image from scanning ion microscope verifies that the proposed method is efficient to accurately measure cutting-edge profiles.

DOI： 10.1299/kikaic.70.3556

Scopus

Other Link： https://www.scopus.com/inward/record.uri?partnerID=HzOxMe3b&scp=15544383092&origin=inward

光回折ゲージ法による小径工具切れ刃プロファイル計測に関する研究

高谷裕浩、K.　パナート、三好隆志、河兌坪、原田孝、砂金総一郎

型技術 19 ( 8 ) 120 - 121 2004.07

Laser diffraction edge profile method of micro cutting tool for on-machine measurement Reviewed

Panart Khajornrungruang,Takashi Miyoshi,Yasuhiro Takaya,Satoru Takahashi,Takashi Harada and Soichiro Isago

113 - 118 2003.11

Novel edge profile measurement of micro cutting tool by laser diffraction Reviewed

Panart Khajornrungruang,Takashi Miyoshi,Yasuhiro Takaya,Satoru Takahashi,Takashi Harada and Soichiro Isago

Proceedings of the 4th European Society for Precision Engineering and Nanotechnology (euspen) International Topical Conference 463 - 466 2003.05

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Papers - KHAJORNRUNGRUANG, Panart