Faculty Profiles - KHAJORNRUNGRUANG, Panart

Papers - KHAJORNRUNGRUANG, Panart

Division display1 - 20 of about 230／ All the affair displays >>

Observation of the formation of anisotropic silver microstructures by evanescent wave and electron microscopy Reviewed International journal

Angshuman Pal, Panart Khajornrungruang, Christopher Netzband, Sriveda Alety, S. V. Babu

Nanotechnology 27 ( 7 ) 075708 (1) - 075708 (10) 2016.02

Real time imaging of the growth of silver ribbons by evanescent wave microscopy Reviewed International journal

Angshuman Pal, Panart Khajornrungruang, S. V. Babu

RSC Advances 5 ( 88 ) 71830 - 71834 2015.08

Light scattering model for individual sub-100-nm particle size determination in an evanescent field Invited Reviewed International journal

Khajornrungruang P., Korkmaz S., Angshuman P., Suzuki K., Kimura K., Babu S.V.

Japanese Journal of Applied Physics 55 ( 6S3 ) 06JG02-1 - 06JG02-2 2016.06

Spatial Fourier Transform Analysis of Polishing Pad Surface Topography Reviewed

Panart Khajornrungruang, Keiichi Kimura, Takahisa Okuzono, Keisuke Suzuki, and Takashi Kushida

Japanese Journal of Applied Physics 51 ( 5 ) 2012.05

Direct observation of removal of SiO2 nano-particles from silica surfaces: an evanescent field microscopy study and shear flow acting moment Reviewed International journal

Terayama Y., Khajornrungruang P., Suzuki K., Fujishima H., Hamada S., Wada Y., Hiyama H.

Japanese Journal of Applied Physics 62 ( SH ) 2023.07

Detachment Energy Evaluation in Nano-Particle Cleaning Using Lateral Force Microscopy Reviewed International journal

Terayama Y., Khajornrungruang P., Seo J., Hamada S., Wada Y., Hiyama H.

Applied Sciences Switzerland 14 ( 18 ) 2024.09

Study on On-Machine Visualization of Surface Processing Phenomena in Nanoscale

Goto Daiki, Permpatdechakul Thitipat, Ouchida Shuka, Mizutani Kyo, Khajornrungruang Panart

Proceedings of JSPE Semestrial Meeting ( The Japan Society for Precision Engineering ) 2024S ( 0 ) 284 - 285 2024.02

Authorship：Corresponding author Language：Japanese Publishing type：Research paper (other academic)

We have proposed a dynamic observation method using multi-wavelength evanescent field for three-dimensional tracking and visualization to understand the motion of nano-particle in liquid near the surface. In this report, nanoparticles of different diameters were adhered on the tilt surface, which became invisible in water, and the absolute height of each position of the nano-particle in water was verified using multi-wavelength evanescent optical system and interference optical system, and the particle diameters were calculated from the measured absolute heights. The accuracy of the measurement was within ±5 nm of the actual particle diameter.

DOI： 10.11522/pscjspe.2024s.0_284

CiNii Research

Observation of Moving Nano-Particles in the Vicinity of a Substrate Wall Using Near Field Light (Evanescent Field) Invited Reviewed

KHAJORNRUNGRUANG Panart

Journal of the Japan Society for Precision Engineering ( The Japan Society for Precision Engineering ) 90 ( 2 ) 184 - 188 2024.02

Verification of nano-particle absolute height position measurement from a surface with invisible reference tilt resin by multi-wavelength evanescent fields Invited Reviewed International journal

GOTO Daiki, KHAJORNRUNGRUANG Panart, BLATTLER Aran, TERAYAMA Yutaka, OHTA Yuki

Journal of Advanced Mechanical Design, Systems, and Manufacturing ( The Japan Society of Mechanical Engineers ) 18 ( 4 ) JAMDSM0049 - JAMDSM0049 2024.01

Authorship：Corresponding author Language：English Publishing type：Research paper (scientific journal)

Some nanoscale technologies are being employed without a full understanding of the underlying phenomena. Both static and dynamic observations of nanoparticles are essential for investigating these phenomena. While there are several methods for static observation such as scanning electron microscopy typically in a vacuum environment, however, there are few methods for dynamic observation. One of the dynamic observation methods is to observe nanoparticles using an evanescent field, a unique field that emerges only near the surface being observed. The dynamic observation method has been proposed for measuring the three-dimensional positions of moving nano-particles in liquid using a multi-wavelength evanescent field. However, the absolute height of the nano-particles remains unexplored in this study. Hence, to establish this method, it is necessary to confirm the absolute distance or the height from the surface being observed at the same position by other reference measurement methods. In this paper, an optical resin with a refractive index close to the water was formed as an invisible reference tilt surface that was thinner than 200 nm in height. We also constructed a compact interferometric optical system to utilize optical interferometry that can measure the height of the tilt resin without contact and with nanoscale accuracy. Polystyrene standard nano-particles suspended in water were deposited onto the water-invisible tilt resin and was measured the height at each position on the tilt resin by a multi-wavelength evanescent field. As a result, it was confirmed that the 3D position measurement of particles using multi-wavelength evanescent fields tends to follow the resin surface height well. At the heights under approximately 100 nm, the differences in height were less than 5 nm between multi-wavelength evanescent fields and interferometry measurement, and the precision (2σ) also was approximately 5 nm.

DOI： 10.1299/jamdsm.2024jamdsm0049

Scopus

CiNii Research

Other Link： https://www.jstage.jst.go.jp/article/jamdsm/18/4/18_2024jamdsm0049/_pdf

Study on a Novel Peeling of Nano-Particle (PNP) Process for Localized Material Removal on a 4H-SiC Surface by Controllable Magnetic Field Invited Reviewed International journal

Permpatdechakul Thitipat, Khajornrungruang Panart, Suzuki Keisuke, Kutomi Shotaro

International Journal of Automation Technology ( Fuji Technology Press Ltd. ) 17 ( 4 ) 410 - 421 2023.07

Authorship：Corresponding author Language：English Publishing type：Research paper (scientific journal)

This study proposes a novel process called peeling of nano-particle (PNP) to remove material locally on a hard material surface, such as silicon carbide (SiC), diamond, and gallium nitride (GaN), using the magnetic nano-particles in an aqueous solution controlled by magnetic fields. By the concept of the PNP process, magnetic fields are generated by two solenoid coils, which are sandwiched between the hard material sample, to pull the magnetic nano-particles to adhere to and then peel the material from the sample surface. In this experiment, iron (II, III) oxide (Fe3O4) particles with a diameter size in the range of 50–100 nm were dispersed in water, and the pH value was adjusted to 10 by potassium hydroxide (KOH). The particles were magnetically controlled on the silicon carbide (4H-SiC) surface by the magnetic fields at approximately 17 mT. To confirm the contact phenomenon of the Fe3O4 particles on the 4H-SiC surface during the PNP process, an optical system was developed by applying evanescent field microscopy to limit the observation range to approximately 300 nm from the 4H-SiC surface. According to the experimental observed results, the control phenomenon of two examples of Fe3O4 particles could be observed through their scattering light, which relates to the magnetic field generating sequence wherein the particles were magnetically pulled in and out of the 4H-SiC surface in the limit range of the evanescent field. During the particle pull to the surface, particles were able to be tracked in the X–Y directions during the approach to the 4H-SiC surface. The Brownian motion ranges in all directions of the particles decreased when the particles approached close to the surface due to the pulling magnetic field. Moreover, the magnetic field enforced the magnetic moment of the particle and limited their rotation.

DOI： 10.20965/ijat.2023.p0410

Scopus

CiNii Research

Other Link： https://www.scopus.com/inward/record.uri?partnerID=HzOxMe3b&scp=85164951255&origin=inward

Study on action forces on nano-particle to flat surface using localized remote magnetic field

Permpatdechakul Thitipat, Khajornrungruang Panart, Suzuki Keisuke, Goto Daiki

Proceedings of JSPE Semestrial Meeting ( The Japan Society for Precision Engineering ) 2023S ( 0 ) 384 - 385 2023.03

Authorship：Corresponding author Language：English Publishing type：Research paper (other academic)

By peeling of nano-particle (PNP) process, the magnetic nano-particles in an aqueous solution are employed to be locally magnetically controlled for adhering to a substrate surface and removing the material. In order to remove the material on the surface, the touching phenomenon of particle on surface needs to be confirmed. In this study, the touching phenomenon of nano-particle on the substrate surface was experimentally observed in situ the PNP process by our developed optical system applying multi-wavelength evanescent fields. The action forces, such as DLVO force and magnetic force, on the particle were measured by the height Z of the particle from the substrate surface. Fe3O4 particles with the sized range 50-100nm dispersed in the KOH solution (pH value of 10) were employed to be magnetically pulled to approach a silica glass surface by the controllable magnetic field generated by a solenoid coil. During the magnetic field generating, the height Z of nano-particle were measured at the closest approximately 10 nm, in which the DLVO force at measured height Z approximately 0.5-0.9 pN by calculation. To pull the particle touch on the glass surface, the pulling magnetic force on the particle size in range 50-100 nm should be higher than 1 pN approximately.

DOI： 10.11522/pscjspe.2023s.0_384

CiNii Research

Real Time Nanoscale Observation in Cleaning Phenomena by Evanescent Field

Terayama Yutaka, Khajornrungruang Panart, Suzuki Keisuke, Mori Ryotaro, Hamada Satomi, Wada Yutaka, Hiyama Hirokuni

Proceedings of JSPE Semestrial Meeting ( The Japan Society for Precision Engineering ) 2022S ( 0 ) 126 - 126 2022.03

Study on On-Machine Visualization of Surface Processing Phenomena in Nanoscale:the apparatus development

Khajornrungruang Panart, Shirakawa Hiroaki, Suzuki Keisuke, Sakai Koya

Proceedings of JSPE Semestrial Meeting ( The Japan Society for Precision Engineering ) 2016S ( 0 ) 5 - 6 2016.01

Direct Observation of Sub-100 nm Silica Particle Detachment: Lateral Force and Evanescent Microscope Study Reviewed International journal

Terayama Y., Khajornrungruang P., Seo J., Hamada S., Wada Y., Hiyama H.

Ecs Journal of Solid State Science and Technology 14 ( 4 ) 2025.04

Real Time Nanoscale Observation in Cleaning Phenomena by Evanescent Field

Arima Yu, Khajornrungruang Panart, Kuroe Norita, Nishi Tomoya, Urushihara Natsuko, Wada Yutaka, Hiyama Hirokuni

Proceedings of JSPE Semestrial Meeting ( The Japan Society for Precision Engineering ) 2025S ( 0 ) 203 - 204 2025.03

Authorship：Corresponding author Language：Japanese Publishing type：Research paper (other academic)

Effectively preventing the reattachment of nano-particles on the substrate surface is indispensable in the wafer cleaning process. In this paper, we attempted to track the three-dimensional behavior of sub-100 nm particles in shear flow and elucidate the reattachment phenomenon by using a combined observation method that uses evanescent light field and dark field observation methods in the same field of view and extends the measurement of particle height position from the observed surface from several hundred nm to several um.

DOI： 10.11522/pscjspe.2025s.0_203

CiNii Research

Experimental Investigation of Fluid Pressure Measurement on the polished surface by Optically Total Internal Reflection Intensity from Tiny Roughness

Ohta Yuuki, Khajornrungruang Panart, Ouchida Shuka, Ogata Koki

Proceedings of JSPE Semestrial Meeting ( The Japan Society for Precision Engineering ) 2025S ( 0 ) 126 - 127 2025.03

Authorship：Corresponding author Language：Japanese Publishing type：Research paper (other academic)

Nanoscale phenomena such as attached and/or detached nano-objects and/or surface damage caused by fluid pressure waves (density changes) generated near the polished surface. However, pressure waves near the surface are not measured and the mechanism is not clear. In this article, we experimentally considered a method to measure the refractive index near the surface using decreased of optically internal reflection intensity due to the tiny surface roughness, which would change with fluid density.

DOI： 10.11522/pscjspe.2025s.0_126

CiNii Research

Identification of Nano-bubbles from Nano-particles in Fluid Field by optical observation

Fujishima Hibiki, Khajornrungruang Panart, Ohta Yuuki, Tajima Yoshito

Proceedings of JSPE Semestrial Meeting ( The Japan Society for Precision Engineering ) 2025S ( 0 ) 565 - 565 2025.03

Authorship：Corresponding author Language：Japanese Publishing type：Research paper (other academic)

In recent years, nano-bubbles have been utilized across various fields, with their effectiveness actively explored. However, there are few examples of microscopic studies, and the effects of nano-bubbles are unknown. Distinguishing between nano-bubbles and nano-particles is essential for understanding nano-bubble behavior when they mixed. Therefore, we observed the behavior of nano-bubbles and nano-particles in liquids using dark-field microscopy, focusing on their identification. In this paper, we verify that the rapid fluctuations in scattered light intensity of nano-bubbles are caused by their deformation.

DOI： 10.11522/pscjspe.2025s.0_565

CiNii Research

Study on action forces on nano-particle to flat surface using localized remote magnetic field

Tajima Yoshito, Khajornrungruang Panart, Fujishima Hibiki

Proceedings of JSPE Semestrial Meeting ( The Japan Society for Precision Engineering ) 2025S ( 0 ) 131 - 132 2025.03

Authorship：Corresponding author Language：Japanese Publishing type：Research paper (other academic)

In wet processes such as polishing or cleaning, extremely small interaction forces act between nano-abrasive particles and the substrate surface. Understanding these interaction forces enables efficient determination of conditions for high-precision processing. In this article, we enhanced magnetic force using multiple twisted coils for measuring interaction forces at closer proximities to the surface and compared the results with those obtained using a single coil under identical applied current conditions. It was suggested that the enhanced attraction allowed the particles to approach the substrate surface more closely, enabling the measurement of interaction forces in cases of ultra-close nano-abrasive particles.

DOI： 10.11522/pscjspe.2025s.0_131

CiNii Research

Spectral Characteristic Verification of Multi-wavelength Evanescent Light Optical Systems set up with Pellin-Broca Prism

Ouchida Shuka, Khajornrungruang Panart, Yamagata Ryunosuke

Proceedings of JSPE Semestrial Meeting ( The Japan Society for Precision Engineering ) 2025S ( 0 ) 558 - 558 2025.03

Authorship：Corresponding author Language：Japanese Publishing type：Research paper (other academic)

The conventional optical systems have the limitation for using the multi-wavelengths due to a large systems, in which the dichroic mirrors and cameras are employed. We have been developing a multi-wavelength evanescent optical systems by using a prism to spectralize wavelengths. Moreover, not only the input wavelengths, but also the other wavelengths were able to be observed such as fluorescence light. In this paper, we estimated the wavelength of fluorescence by fluorescent particles and verified measured the wavelength by the developed optical system.

DOI： 10.11522/pscjspe.2025s.0_558

CiNii Research

Measurement Accuracy of Tool Edge Position in Evanescent Light Fields on Soft Matter Surfaces

Ogata Koki, Khajornrungruang Panart, Terayama Yutaka, Ohta Yuuki

Proceedings of JSPE Semestrial Meeting ( The Japan Society for Precision Engineering ) 2025S ( 0 ) 70 - 71 2025.03

Authorship：Corresponding author Language：Japanese Publishing type：Research paper (other academic)

Methods for measuring approach distances of the microtool edge in evanescent light field on solid material surfaces such as glass and SiC has been established. However, it is necessary to bring the tool edge to several hundred nm from the surface, so tool edges and substrates may be broken because of touching. Accordingly, in order to examine the practicality of evanescent light on soft matter surfaces, we report on evaluating the measurement accuracy of the distance between the silicone surface and the tool edge height-controlled by piezoelectric element in this article.

DOI： 10.11522/pscjspe.2025s.0_70

CiNii Research

　PREV- NEXT 　

<KHAJORNRUNGRUANG, Panart>

Papers - KHAJORNRUNGRUANG, Panart