Faculty Profiles - KHAJORNRUNGRUANG, Panart

Papers - KHAJORNRUNGRUANG, Panart

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Observation of the formation of anisotropic silver microstructures by evanescent wave and electron microscopy Reviewed International journal

Angshuman Pal, Panart Khajornrungruang, Christopher Netzband, Sriveda Alety, S. V. Babu

Nanotechnology 27 ( 7 ) 075708 (1) - 075708 (10) 2016.02

Real time imaging of the growth of silver ribbons by evanescent wave microscopy Reviewed International journal

Angshuman Pal, Panart Khajornrungruang, S. V. Babu

RSC Advances 5 ( 88 ) 71830 - 71834 2015.08

Light scattering model for individual sub-100-nm particle size determination in an evanescent field Invited Reviewed International journal

Khajornrungruang P., Korkmaz S., Angshuman P., Suzuki K., Kimura K., Babu S.V.

Japanese Journal of Applied Physics 55 ( 6S3 ) 06JG02-1 - 06JG02-2 2016.06

Spatial Fourier Transform Analysis of Polishing Pad Surface Topography Reviewed

Panart Khajornrungruang, Keiichi Kimura, Takahisa Okuzono, Keisuke Suzuki, and Takashi Kushida

Japanese Journal of Applied Physics 51 ( 5 ) 2012.05

Direct observation of removal of SiO2 nano-particles from silica surfaces: an evanescent field microscopy study and shear flow acting moment Reviewed International journal

Terayama Y., Khajornrungruang P., Suzuki K., Fujishima H., Hamada S., Wada Y., Hiyama H.

Japanese Journal of Applied Physics 62 ( SH ) 2023.07

Study on On-Machine Visualization of Surface Processing Phenomena in Nanoscale

Goto Daiki, Permpatdechakul Thitipat, Ouchida Shuka, Mizutani Kyo, Khajornrungruang Panart

Proceedings of JSPE Semestrial Meeting ( The Japan Society for Precision Engineering ) 2024S ( 0 ) 284 - 285 2024.02

Authorship：Corresponding author Language：Japanese Publishing type：Research paper (other academic)

We have proposed a dynamic observation method using multi-wavelength evanescent field for three-dimensional tracking and visualization to understand the motion of nano-particle in liquid near the surface. In this report, nanoparticles of different diameters were adhered on the tilt surface, which became invisible in water, and the absolute height of each position of the nano-particle in water was verified using multi-wavelength evanescent optical system and interference optical system, and the particle diameters were calculated from the measured absolute heights. The accuracy of the measurement was within ±5 nm of the actual particle diameter.

DOI： 10.11522/pscjspe.2024s.0_284

CiNii Research

Observation of Moving Nano-Particles in the Vicinity of a Substrate Wall Using Near Field Light (Evanescent Field) Invited Reviewed

KHAJORNRUNGRUANG Panart

Journal of the Japan Society for Precision Engineering ( The Japan Society for Precision Engineering ) 90 ( 2 ) 184 - 188 2024.02

Verification of nano-particle absolute height position measurement from a surface with invisible reference tilt resin by multi-wavelength evanescent fields Invited Reviewed International journal

GOTO Daiki, KHAJORNRUNGRUANG Panart, BLATTLER Aran, TERAYAMA Yutaka, OHTA Yuki

Journal of Advanced Mechanical Design, Systems, and Manufacturing ( The Japan Society of Mechanical Engineers ) 18 ( 4 ) JAMDSM0049 - JAMDSM0049 2024.01

Authorship：Corresponding author Language：English Publishing type：Research paper (scientific journal)

Some nanoscale technologies are being employed without a full understanding of the underlying phenomena. Both static and dynamic observations of nanoparticles are essential for investigating these phenomena. While there are several methods for static observation such as scanning electron microscopy typically in a vacuum environment, however, there are few methods for dynamic observation. One of the dynamic observation methods is to observe nanoparticles using an evanescent field, a unique field that emerges only near the surface being observed. The dynamic observation method has been proposed for measuring the three-dimensional positions of moving nano-particles in liquid using a multi-wavelength evanescent field. However, the absolute height of the nano-particles remains unexplored in this study. Hence, to establish this method, it is necessary to confirm the absolute distance or the height from the surface being observed at the same position by other reference measurement methods. In this paper, an optical resin with a refractive index close to the water was formed as an invisible reference tilt surface that was thinner than 200 nm in height. We also constructed a compact interferometric optical system to utilize optical interferometry that can measure the height of the tilt resin without contact and with nanoscale accuracy. Polystyrene standard nano-particles suspended in water were deposited onto the water-invisible tilt resin and was measured the height at each position on the tilt resin by a multi-wavelength evanescent field. As a result, it was confirmed that the 3D position measurement of particles using multi-wavelength evanescent fields tends to follow the resin surface height well. At the heights under approximately 100 nm, the differences in height were less than 5 nm between multi-wavelength evanescent fields and interferometry measurement, and the precision (2σ) also was approximately 5 nm.

DOI： 10.1299/jamdsm.2024jamdsm0049

Scopus

CiNii Research

Other Link： https://www.jstage.jst.go.jp/article/jamdsm/18/4/18_2024jamdsm0049/_pdf

Study on a Novel Peeling of Nano-Particle (PNP) Process for Localized Material Removal on a 4H-SiC Surface by Controllable Magnetic Field Invited Reviewed International journal

Permpatdechakul Thitipat, Khajornrungruang Panart, Suzuki Keisuke, Kutomi Shotaro

International Journal of Automation Technology ( Fuji Technology Press Ltd. ) 17 ( 4 ) 410 - 421 2023.07

Authorship：Corresponding author Language：English Publishing type：Research paper (scientific journal)

This study proposes a novel process called peeling of nano-particle (PNP) to remove material locally on a hard material surface, such as silicon carbide (SiC), diamond, and gallium nitride (GaN), using the magnetic nano-particles in an aqueous solution controlled by magnetic fields. By the concept of the PNP process, magnetic fields are generated by two solenoid coils, which are sandwiched between the hard material sample, to pull the magnetic nano-particles to adhere to and then peel the material from the sample surface. In this experiment, iron (II, III) oxide (Fe3O4) particles with a diameter size in the range of 50–100 nm were dispersed in water, and the pH value was adjusted to 10 by potassium hydroxide (KOH). The particles were magnetically controlled on the silicon carbide (4H-SiC) surface by the magnetic fields at approximately 17 mT. To confirm the contact phenomenon of the Fe3O4 particles on the 4H-SiC surface during the PNP process, an optical system was developed by applying evanescent field microscopy to limit the observation range to approximately 300 nm from the 4H-SiC surface. According to the experimental observed results, the control phenomenon of two examples of Fe3O4 particles could be observed through their scattering light, which relates to the magnetic field generating sequence wherein the particles were magnetically pulled in and out of the 4H-SiC surface in the limit range of the evanescent field. During the particle pull to the surface, particles were able to be tracked in the X–Y directions during the approach to the 4H-SiC surface. The Brownian motion ranges in all directions of the particles decreased when the particles approached close to the surface due to the pulling magnetic field. Moreover, the magnetic field enforced the magnetic moment of the particle and limited their rotation.

DOI： 10.20965/ijat.2023.p0410

Scopus

CiNii Research

Other Link： https://www.scopus.com/inward/record.uri?partnerID=HzOxMe3b&scp=85164951255&origin=inward

Study on action forces on nano-particle to flat surface using localized remote magnetic field

Permpatdechakul Thitipat, Khajornrungruang Panart, Suzuki Keisuke, Goto Daiki

Proceedings of JSPE Semestrial Meeting ( The Japan Society for Precision Engineering ) 2023S ( 0 ) 384 - 385 2023.03

Authorship：Corresponding author Language：English Publishing type：Research paper (other academic)

By peeling of nano-particle (PNP) process, the magnetic nano-particles in an aqueous solution are employed to be locally magnetically controlled for adhering to a substrate surface and removing the material. In order to remove the material on the surface, the touching phenomenon of particle on surface needs to be confirmed. In this study, the touching phenomenon of nano-particle on the substrate surface was experimentally observed in situ the PNP process by our developed optical system applying multi-wavelength evanescent fields. The action forces, such as DLVO force and magnetic force, on the particle were measured by the height Z of the particle from the substrate surface. Fe3O4 particles with the sized range 50-100nm dispersed in the KOH solution (pH value of 10) were employed to be magnetically pulled to approach a silica glass surface by the controllable magnetic field generated by a solenoid coil. During the magnetic field generating, the height Z of nano-particle were measured at the closest approximately 10 nm, in which the DLVO force at measured height Z approximately 0.5-0.9 pN by calculation. To pull the particle touch on the glass surface, the pulling magnetic force on the particle size in range 50-100 nm should be higher than 1 pN approximately.

DOI： 10.11522/pscjspe.2023s.0_384

CiNii Research

Real Time Nanoscale Observation in Cleaning Phenomena by Evanescent Field

Terayama Yutaka, Khajornrungruang Panart, Suzuki Keisuke, Mori Ryotaro, Hamada Satomi, Wada Yutaka, Hiyama Hirokuni

Proceedings of JSPE Semestrial Meeting ( The Japan Society for Precision Engineering ) 2022S ( 0 ) 126 - 126 2022.03

Study on On-Machine Visualization of Surface Processing Phenomena in Nanoscale:the apparatus development

Khajornrungruang Panart, Shirakawa Hiroaki, Suzuki Keisuke, Sakai Koya

Proceedings of JSPE Semestrial Meeting ( The Japan Society for Precision Engineering ) 2016S ( 0 ) 5 - 6 2016.01

水酸化フラーレンを用いたSiCウェハの高効率研磨に関する研究

森井将希, 鈴木恵友, 西澤秀明, カチョーンルンルアンパナート, 判谷太輔

精密工学会学術講演会講演論文集 ( 公益社団法人精密工学会 ) 2024S ( 0 ) 682 - 683 2024.02

Language：Japanese Publishing type：Research paper (other academic)

SiCは高性能パワー半導体材料として期待されているが、高硬度かつ化学的に安定なため加工が困難である．コロイダルシリカを用いたSiC-CMPには多くの時間を要する．一方，ダイヤモンド砥粒を用いることで高効率な研磨が可能だが，基板表面に多くの欠陥や転移を発生させてしまう．本研究では水酸化フラーレンを用いてシリカとダイヤモンドの効果を高め，高効率研磨と平滑面の両立を試みたので，その結果を報告する．

DOI： 10.11522/pscjspe.2024s.0_682

CiNii Research

Real Time Nanoparticle Observation in Cleaning Phenomena by Evanescent Field

Kuroe Norita, Khajornrungruang Panart, Arima Yu, Hamada Satomi, Wada Yutaka, Hiyama Hirokuni

Proceedings of JSPE Semestrial Meeting ( The Japan Society for Precision Engineering ) 2024S ( 0 ) 688 - 689 2024.02

Authorship：Corresponding author Language：Japanese Publishing type：Research paper (other academic)

Preventing the re-deposition of nano-particles on the substrate surface is essential in wafer cleaning. Although 3D measurement of the behavior of nano-particles that have been detached and moved by shear flow generated in the extreme vicinity of the surface (moving position) has been performed, it is necessary to use this method in combination with the dark-field observation method, which was limited to observation of suspended particles in very close proximity with surface-localized light. In this paper, we report on our attempt to utilize defocusing using cylindrical lenses to obtain sufficient longitudinal resolution for shallow and deep position measurement of moving particles.

DOI： 10.11522/pscjspe.2024s.0_688

CiNii Research

Spectral Characteristic Verification of Multi-wavelength Evanescent Light Optical System set up with Pellin-Broca Prism Reviewed

Ouchida Shuka, Goto Daiki, Khajornrungruang Panart

Proceedings of JSPE Semestrial Meeting ( The Japan Society for Precision Engineering ) 2024S ( 0 ) 329 - 330 2024.02

Authorship：Corresponding author Language：Japanese Publishing type：Research paper (other academic)

Although it is possible to measure the height of nano-particles near the surface using multi-wavelength evanescent light optical system, conventional optical system can only observe two wavelengths using such as dichroic mirrors. Using an optical system that is not limited to the number of wave-length or certain wavelength, has the advantage of being able to measure height with higher accuracy. In this paper, we propose spectroscopic method of multi-wavelength evanescent light using a Pellin-Broca prism and verify the spectral performance of the prism. This turns out to be approximately 0.25 nm/pixel.

DOI： 10.11522/pscjspe.2024s.0_329

CiNii Research

Study on action forces on nano-particle to flat surface using localized remote magnetic field

Mizutani Kyo, Permpatdechakul Thitipat, Goto Daiki, Khajornrungruang Panart

Proceedings of JSPE Semestrial Meeting ( The Japan Society for Precision Engineering ) 2024S ( 0 ) 231 - 232 2024.02

Authorship：Corresponding author Language：Japanese Publishing type：Research paper (other academic)

Although magnetic nanoparticles are currently used as a method for precision polishing, localized processing is difficult due to the possible lack of control over magnetic nanoparticles. Therefore, in this study, the relationship between magnetic flux density and force was investigated by comparing the magnitude of magnetic force required for nanoparticles to attach to the substrate surface by simulation and experiment using a solenoid coil for localized control of magnetic nanoparticles.

DOI： 10.11522/pscjspe.2024s.0_231

CiNii Research

Study on Measurement of Sub-100 nm Particles on Micro-Porous Surfaces by Optical Interferometry

Kutomi Shotaro, Kuroe Norita, Khajornrungruang Panart

Proceedings of JSPE Semestrial Meeting ( The Japan Society for Precision Engineering ) 2024S ( 0 ) 327 - 328 2024.02

Authorship：Corresponding author Language：Japanese Publishing type：Research paper (other academic)

The nano-particles on micro-porous surfaces neighboring edges, and on an inside of the pores are difficult to be observed by dark-field microscopy. Because the nano-particles neighboring porous edges scattering light are covered up by considerably high scattering light from their edges. An inclined dark field illumination light is not also able to reach inside pores in wide regions to scatter the light from the nano-particle inside their micro-sized pores. Therefore, we have attempted to observe nano-particles adhered on inside micro porous surfaces by an optical interference. In this paper, we report the detection results of silica nano- particles on the inside of micro-porous surfaces by detecting and evaluating nano-particles on an inclined substrate surface regarded as an inside of porous surface.

DOI： 10.11522/pscjspe.2024s.0_327

CiNii Research

Research on polished particles of novel carbon allotropes using fullerenes (2nd report)

Takeiri Junpei, Suzuki Keisuke, Iura Hiroaki, Hantani Taisuke, Morii Masaki, Nishizawa Hideaki, KHAJORNRUNGRUANG Panart

Proceedings of JSPE Semestrial Meeting ( The Japan Society for Precision Engineering ) 2024S ( 0 ) 555 - 556 2024.02

Language：Japanese Publishing type：Research paper (other academic)

For the purpose of high efficiency polishing of diamond substrates, which are hard and fragile materials, we have developed fullerene C60 composite polishing fine particles. As a result of applying the developed fine particles to the polishing of the diamond substrate, it was confirmed that the material removal rate was improved and the surface roughness of the polished surface was reduced. In addition, a carbon allotrope different from fullerene C60 was confirmed in the process of making fine particles. In this talk, we will report on the outline of the developed fine particles and the polishing results.

DOI： 10.11522/pscjspe.2024s.0_555

CiNii Research

Experimental In-Situ Observatory on Brownian Motion Behavior of 105 nm Sized Silica Particles During Chemical Mechanical Polishing of 4H-SiC by an Evanescent Field Reviewed International journal

Permpatdechakul Thitipat, Khajornrungruang Panart, Suzuki Keisuke, Blattler Aran, Inthiam Jiraphan

International Journal of Automation Technology ( Fuji Technology Press Ltd. ) 18 ( 1 ) 47 - 57 2024.01

Authorship：Corresponding author Language：English Publishing type：Research paper (scientific journal)

The experimentally observing optical systems for on-machine measurement have been developed to study on nano-polishing phenomena during the chemical mechanical polishing process, which is a wet process in semiconductor manufacturing. The developed optical system employs an evanescent field to selectively enhance exclusively the observatory of phenomena occurring on the surface being polished, offering a lateral resolving power of approximately 400 nm, in the slurry concentration of up to 5 wt% based on the numerical aperture of the objective lens. In addition, there is also the observability of 105 nm and down to 55 nm-sized silica particles without requiring additive fluorescence agents in or around the nano-particles, even when these particles are moving on surfaces such as silica glass or hard materials (silicon carbide: 4H-SiC). Consequently, the motion behavior of nano-particles disjoining with polishing pad asperity was explored and discussed, in this paper. Experimental results revealed that the polishing pad spatially constrains the movement of particles between the pad and the substrate surface, guiding them toward the surface being polished. During pad sliding, fluidically dragged nano-particles exhibit slower movement than the polishing pad sliding speed while retaining the Brownian motion. Furthermore, 105 nm-sized silica particles did not continuously approach to attach onto the SiC surface; the nano-particles approached in steps with reduced Brownian motion in all directions before attaching. This behavior can be attributed to the effects of van der Waals attraction and electrostatic repulsion forces between the particle and the substrate surfaces.

DOI： 10.20965/ijat.2024.p0047

Scopus

CiNii Research

Other Link： https://ndlsearch.ndl.go.jp/books/R000000004-I033252388

Optical Evanescent Field for Direct Observation of Sub-100nm Particle Motion on Glass Surface Invited Reviewed International journal

Khajornrungruang P., Permpatdechakul T., Suzuki K., Blattler A., Terayama Y., Goto D., Phaisalpanumas P., Bun-Athuek N., Phunopas A.

2024 1st International Conference on Robotics, Engineering, Science, and Technology, RESTCON 2024 50 - 54 2024.01

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Papers - KHAJORNRUNGRUANG, Panart