Papers - KHAJORNRUNGRUANG, Panart
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Non-contact micro cutting tool diameter measurement using laser diffraction Reviewed
Khajornrungruang P., Kimura K., Suzuki H., Suzuki K.
Proceedings of the 8th International Conference on Leading Edge Manufacturing in 21st Century Lem 2015 2015.10
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Study on dynamic observation method for fine particles during Chemical Mechanical Polishing using optical transparency micro-patterned pad Reviewed
Oniki T., Khajornrungruang P., Suzuki K.
Proceedings of the 8th International Conference on Leading Edge Manufacturing in 21st Century Lem 2015 2015.10
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Non-Contact Micro Cutting Tool Diameter Measurement using Laser Diffraction Reviewed
Panart Khajornrungruang, Keiichi Kimura, Hiroshi Suzuki, Keisuke Suzuki
Proceedings of the 8th International Conference on Leading Edge Manufacturing in 21st Century (LEM21) Accepted 2015.10
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Determination of Individual Sub 100 nm Nano-Particle Size inan Evanescent Field using Scattering Light Intensity Reviewed
Panart Khajornrungruang, Sevim Korkmaz, Angshuman Pal, Keisuke Suzuki, Keiichi Kimura, S. V. Babu
Advanced Metallization Conference 2015 2015.09
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Study on evaluation method for polishing pad surface topography based on optical fourier transform Reviewed
Khajornrungruang P., Suzuki K., Kushida T., Tajiri T., Matsuo H., Mochizuki Y., Hiyama H., Kimura K.
ICPT 2014 - Proceedings of International Conference on Planarization/CMP Technology 2014 205 - 208 2015.01
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2108 Study on dynamic observation method for fine particles during Chemical Mechanical Polishing using optical transparency micro-patterned pad Reviewed
2015 ( 0 ) _2108 - 1_-_2108-5_ 2015.01
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1516 Non-Contact Micro Cutting Tool Diameter Measurement using Laser Diffraction Reviewed
2015 ( 0 ) _1516 - 1_-_1516-4_ 2015.01
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Study on sub 50 nm sized particle dynamic observation in water using evanescent field with mobile apparatus Reviewed
73 - 77 2014.11
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Study on dynamic observation of sub-50 nm sized particles in water using evanescent field with a compact and mobile apparatus Reviewed International journal
Khajornrungruang P., Dean P.J., Babu S.V.
Proceedings - ASPE 2014 Annual Meeting 73 - 77 2014.01
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「寄書」見えない可視光
カチョーンルンルアン パナート
Voice of CMP, No. 25 ( 精密工学会 プラナリゼーションCMPとその応用技術専門委員会 ) 2013.12
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Nano-Sized Particles Detection and Analysis in Solutions using Evanescent Field Invited
2013.09
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Study on fine particles behavior in slurry flow between wafer and polishing pad as a material removal process in CMP Invited Reviewed
345 - 350 2013.01
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高速加工における小径工具の高精度オンマシン計測
カチョーンルンルアン パナート、木村景一、鈴木裕
機械技術 ( 日刊工業新聞社 ) 60 ( 7 ) 38 - 41 2012.07
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Micro Tool Cutting Edge Profile Measurement using Laser Diffraction Method
Die and Mould Technology 27 ( 7 ) 124 2012.07
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On-machine measurement of a distance between high speed rotation tool tip and workpiece by laser diffraction Reviewed
Panart Khajornrungruang, Keiichi Kimura, Keisuke Suzuki
251 - 254 2012.06
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High precision tool cutting edge monitoring using laser diffraction for on-machine measurement Invited Reviewed International journal
Khajornrungruang P., Kimura K., Takaya Y., Suzuki K.
International Journal of Automation Technology 6 ( 2 ) 163 - 167 2012.03
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High Precision Tool Cutting Edge Monitoring Using Laser Diffraction for On-Machine Measurement Reviewed
Panart Khajornrungruang, Keiichi Kimura, Yasuhiro Takaya, Keisuke Suzuki
International Journal of Automation Technology 6 ( 2 ) 163 - 167 2012.03
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On-machine measurement of a distance between high speed rotation tool tip and workpiece by laser diffraction Reviewed
1 251 - 254 2012.01
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Study on fine particle behavior in slurry flow between wafer and polishing pad as a material removal process in CMP Invited Reviewed
Kimura K., Suzuki K., Khajornrungruang P.
ICPT 2012 - International Conference on Planarization/CMP Technology, Proceedings 345 - 350 2012.01
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Study on Sapphire CMP Slurry using Water-soluble Fullerenol as Fine Particles Reviewed
Keiichi Kimura,Panart Khajornrungruang,Eiichiro Okamoto
Proc of International Conference on Planarization/CMP Technology 287 - 292 2011.11