Faculty Profiles - KHAJORNRUNGRUANG, Panart

Papers - KHAJORNRUNGRUANG, Panart

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Study on slurry flow visualization in CMP process

Inatu Yousuke, Koutake Yoshihiro, Kimura Keiiti, Khajornrungruang Panart

Proceedings of JSPE Semestrial Meeting ( The Japan Society for Precision Engineering ) 2006 ( 0 ) 537 - 538 2006.01

316 Development of On-machine Micro Tool Measurement Device using Laser Diffraction : Fundamental Characteristics of Measurement Device

KHAJORNRUNGRUANG Panart, Kimura Keiichi, MIYOSHI Takashi, TAKAYA Yasuhiro, Ueda Masahiro

The Proceedings of The Manufacturing & Machine Tool Conference ( The Japan Society of Mechanical Engineers ) 2006 ( 0 ) 131 - 132 2006.01

Authorship：Lead author Language：Japanese Publishing type：Research paper (other academic)

According to advanced functionality in a wide variety of equipments in these days, ultra precision, high complexity and high efficiency of fine-fabrication is required. Not only performance of machine tool but also downsizing of high accurate working tool itself has been an important issue to realize above conditions. In this study, on-machine tool measurement technology using laser diffraction which is able to manage micro tool and able to post in the machine tool has been establishing. In this article, the on-machine tool measurement device is developed. The developed on-machine device is carried out a response measurement experiment of hundreds nano-displacement using piezo stage then the fundamental characteristics of the developed measurement device is verified.

DOI： 10.1299/jsmemmt.2006.6.131

CiNii Article

Other Link： https://ci.nii.ac.jp/naid/110006638933

On-machine tool measurement for cutting-edge profile of micro endmill using laser diffraction Reviewed

Khajornrungruang P., Miyoshi T., Takaya Y., Harada T., Isago S.

LEM 2005 - 3rd International Conference on Leading Edge Manufacturing in 21st Century 351 - 356 2005.12

On-Machine Tool Measurement for Cutting-Edge Profile of Micro Endmill using Laser Diffraction Reviewed

P. Khajornrungruang,T. Miyoshi,Y. Takaya,T. Harada and S. Isago

Proceedings of International Conference on Leading Edge Manufacturing in 21st Century (LEM21) ( 05-204 ) 351 - 356 2005.10

Study on chemical mechanical polishing for SiC ceramics

Kimura Keiichi, Kahjornrungruang Panart, Matano Hidenori, Matsumoto Tadashi

Proceedings of JSPE Semestrial Meeting ( The Japan Society for Precision Engineering ) 2005 ( 0 ) 335 - 336 2005.01

Language：Japanese Publishing type：Research paper (other academic)

SiC ceramics have broad application area due to its high temperarture strength, high heat conductivity and chemical stability. Recently, not only sintered but single crystal SiC are developed and it is expected the application for glass lens mold die material and semicondictor base plate. For the applications, it is required to develop important technology for obtaining defect free surfaces and reasonable cost for finishing. CMP process, as forming chemical reaction layer on material surface and remove, is considered to fulfill the requirements. In the report, polishing in high temperature is tried on SiC polishing to achieve the requirements.

DOI： 10.11522/pscjspe.2005A.0.335.0

CiNii Article

Other Link： https://ci.nii.ac.jp/naid/130004656915

2624 3D Cutting edge profile measurement of micro endmill by means of laser diffraction gauge method

TAKAYA Yasuhiro, KHAJORNRUNGRUANG Panart, HAYASHI Terutake, MIYOSHI Takashi

The proceedings of the JSME annual meeting ( The Japan Society of Mechanical Engineers ) 2005 ( 0 ) 85 - 86 2005.01

Language：Japanese Publishing type：Research paper (other academic)

The aim of this study is to develop a new measuring technique bsed on laser diffraction such as Fraunhofer diffraction theory which is called the diffraction gauge method. This method makes it possible to evaluate a three-dimensional cutting-edge profile of a micro-endmill with precision of better than 100nm even though on-machine measurement. The measurement resolution was experimentally achived to be 15nm for a helical endmill and repeatability of ±50nm with valid accuracy for new tool. In this paper, in order to verify that the diffraction gauge method is of practical use such as on-machine measurement, the three-dimensional cutting edge profile measurements of a worn tool with the diameter of 0.3mm, which has performed side milling on graphite with 40000 rpm rotational speed, is discussed. The experimantal results show that the diffraction gauge method has enough high performance to be able to evaluate wear quantity of a worn micro endmill.

DOI： 10.1299/jsmemecjo.2005.4.0_85

CiNii Article

Other Link： https://ci.nii.ac.jp/naid/110006190914

小径工具切れ刃プロファイルの光回折オンマシン計測に関する研究（第１報，光回折ゲージ法の提案とその検証実験） Reviewed

Panart KHAJORNRUNGRUANG、三好隆志、高谷裕浩、原田孝、砂金総一郎

日本機械学会論文集（C編） 70 ( 700 ) 3556 - 3563 2004.12

On-machine cutting edge profile measurement for micro milling tool (1st report, laser diffraction gauge method and its verifications) Reviewed

Khajornrungruang P., Miyoshi T., Takaya Y., Harada T., Isago S.

Nihon Kikai Gakkai Ronbunshu, C Hen/Transactions of the Japan Society of Mechanical Engineers, Part C 70 ( 12 ) 3556 - 3563 2004.12

Authorship：Lead author Language：English Publishing type：Research paper (scientific journal)

A new optical measuring method of cutting edge profiles with a few nanometerresolutions for micro milling tool is proposed. The edge profile is scaled by the width between the first order maxima in a diffraction pattern, which relates to the spacing of a slit-type aperture formed between a reference knife-edge and a tool cutting-edge. The technique is applicable for on-machine measurement due to simplicity and long working distance of the optical system. In this paper, first, the theoretical analysis reveals the measurement resolution, and then the proposal of laser diffraction gauge method is mentioned. Next, the calibratability and the practicability of our technique are affirmed with fundamental experiments. Furthermore, experimental verifications are carried out for commercial tools such as straight-flute and helical-flute of micro endmills. Subsequently, excellent agreement of the profiles, which are measured with our developed experimental systems, with an image from scanning ion microscope verifies that the proposed method is efficient to accurately measure cutting-edge profiles.

DOI： 10.1299/kikaic.70.3556

Scopus

Other Link： https://www.scopus.com/inward/record.uri?partnerID=HzOxMe3b&scp=15544383092&origin=inward

光回折ゲージ法による小径工具切れ刃プロファイル計測に関する研究

高谷裕浩、K.　パナート、三好隆志、河兌坪、原田孝、砂金総一郎

型技術 19 ( 8 ) 120 - 121 2004.07

Laser diffraction edge profile method of micro cutting tool for on-machine measurement Reviewed

Panart Khajornrungruang,Takashi Miyoshi,Yasuhiro Takaya,Satoru Takahashi,Takashi Harada and Soichiro Isago

113 - 118 2003.11

Novel edge profile measurement of micro cutting tool by laser diffraction Reviewed

Panart Khajornrungruang,Takashi Miyoshi,Yasuhiro Takaya,Satoru Takahashi,Takashi Harada and Soichiro Isago

Proceedings of the 4th European Society for Precision Engineering and Nanotechnology (euspen) International Topical Conference 463 - 466 2003.05

レーザ回折法による小径工具切れ刃先端の3次元プロファイル計測

高谷裕浩、K.　パナート、三好隆志、高橋哲、原田孝、砂金総一郎

型技術 17 ( 8 ) 106 - 107 2002.07

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Papers - KHAJORNRUNGRUANG, Panart